The recent developments of electron tomography(ET) based on transmission electron microscopy(TEM) and scanning transmission electron microscopy(STEM) in the field of materials science were introduced. The variou...The recent developments of electron tomography(ET) based on transmission electron microscopy(TEM) and scanning transmission electron microscopy(STEM) in the field of materials science were introduced. The various types of ET based on TEM as well as STEM were described in detail, which included bright-field(BF)-TEM tomography, dark-field(DF)-TEM tomography, weak-beam dark-field(WBDF)-TEM tomography, annular dark-field(ADF)-TEM tomography, energy-filtered transmission electron microscopy(EFTEM) tomography, high-angle annular dark-field(HAADF)-STEM tomography, ADF-STEM tomography, incoherent bright field(IBF)-STEM tomography, electron energy loss spectroscopy(EELS)-STEM tomography and X-ray energy dispersive spectrometry(XEDS)-STEM tomography, and so on. The optimized tilt series such as dual-axis tilt tomography, on-axis tilt tomography, conical tilt tomography and equally-sloped tomography(EST) were reported. The advanced reconstruction algorithms, such as discrete algebraic reconstruction technique(DART), compressed sensing(CS) algorithm and EST were overviewed. At last, the development tendency of ET in materials science was presented.展开更多
基金Projects(51071125,51201135)supported by the National Natural Science Foundation of ChinaProject(B08040)supported by the Program of Introducing Talents of Discipline to Universities,China
文摘The recent developments of electron tomography(ET) based on transmission electron microscopy(TEM) and scanning transmission electron microscopy(STEM) in the field of materials science were introduced. The various types of ET based on TEM as well as STEM were described in detail, which included bright-field(BF)-TEM tomography, dark-field(DF)-TEM tomography, weak-beam dark-field(WBDF)-TEM tomography, annular dark-field(ADF)-TEM tomography, energy-filtered transmission electron microscopy(EFTEM) tomography, high-angle annular dark-field(HAADF)-STEM tomography, ADF-STEM tomography, incoherent bright field(IBF)-STEM tomography, electron energy loss spectroscopy(EELS)-STEM tomography and X-ray energy dispersive spectrometry(XEDS)-STEM tomography, and so on. The optimized tilt series such as dual-axis tilt tomography, on-axis tilt tomography, conical tilt tomography and equally-sloped tomography(EST) were reported. The advanced reconstruction algorithms, such as discrete algebraic reconstruction technique(DART), compressed sensing(CS) algorithm and EST were overviewed. At last, the development tendency of ET in materials science was presented.