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磷扩散法制备高掺磷p型ZnO薄膜的磁控溅射工艺的探索
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作者 丁瑞钦 曾庆光 +3 位作者 陈毅湛 朱慧群 丁晓贵 齐德备 《人工晶体学报》 EI CAS CSCD 北大核心 2010年第2期490-493,510,共5页
在前期通过n+-Si衬底中的磷向沉积于其上面的ZnO薄膜的扩散制备高掺磷p型ZnO薄膜的研究基础上,探索了较有普遍应用意义的扩散法制备p型ZnO薄膜的磁控溅射工艺。结果表明,当磁控溅射的氧氩质量流量比与衬底温度满足特定的低阶指数函数的... 在前期通过n+-Si衬底中的磷向沉积于其上面的ZnO薄膜的扩散制备高掺磷p型ZnO薄膜的研究基础上,探索了较有普遍应用意义的扩散法制备p型ZnO薄膜的磁控溅射工艺。结果表明,当磁控溅射的氧氩质量流量比与衬底温度满足特定的低阶指数函数的匹配关系时,所制备的ZnO薄膜为p型,而且薄膜中磷原子的深度分布是均匀的;另外,这种薄膜的厚度随着氧氩流量比的增加而减小,而薄膜中氧锌原子浓度比都大于1,比值大小与氧氩质量流量比和衬底温度有关。 展开更多
关键词 P型ZNO薄膜 磷扩散法 磁控溅射工艺
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Synthesis and electrochemical performance of Li_(3-2x)Mg_xV_2(PO_4)_3/C composite cathode materials for lithium-ion batteries 被引量:1
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作者 尹武梅 张婷婷 +3 位作者 朱庆 陈权启 李谷才 张灵志 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2015年第6期1978-1985,共8页
The Li3 2xMgxV2(PO4)3/C (x-=0, 0.01, 0.03 and 0.05) composites were prepared by a sol-gel method and characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and electrochemical measurement... The Li3 2xMgxV2(PO4)3/C (x-=0, 0.01, 0.03 and 0.05) composites were prepared by a sol-gel method and characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and electrochemical measurements. The XRD results reveal that a small amount of Mg2+ doping into Li sites does not significantly change the monoclinic structure of Li3V2(PO4)3, but Mg-doped Li3W2(PO4)3 has larger cell volume than the pristine Li3V2(PO4)3. All Mg-doped composites display better electrochemical performance than the pristine one, and Liz.94Mgo.03Vz(P04)3/C composite exhibits the highest capacity and the best cycle performance among all above-mentioned composites. The analysis of Li+ diffusion coefficients in Li3V2(PO4)3/C and Li2.94Mgo.03V2(P04)3/C indicates that rapid Li+ diffusion results from the doping of Mg2+ and the rapid Li+ diffusion is responsible for the better electrochemical performance of Mg-doped Li3V2(PO4)3/C composite cathode materials. 展开更多
关键词 lithium-ion batteries lithium vanadium phosphate diffusion coefficient sol gel method
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