A new method for MEMS dynamics analysis is presented,ased on the similarity theory. With this method, two systems' similarities can be captured in terms of physics quantities/governed-equations amongst different e...A new method for MEMS dynamics analysis is presented,ased on the similarity theory. With this method, two systems' similarities can be captured in terms of physics quantities/governed-equations amongst different energy fields, and then the unknown dynamic characteristics of one of the systems can be analyzed according to the similar ones of the other system. The probability to establish a pair of similar systems among MEMS and other energy systems is also discussed based on the equivalent between mechanics and electrics, and then the feasibility of applying this method is proven by an example, in which the squeezed damping force in MEMS and the current of its equivalent circuit established by this method are compared.展开更多
This paper presents the modelling of transduction heaters using the TEC （transformer equivalent circuit） model and FEA （finite element analysis）. Each model was used to simulate a set oftransduction heating experi...This paper presents the modelling of transduction heaters using the TEC （transformer equivalent circuit） model and FEA （finite element analysis）. Each model was used to simulate a set oftransduction heating experiments and the results compared. Analysis of the TEC calculated results suggested modification of three parameters： the secondary resistance, the core tube eddy current resistance and the core tube magnetizing reactance. The improved TEC model was then used to design, build and test a 6 kW transduction heater. The measured results are compared with calculated results from the TEC and FEA models. The TEC model accurately predicts the performance of the heater.展开更多
文摘A new method for MEMS dynamics analysis is presented,ased on the similarity theory. With this method, two systems' similarities can be captured in terms of physics quantities/governed-equations amongst different energy fields, and then the unknown dynamic characteristics of one of the systems can be analyzed according to the similar ones of the other system. The probability to establish a pair of similar systems among MEMS and other energy systems is also discussed based on the equivalent between mechanics and electrics, and then the feasibility of applying this method is proven by an example, in which the squeezed damping force in MEMS and the current of its equivalent circuit established by this method are compared.
文摘This paper presents the modelling of transduction heaters using the TEC （transformer equivalent circuit） model and FEA （finite element analysis）. Each model was used to simulate a set oftransduction heating experiments and the results compared. Analysis of the TEC calculated results suggested modification of three parameters： the secondary resistance, the core tube eddy current resistance and the core tube magnetizing reactance. The improved TEC model was then used to design, build and test a 6 kW transduction heater. The measured results are compared with calculated results from the TEC and FEA models. The TEC model accurately predicts the performance of the heater.
