作为当前集成电路制造的主流技术,光学光刻在趋近其分辨力极限的同时,面临着越来越大的挑战,即便在波前工程和分辨力增强技术的帮助下,光学光刻的分辨力也难以满足快速发展的半导体产业的技术需求。接近式 X 射线光刻技术(XRL)、散射角...作为当前集成电路制造的主流技术,光学光刻在趋近其分辨力极限的同时,面临着越来越大的挑战,即便在波前工程和分辨力增强技术的帮助下,光学光刻的分辨力也难以满足快速发展的半导体产业的技术需求。接近式 X 射线光刻技术(XRL)、散射角限制电子束投影光刻技术(SCALPEL)、电子束直写光刻技术(EBDW)、极紫外线即软 X 射线投影光刻技术(EUVL)、离子投影光刻技术(IPL)等下一代光刻技术(NGL)将会在特征线宽为 100—70 nm 的技术节点介入集成电路制造的主流技术中。从目前 NGL 技术发展的趋势和市场需求的多元化来看,竞争的结果很可能是各种 NGL 技术并存。当特征尺寸进入纳米尺度(≤100 nm)以后,最终只有那些原子级的成像技术才能成为胜者。展开更多
A three-party scheme for splitting an arbitrary unknown two-qutrit state is proposed,where two non-maximally-entangled three-qutrit states are taken as the quantum channel among three parties.With the sender'shelp...A three-party scheme for splitting an arbitrary unknown two-qutrit state is proposed,where two non-maximally-entangled three-qutrit states are taken as the quantum channel among three parties.With the sender'shelp,if and only if both receivers collaborate together,they can securely share the quantum state in a probabilisticway by introducing an ancilla qutrit and performing appropriate unitary operations.The relation between the successprobability and coefficients characterizing the quantum channel is revealed.The security of the present scheme is analyzedand confirmed.Moreover,the generalization of the three-party scheme to more-party case is also sketched.展开更多
基金the Program for New Century Excellent Talents at Universities of China under Grant No.NCET-06-0554National Natural Science Foundation of China under Grant Nos.60677001 and 10747146+2 种基金the Science-Technology Fund of Anhui Province for Outstanding Youth under Grant No.06042087the Key Fund of the Ministry of Education of China under Grant No.206063the Natural Science Foundation of Guangdong Province under Grant Nos.06300345 and 7007806
文摘A three-party scheme for splitting an arbitrary unknown two-qutrit state is proposed,where two non-maximally-entangled three-qutrit states are taken as the quantum channel among three parties.With the sender'shelp,if and only if both receivers collaborate together,they can securely share the quantum state in a probabilisticway by introducing an ancilla qutrit and performing appropriate unitary operations.The relation between the successprobability and coefficients characterizing the quantum channel is revealed.The security of the present scheme is analyzedand confirmed.Moreover,the generalization of the three-party scheme to more-party case is also sketched.