在30kW级直流电弧等离子体喷射化学气相沉积(DC Arc P lasm a Jet CVD)设备上,采用Ar-H2-CH4混合气体,通过调节甲烷浓度以及控制其他沉积参数,在Mo衬底上沉积出微/纳米复合自支撑金刚石膜。实验表明,当微米金刚石膜层沉积结束后,在随后...在30kW级直流电弧等离子体喷射化学气相沉积(DC Arc P lasm a Jet CVD)设备上,采用Ar-H2-CH4混合气体,通过调节甲烷浓度以及控制其他沉积参数,在Mo衬底上沉积出微/纳米复合自支撑金刚石膜。实验表明,当微米金刚石膜层沉积结束后,在随后的沉积中,随着甲烷浓度的增加,金刚石膜表面的晶粒大小是逐渐减小的。当甲烷浓度达到20%以上时,金刚石膜生长面晶粒呈现菜花状的小晶团,膜体侧面已经没有了粗大的柱状晶,而是呈现出光滑的断口,对该层进行拉曼谱分析显示,位于1145 cm-1附近有一定强度的散射峰出现。这说明所沉积的晶粒全部变为纳米级尺寸。展开更多
Nanostructured yttria partially stabilized zirconia coatings were deposited by air plasma spraying with reconstituted nanosized powder. The microstructures and phase compositions of the powder and the as-sprayed nanos...Nanostructured yttria partially stabilized zirconia coatings were deposited by air plasma spraying with reconstituted nanosized powder. The microstructures and phase compositions of the powder and the as-sprayed nanostructured coatings were characterized by transmission electron microscopy(TEM), scanning electron microscopy(SEM) and X-ray diffraction(XRD). The results demonstrate that the microstructure of as-sprayed nanostructured zirconia coating exhibits a unique tri-modal distribution including the initial nanostructure of the powder, equiaxed grains and columnar grains. Air plasma sprayed nanostructured zirconia coatings consist of only the nontransformable tetragonal phase, though the reconstituted nanostructured powder shows the presence of the monoclinic, the tetragonal and the cubic phases. The mean grain size of the coating is about 42 nm.展开更多
文摘在30kW级直流电弧等离子体喷射化学气相沉积(DC Arc P lasm a Jet CVD)设备上,采用Ar-H2-CH4混合气体,通过调节甲烷浓度以及控制其他沉积参数,在Mo衬底上沉积出微/纳米复合自支撑金刚石膜。实验表明,当微米金刚石膜层沉积结束后,在随后的沉积中,随着甲烷浓度的增加,金刚石膜表面的晶粒大小是逐渐减小的。当甲烷浓度达到20%以上时,金刚石膜生长面晶粒呈现菜花状的小晶团,膜体侧面已经没有了粗大的柱状晶,而是呈现出光滑的断口,对该层进行拉曼谱分析显示,位于1145 cm-1附近有一定强度的散射峰出现。这说明所沉积的晶粒全部变为纳米级尺寸。
基金Project supported by the Scientific Research Fund of Youth Teacher in Shanghai Jiaotong University
文摘Nanostructured yttria partially stabilized zirconia coatings were deposited by air plasma spraying with reconstituted nanosized powder. The microstructures and phase compositions of the powder and the as-sprayed nanostructured coatings were characterized by transmission electron microscopy(TEM), scanning electron microscopy(SEM) and X-ray diffraction(XRD). The results demonstrate that the microstructure of as-sprayed nanostructured zirconia coating exhibits a unique tri-modal distribution including the initial nanostructure of the powder, equiaxed grains and columnar grains. Air plasma sprayed nanostructured zirconia coatings consist of only the nontransformable tetragonal phase, though the reconstituted nanostructured powder shows the presence of the monoclinic, the tetragonal and the cubic phases. The mean grain size of the coating is about 42 nm.
