针对宇航用大容量SRAM器件抗单粒子效应性能的试验评估需要,利用重离子加速器对抗辐射加固32 M Bulk CMOS工艺SRAM和16 M SOI CMOS工艺SRAM进行了单粒子效应模拟试验研究,获得SRAM器件单粒子效应特性并进行在轨翻转率预估;对单粒子翻转...针对宇航用大容量SRAM器件抗单粒子效应性能的试验评估需要,利用重离子加速器对抗辐射加固32 M Bulk CMOS工艺SRAM和16 M SOI CMOS工艺SRAM进行了单粒子效应模拟试验研究,获得SRAM器件单粒子效应特性并进行在轨翻转率预估;对单粒子翻转试验中重离子射程的影响,不同SEU类型的翻转截面差异,在轨翻转率预估的有关因素等进行了分析讨论。结果表明,这2款抗辐射加固SRAM器件都达到了较高的抗单粒子效应性能指标。试验结果可以为SRAM器件的单粒子效应试验评估提供参考。展开更多
Sputtering deposition coatings offer significant advantages on electron beam (EB) deposition, including high packing density, environmental stability and extremely low losses. But the inherent high compressive stress ...Sputtering deposition coatings offer significant advantages on electron beam (EB) deposition, including high packing density, environmental stability and extremely low losses. But the inherent high compressive stress affects its application in high power laser system. This paper describes the technical feasibility of high damage threshold laser mirrors deposited by a novel remote plasma sputtering technique. This technique is based on generating intensive plasma remotely from the target and then magnetically steering the plasma to the target to realize the full uniform sputtering. The pseudo-independence between target voltage and target current provides us very flexible parameters tuning, especially for the films stress control. Deposition conditions are optimized to yield fully oxidized and low compressive stress single layer HfO2 and SiO2. The high damage threshold of 43.8 J/cm2 for HfO2/ SiO2 laser mirrors at 1064 nm is obtained. For the first time the remote plasma sputtering is successfully applied in depositing laser mirrors with high performance.展开更多
文摘针对宇航用大容量SRAM器件抗单粒子效应性能的试验评估需要,利用重离子加速器对抗辐射加固32 M Bulk CMOS工艺SRAM和16 M SOI CMOS工艺SRAM进行了单粒子效应模拟试验研究,获得SRAM器件单粒子效应特性并进行在轨翻转率预估;对单粒子翻转试验中重离子射程的影响,不同SEU类型的翻转截面差异,在轨翻转率预估的有关因素等进行了分析讨论。结果表明,这2款抗辐射加固SRAM器件都达到了较高的抗单粒子效应性能指标。试验结果可以为SRAM器件的单粒子效应试验评估提供参考。
基金supported by the National Natural Science Foundation of China (No. 50802080)the Natural Science Foundation of Fujian Province of China (No.2010Jo1349)
文摘Sputtering deposition coatings offer significant advantages on electron beam (EB) deposition, including high packing density, environmental stability and extremely low losses. But the inherent high compressive stress affects its application in high power laser system. This paper describes the technical feasibility of high damage threshold laser mirrors deposited by a novel remote plasma sputtering technique. This technique is based on generating intensive plasma remotely from the target and then magnetically steering the plasma to the target to realize the full uniform sputtering. The pseudo-independence between target voltage and target current provides us very flexible parameters tuning, especially for the films stress control. Deposition conditions are optimized to yield fully oxidized and low compressive stress single layer HfO2 and SiO2. The high damage threshold of 43.8 J/cm2 for HfO2/ SiO2 laser mirrors at 1064 nm is obtained. For the first time the remote plasma sputtering is successfully applied in depositing laser mirrors with high performance.
