Accuracy improvement of MEMS gyros requires not only microelectronic development but also the investigations of th mathematical model of sensitive element dynamics. In the present paper, we study the errors of the vib...Accuracy improvement of MEMS gyros requires not only microelectronic development but also the investigations of th mathematical model of sensitive element dynamics. In the present paper, we study the errors of the vibrating microgyroscop which arise because of nonlinear dynamics of a sensitive element. A MEMS tuning fork gyroscope with elastic rods is consid ered. Nonlinear differential equations of bending vibrations of sensitive element on the moving basis are derived. Free nonlin ear vibrations of gyroscopes as the flexible rod are studied. Nonlinear dynamics of gyroscope on the moving basis are investi gated by asymptotic two scales method. Sensitive element frequencies split on two frequencies resulted from slowly changin angular velocity are taken into account in the equations of zero approximation. The differential equations for slowly changin amplitudes and phases of two normal waves of the oscillations measured by capacitor gauges and an electronic contour of th device are obtained from the equations of the first approximation.展开更多
基金supported by the Russian Foundation for Basic Research (Grant Nos. 09-01-00756-a, 09-08-01184-a)
文摘Accuracy improvement of MEMS gyros requires not only microelectronic development but also the investigations of th mathematical model of sensitive element dynamics. In the present paper, we study the errors of the vibrating microgyroscop which arise because of nonlinear dynamics of a sensitive element. A MEMS tuning fork gyroscope with elastic rods is consid ered. Nonlinear differential equations of bending vibrations of sensitive element on the moving basis are derived. Free nonlin ear vibrations of gyroscopes as the flexible rod are studied. Nonlinear dynamics of gyroscope on the moving basis are investi gated by asymptotic two scales method. Sensitive element frequencies split on two frequencies resulted from slowly changin angular velocity are taken into account in the equations of zero approximation. The differential equations for slowly changin amplitudes and phases of two normal waves of the oscillations measured by capacitor gauges and an electronic contour of th device are obtained from the equations of the first approximation.
