KLA-Tencor公司新近推出了PlasmaVolt^TM X2，可用于在半导体晶圆处理系统中测量等离子室的状况。由于增加了内嵌式传感器数量，且空间分辨率得到改善，Plasma Volt X2对各种参数的变化极为敏感，例如无线电频率（RF）功率、气流、磁场...KLA-Tencor公司新近推出了PlasmaVolt^TM X2，可用于在半导体晶圆处理系统中测量等离子室的状况。由于增加了内嵌式传感器数量，且空间分辨率得到改善，Plasma Volt X2对各种参数的变化极为敏感，例如无线电频率（RF）功率、气流、磁场及等离子室设计。展开更多
The all permanent ECR (Electron Cyclotron Resonance) ion source LAPECR2 was successfully mounted on the 320 kV HV platform at the beginning of 2005. In March, the plasma chamber, the injection vacuum pumping tubes and...The all permanent ECR (Electron Cyclotron Resonance) ion source LAPECR2 was successfully mounted on the 320 kV HV platform at the beginning of 2005. In March, the plasma chamber, the injection vacuum pumping tubes and the extraction diagnostic chamber were successfully installed on the source and LAEECR2 was then connected to the successive ion beam test bench. The picture of LAPECR2 on the HV platform is given in Fig. 1.展开更多
Cationic polyacrylamide (CPAM), used as a retention and drainage aid in paper industry, has received much attention. As the white water system becomes more closed and the anionic trash in the furnish is accumulated, t...Cationic polyacrylamide (CPAM), used as a retention and drainage aid in paper industry, has received much attention. As the white water system becomes more closed and the anionic trash in the furnish is accumulated, the anionic trash catcher (ATC) is often applied to neutralize the anionic trash. In this paper, we applied colloid titration and Zeta potential analysis to measure the charge and Zeta potential of paper furnish under the conditions of only adding CPAM and adding both CPAM and polyaluminum chloride (PAC). The underlying mechanism was studied.展开更多
文摘The all permanent ECR (Electron Cyclotron Resonance) ion source LAPECR2 was successfully mounted on the 320 kV HV platform at the beginning of 2005. In March, the plasma chamber, the injection vacuum pumping tubes and the extraction diagnostic chamber were successfully installed on the source and LAEECR2 was then connected to the successive ion beam test bench. The picture of LAPECR2 on the HV platform is given in Fig. 1.
文摘Cationic polyacrylamide (CPAM), used as a retention and drainage aid in paper industry, has received much attention. As the white water system becomes more closed and the anionic trash in the furnish is accumulated, the anionic trash catcher (ATC) is often applied to neutralize the anionic trash. In this paper, we applied colloid titration and Zeta potential analysis to measure the charge and Zeta potential of paper furnish under the conditions of only adding CPAM and adding both CPAM and polyaluminum chloride (PAC). The underlying mechanism was studied.
