双频容性耦合CF_4等离子体放电的二维混合模拟

研究了等离子体反应装置内的等离子体密度、粒子能量与角度分布等参量在装置径向与轴向上的分布特性。在研究过程中应用二维混合模型对CF4气体放电进行模拟。计算结果显示:在电极表面与侧壁附近的鞘层区特性有明显的区别。由于装置侧壁处受电源产生的射频电场的影响较小,侧壁处的鞘层主要由双极扩散机制形成,其产生的径向电场强度较弱,鞘层厚度也较薄。而在电极附近,由于受到射频电场的影响,鞘层的厚度显著增加,指向电极方向的轴向电场强度也远大于指向侧壁方向的径向电场强度。在电极区域内,离子通量分布均匀;在电极边缘与侧壁的间隙内,因电场强度减小,离子通量则发生迅速衰减。在射频电极覆盖的范围内离子能量分布大体上保持不变,电极与侧壁的交界处,由于受到侧壁处径向电场的影响,离子能量分布略有不同。在放电装置的中心区域,入射到电极上的离子角度分布基本保持一致,而在电极边界与装置侧壁的交界处,由于径向电场的影响,离子的垂直入射角增加,以大角度轰击电极的离子数量也显著增加。

Crossed Molecular Beam Study of H＋CH4 and H＋CD4 Reactions： Vibrationally Excited CH3/CD3 Product Channels

We study the H＋CH4/CD4-＋H2/HD＋CH3/CD3 reactions using the time sliced velocity map ion imaging technique. Ion images of the CH3/CD3 products were measured by the （2＋1） resonance enhanced multi-photon ionization （REMPI） detection method. Besides the CH3/CD3 products in the ground state, ion images of the vibrationally excited CH3/CD3 products were also observed at two collision energies of 0.72 and 1.06 eV. It is shown that the angular distribution of the products CH3/CD3 in vibrationally excited states gradually vary from backward scattering to sideways scattering as the collision energy increases. Compared to the CH3/CD3 products in the ground state, the CH3/CD3 products in vibrationally excited states tend to be more sideways scattered, indicating that larger impact parameters play a more important role in the vibrationally excited product channels.