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Preparation of Semi-Insulating Material by Annealing Undoped InP
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作者 赵有文 董宏伟 +4 位作者 焦景华 赵建群 林兰英 孙聂枫 孙同年 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2002年第3期285-289,共5页
Semi insulating (SI) InP wafers of 50 and 75mm in diameter can be obtained by annealing of undoped liquid encapsulated Czochralski (LEC) InP at 930℃ for 80h.The annealing ambient can be pure phosphorus (PP) or iron ... Semi insulating (SI) InP wafers of 50 and 75mm in diameter can be obtained by annealing of undoped liquid encapsulated Czochralski (LEC) InP at 930℃ for 80h.The annealing ambient can be pure phosphorus (PP) or iron phosphide (IP).The IP SI InP wafers have good electrical parameters and uniformity of whole wafer.However,PP SI InP wafers exhibit poor uniformity and electrical parameters.Photoluminescence which is subtle to deep defect appears in IP annealed semi insulating InP.Traps in annealed SI InP are detected by the spectroscopy of photo induced current transient.The results indicate that there are fewer traps in IP annealed undoped SI InP than those in as grown Fe doped and PP undoped SI InP.The formation mechanism of deep defects in annealed undoped InP is discussed. 展开更多
关键词 indium phosphide semi insulating ANNEALING
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High electron mobility of modulation doped GaAs after growing InP by solid source molecular beam epitaxy
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作者 舒永春 皮彪 +4 位作者 林耀望 邢小东 姚江宏 王占国 许京军 《中国有色金属学会会刊:英文版》 EI CSCD 2005年第2期332-335,共4页
Modulation-doped AlGaAs/GaAs structures were grown on GaAs(100) substrate by solid source molecular beam epitaxy(SSMBE) system. The factors which influence the electron mobility were investigated. After growing InP ba... Modulation-doped AlGaAs/GaAs structures were grown on GaAs(100) substrate by solid source molecular beam epitaxy(SSMBE) system. The factors which influence the electron mobility were investigated. After growing InP based materials, growth conditions were deteriorated, but by an appropriate method and using reasonable process high electron mobility(77 K) of more than 1.50×10~5 cm^2/(V·s) can still be obtained. The structures and growth conditions have been studied and optimized via Hall measurements. For a typical sample, 2.0 K electron mobility as high as 1.78×10~6 cm^2/(V·s) is achieved, and the quantum Hall oscillation phenomena can be observed. 展开更多
关键词 电子迁移率 砷化镓 磷化铟掺杂 晶体生长 固态源分子束
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Performance of an InP DHBT Grown by MBE 被引量:1
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作者 苏树兵 刘新宇 +4 位作者 徐安怀 于进勇 齐鸣 刘训春 王润梅 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2006年第5期792-795,共4页
We report the performance of the first self-aligned InP/InGaAs double heterojunction bipolar transistor (DHBT) produced in China. The device has a 2μm × 12μm U-shaped emitter area and demonstrates a peak comm... We report the performance of the first self-aligned InP/InGaAs double heterojunction bipolar transistor (DHBT) produced in China. The device has a 2μm × 12μm U-shaped emitter area and demonstrates a peak common-emitter DC current gain of over 300,an offset voltage of 0. 16V,a knee voltage of 0.6V,and an open-base breakdown voltage of about 6V. The HBT exhibits good microwave performance with a current gain cutoff fre- quency of 80GHz and a maximum oscillation frequency of 40GHz. These results indicate that this InP/InGaAs DHBT is suitable for low-voltage, low-power, and high-frequency applications. 展开更多
关键词 MBE Be-doped InGaAs base INP double heterojunction bipolar transistor
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