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PECVD设备Leak在线监控系统创建及应用
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作者 金哲山 霍建宾 +2 位作者 董杰 刘晓婷 胡毓龙 《真空科学与技术学报》 EI CAS CSCD 北大核心 2019年第11期1039-1042,共4页
等离子体增强型化学气相沉积法(PECVD)设备具有高真空特点,容易发生漏气(Leak)事故,为预防事故发生,对PECVD腔室构造、成膜原理及过程进行深入分析。从原理上检讨通过光谱分析方法在线监控PECVD工艺腔室Leak的可行性,搭建了腔室在线监... 等离子体增强型化学气相沉积法(PECVD)设备具有高真空特点,容易发生漏气(Leak)事故,为预防事故发生,对PECVD腔室构造、成膜原理及过程进行深入分析。从原理上检讨通过光谱分析方法在线监控PECVD工艺腔室Leak的可行性,搭建了腔室在线监控系统。通过光谱条件的调整测试,发现Ar等离子状态下,Leak光谱和正常光谱差异最大化,更有利于Leak光谱检测,成功实现Leak在线检测,在行业内首次实现PECVD真空腔室在线监控功能。 展开更多
关键词 真空腔室 等离子体增强型化学气相沉积 漏气 光谱检测 等离子体光谱分析仪
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Quantitative analysis of elements (C,N,O,Al,Si and Fe) in polyamide with wavelength dispersive X-ray fluorescence spectrometry 被引量:3
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作者 LAI MeiShuang XIANG LeiWen +1 位作者 LIN Jin-Ming LI Hai-Fang 《Science China Chemistry》 SCIE EI CAS 2013年第8期1164-1170,共7页
A wavelength dispersive X-ray fluorescence (WD-XRF) spectrometry combined with calibration curve method was estab- lished for simultaneously analyzing low-Z elements (C, N, O) and A1, Si, Fe in polyamide. To inves... A wavelength dispersive X-ray fluorescence (WD-XRF) spectrometry combined with calibration curve method was estab- lished for simultaneously analyzing low-Z elements (C, N, O) and A1, Si, Fe in polyamide. To investigate the origin of plastic material causing deposition and blocking in instrument engines and pipelines, polyamide 6 (PA 6, an engineering plastic) was chosen as the study object on account of its common use in industry. The sample preparation with pressed powder disk has been developed for determination of six elements in PA 6. Pure Cu metal was used as the matrix and PA 6 was regarded as standard sample for C, N, O elements. PA 6 particles were firstly smashed to uniform powder in liquid nitrogen, and then mixed with inorganic standard powders (Fe203, A1203, SIO2, and Na2SiO3). The mixture was ground to obtain homogeneous calibration materials for WD-XRF analysis. The quantitative property of the calibration curve method for each element was re- liable. The limits of detection (S/N≤3) of C, N, O, A1, Si and Fe using WD-XRF were 249, 120, 101, 6.2, 3.3, and 1.8 μg/g, respectively. To confirm the accuracy of the proposed WD-XRF calibration curve method, inductively coupled plasma optical emission spectroscopy (ICP-OES) detection for A1, Si, Fe and elemental analyzer (EA) analysis for C, N, O were utilized. A good correlation of the WD-XRF results with the measurements of ICP-OES and EA was observed. 展开更多
关键词 X-ray fluorescence low-Z elements polyamide 6
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