期刊文献+
共找到29篇文章
< 1 2 >
每页显示 20 50 100
丝电弧等离子体强化超声速点火和燃烧 被引量:4
1
作者 于锦禄 何立明 +2 位作者 丁未 陈永刚 王景杰 《燃烧科学与技术》 EI CAS CSCD 北大核心 2015年第6期511-515,共5页
在总结国外关于丝电弧等离子体强化超声速点火和燃烧现状的基础上,分析了丝电弧等离子体强化超声速点火和燃烧的特点.基于等离子体点火强化超声速燃烧的基本原理,设计了4种丝电弧等离子体强化超声速点火和燃烧的电极布置方案,凹槽式燃... 在总结国外关于丝电弧等离子体强化超声速点火和燃烧现状的基础上,分析了丝电弧等离子体强化超声速点火和燃烧的特点.基于等离子体点火强化超声速燃烧的基本原理,设计了4种丝电弧等离子体强化超声速点火和燃烧的电极布置方案,凹槽式燃烧室强化燃烧方案、平板式单排纵向放电强化燃烧方案、平板式双排横向放电强化燃烧方案和平板式多排纵向放电强化燃烧方案.对每种方案的优缺点进行了分析;设计了丝电弧等离子体强化超声速点火和燃烧的放电特性试验系统,并进行了初步的放电试验. 展开更多
关键词 丝电弧等离子体 等离子体火炬 等离子体强化点火和燃烧 超声速气流
下载PDF
基于交替吸附-低温等离子体强化催化的苯系物净化综合实验平台 被引量:1
2
作者 孙也 纪盛元 +3 位作者 邵明攀 李梦歆 申芳霞 朱天乐 《实验技术与管理》 CAS 北大核心 2023年第6期155-161,共7页
室内空气中的苯系物对人体健康危害大。该文研制了基于吸附、催化和低温等离子体技术的净化室内苯系物的综合实验平台,平台由吸附/催化双功能材料模块、低温等离子体发生器、风道系统和控制系统构成,可长时间连续净化低浓度苯系物,实现... 室内空气中的苯系物对人体健康危害大。该文研制了基于吸附、催化和低温等离子体技术的净化室内苯系物的综合实验平台,平台由吸附/催化双功能材料模块、低温等离子体发生器、风道系统和控制系统构成,可长时间连续净化低浓度苯系物,实现吸附/催化材料的原地再生和无O_(3)二次污染的绿色目标。该平台提高了大气污染控制工程、环境综合实验等实验课程的高阶性、创新性、挑战度,有助于培养学生创新思维和解决实际工程问题的综合能力。 展开更多
关键词 室内空气质量 苯系物 交替吸附 低温等离子体强化催化 实验平台
下载PDF
等离子体催化重整CH_(4)/CO_(2)中的等离子体强化表面反应动力学研究
3
作者 孙进桃 陈琪 秦婉月 《石油学报(石油加工)》 EI CAS CSCD 北大核心 2023年第5期987-994,共8页
采用实验测量和模拟预测相结合的方法,通过构建详细的机理并开展零维动力学模拟,研究等离子体催化CH_(4)/CO_(2)重整过程中等离子体活性物质对表面反应动力学的强化效应。结果表明:等离子体与催化剂的协同对CH_(4)和CO_(2)的活化转化能... 采用实验测量和模拟预测相结合的方法,通过构建详细的机理并开展零维动力学模拟,研究等离子体催化CH_(4)/CO_(2)重整过程中等离子体活性物质对表面反应动力学的强化效应。结果表明:等离子体与催化剂的协同对CH_(4)和CO_(2)的活化转化能力远强于纯等离子体;动力学模型对反应物的消耗和产物的生成具有较好的预测能力;活性自由基与吸附态物质之间的E-R反应具有较高的反应活性,能有效改变并促进表面反应路径,如等离子体强化的E-R反应CH_(3)(s)+O→CH_(3)O(s)的速率比相应的吸附态物质之间的L-H反应CH_(3)(s)+O(s)→CH_(3)O(s)+Ni(s)的速率高4个数量级;等离子体催化CH_(4)/CO_(2)重整过程中的表面反应路径主要以气相物质与表面吸附态物质之间的E-R反应为主。 展开更多
关键词 等离子体催化 激发态 CH_(4)/CO_(2)重整 等离子体强化表面反应
下载PDF
在聚合物基体上等离子体强化化学气相沉积SiO2起始阶段的研究
4
作者 彭补之 《材料保护》 CAS CSCD 北大核心 2002年第12期68-68,共1页
关键词 聚合物基体 等离子体强化化学气相沉积 SIO2 起始阶段 研究 薄膜厚度
下载PDF
钽喷丝头表面等离子体强化技术
5
《表面技术》 EI CAS CSCD 北大核心 2002年第5期69-69,共1页
关键词 专利 江西省科学院应用物理研究所 钽喷丝头 表面等离子体强化技术 真空容器 表面粗糙度 使用寿命
下载PDF
用电子回旋共振等离子体强化和未经强化电源磁控溅射沉积氮化碳薄膜的性能
6
作者 彭补之 《材料保护》 CAS CSCD 北大核心 2002年第12期67-67,共1页
关键词 电子回旋共振 等离子体强化 电源磁控溅射沉积 氮化碳薄膜 性能
下载PDF
等离子体强化CVD技术用于硅的低温生长
7
作者 杨英慧 《有色与稀有金属国外动态》 1997年第8期4-6,共3页
关键词 等离子体强化 CVD 低温生长
下载PDF
采用等离子体气化工艺从含氯废物中回收氯并产合成气
8
《化工环保》 CAS CSCD 北大核心 2008年第2期186-186,共1页
美国Dow Coming公司的硅制品制造厂将采用一套等离子体废物处理工艺,用于循环利用化学废物,以帮助该厂减少每年4×10^11 Btu(合4.22×10^11kJ)的天然气消耗量以及75%的总排放量。该技术的所有者综合环境技术公司(ITE)... 美国Dow Coming公司的硅制品制造厂将采用一套等离子体废物处理工艺,用于循环利用化学废物,以帮助该厂减少每年4×10^11 Btu(合4.22×10^11kJ)的天然气消耗量以及75%的总排放量。该技术的所有者综合环境技术公司(ITE)声称,该装置标志着等离子体技术在化工企业的首次应用。在初始阶段,将采用等离子体强化熔炉(PEM)消解医学废物及化学废物。 展开更多
关键词 等离子体技术 废物处理 气化工艺 合成气 含氯 回收 等离子体强化 化学废物
下载PDF
低温等离子体表面强化技术研究进展 被引量:9
9
作者 王瑞雪 叶巴丁 +4 位作者 孔祥号 夏章川 张子鹏 李好义 谢鹏程 《机械工程学报》 EI CAS CSCD 北大核心 2021年第12期192-207,共16页
简要介绍等离子体的相关概念和分类,根据等离子体电极结构、放电特性不同将等离子体分为热等离子体和温和等离子体,并对比两种等离子体表面强化技术的异同点。在此基础上,从当前研究进展和存在的关键科学技术问题两个角度,梳理热等离子... 简要介绍等离子体的相关概念和分类,根据等离子体电极结构、放电特性不同将等离子体分为热等离子体和温和等离子体,并对比两种等离子体表面强化技术的异同点。在此基础上,从当前研究进展和存在的关键科学技术问题两个角度,梳理热等离子体喷涂技术在制备热障涂层、耐磨涂层、梯度功能材料等领域的应用,对温和等离子体表面强化技术(等离子体物理气相沉积、等离子体化学气相沉积以及冷等离子体)在纳米纤维改性、高压绝缘、生物医学等领域的应用进展进行了综述。最后,从等离子体产生技术、表面强化技术应用以及微观-宏观过程控制三个角度分析了等离子体表面强化技术的未来发展方向,对等离子体表面强化技术的多学科发展融合和综合利用提供一定的参考。 展开更多
关键词 低温等离子体表面强化 等离子体喷涂 热障涂层 耐磨涂层 生物医学
原文传递
CuSnZr三元催化剂应用于NTP强化催化脱硫过程的特性
10
作者 周正华 蒋连爽 +3 位作者 张震宇 黄锐 宁静远 宁致远 《中国环境科学》 EI CAS CSCD 北大核心 2022年第1期20-31,共12页
为高效地在低温下处理大量低浓度电解铝烟气,采用浸渍法制备了Sn Zr型金属氧化物并添加Cu作为助剂的催化剂,并首次测试了它在低温等离子体(NTP)技术上的脱硫效果,结果表明负载了20wt%Cu老化温度为40℃的催化剂表现出最佳的脱硫性能.并... 为高效地在低温下处理大量低浓度电解铝烟气,采用浸渍法制备了Sn Zr型金属氧化物并添加Cu作为助剂的催化剂,并首次测试了它在低温等离子体(NTP)技术上的脱硫效果,结果表明负载了20wt%Cu老化温度为40℃的催化剂表现出最佳的脱硫性能.并对强化之后的催化剂进行了表征,与新鲜的催化剂对比,X射线衍射分析(XRD)结果表明放电对催化剂晶型基本不产生影响;扫描电子显微镜(SEM),氮吸附和脱吸(BET)表明放电会使催化剂的吸附脱附能力与孔道结构有较大提升;X射线光电子光谱(XPS)也表明放电会使催化剂表面元素价态变化,从而使其氧化还原性能改变,反应路径发生偏向;催化剂性能理论计算表明铜含量的上升会导致催化剂能带结构改变,更好利用于激发气体. 展开更多
关键词 催化剂 等离子体强化催化 电解铝烟气脱硫 DBD放电 制备 数值分析
下载PDF
Recent developments in visible-light photocatalytic degradation of antibiotics 被引量:39
11
作者 李娣 施伟东 《Chinese Journal of Catalysis》 SCIE EI CAS CSCD 北大核心 2016年第6期792-799,共8页
With the significant discharge of antibiotic wastewater into the aquatic and terrestrial ecosystems, antibiotic pollution has become a serious problem and presents a hazardous risk to the environment. To address such ... With the significant discharge of antibiotic wastewater into the aquatic and terrestrial ecosystems, antibiotic pollution has become a serious problem and presents a hazardous risk to the environment. To address such issues, various investigations on the removal of antibiotics have been undertaken. Photocatalysis has received tremendous attention owing to its great potential in removing antibiotics from aqueous solutions via a green, economic, and effective process. However, such a technology employing traditional photocatalysts suffers from major drawbacks such as light absorption being restricted to the UV spectrum only and fast charge recombination. To overcome these issues, considerable effort has been directed towards the development of advanced visible light-driven photocatalysts. This mini review summarises recent research progress in the state-of-the-art design and fabrication of photocatalysts with visible-light response for photocatalytic degradation of antibiotic wastewater. Such design strategies involve the doping of metal and non-metal into ultraviolet light-driven photocatalysts, development of new semiconductor photocatalysts, construction of heterojunction photocatalysts, and fabrication of surface plasmon resonance-enhanced photocatalytic systems. Additionally, some perspectives on the challenges and future developments in the area of photocatalytic degradation of antibiotics are provided. 展开更多
关键词 Antibiotic Visible-light photocatalyst Photocatalytic degradation DOPING HETEROJUNCTION Surface plasmon resonance-enhanced photocatalysis
下载PDF
Doped-Chamber Deposition of Intrinsic Microcrystalline Silicon Thin Films and Its Application in Solar Cells 被引量:1
12
作者 孙福河 张晓丹 +9 位作者 赵颖 王世峰 韩晓艳 李贵军 魏长春 孙建 侯国付 张德坤 耿新华 熊绍珍 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2008年第5期855-858,共4页
A series of microcrystalline silicon thin films were fabricated by very high frequency plasma enhanced chemical vapor deposition (VHF-PECVD) at different silane concentrations in a P chamber. Through analysis of the... A series of microcrystalline silicon thin films were fabricated by very high frequency plasma enhanced chemical vapor deposition (VHF-PECVD) at different silane concentrations in a P chamber. Through analysis of the structural and electrical properties of these materials,we conclude that the photosensitivity slightly decreased then increased as the silane concentration increased,while the crystalline volume fraction indicates the opposite change. Results of XRD indicate that thin films have a (220) preferable orientation under certain conditions. Microcrystalline silicon solar cells with conversion efficiency 4. 7% and micromorph tandem solar cells 8.5% were fabricated by VHF-PECVD (p layer and i layer of microcrystalline silicon solar cells were deposited in P chamber), respectively. 展开更多
关键词 VHF-PECVD intrinsic microcrystalline silicon solar cells
下载PDF
Fabrication of Hydrogenated Microcrystalline Silicon Thin Films at Low Temperature by VHF-PECVD
13
作者 杨恢东 吴春亚 +7 位作者 麦耀华 李洪波 薛俊明 李岩 任慧智 张丽珠 耿新华 熊绍珍 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2002年第9期902-908,共7页
Using H 2 diluted silane,series of μc Si∶H films are fabricated at low temperature with VHF PECVD.The thickness measurements reveal that the deposition rates are obviously enhanced with higher plasma excitation ... Using H 2 diluted silane,series of μc Si∶H films are fabricated at low temperature with VHF PECVD.The thickness measurements reveal that the deposition rates are obviously enhanced with higher plasma excitation frequency or working pressure,but increase firstly and then decrease with the increase of plasma power density.Raman spectra show that the crystallinity and the average grain sizes of the films strongly depend on the temperature of substrate and the concentration of silane.However,the plasma excitation frequency only has effect on the crystallinity,and a maximum occurs during the further increase of plasma excitation frequency.From XRD and TEM experiments,three preferential crystalline orientations (111),(220) and (311) are observed,and the average grain sizes are different for every crystalline orientation. 展开更多
关键词 μc Si∶H thin films VHF PECVD deposition rate CRYSTALLINITY
下载PDF
Mechanical properties of AISI 1045 ceramic coated materials by nano indentation and crack opening displacement method 被引量:1
14
作者 王燕荣 王一奇 惠志鹏 《Journal of Central South University》 SCIE EI CAS 2012年第11期3023-3027,共5页
Abstract: An effective approach was conducted for estimating fracture toughness using the crack opening displacement (COD) method for plasma enhanced chemical vapor deposition (PECVD) coating materials. For this ... Abstract: An effective approach was conducted for estimating fracture toughness using the crack opening displacement (COD) method for plasma enhanced chemical vapor deposition (PECVD) coating materials. For this evaluation, an elastoplastic analysis was used to estimate critical COD values for single edge notched bending (SENB) specimens. The relationship between fracture toughness (Kic) and critical COD for SENB specimens was obtained. Microstructure of the interface between AleO3-TiO2 composite ceramic coatings and AISI 1045 steel substrates was studied by using scanning electron microscope (SEM). Chemical compositions were clarified by energy-dispersive X-ray spectroscopy (EDS). The results show that the interface between of Al203-TiO2 and substrate has mechanical combining. The nanohardness of the coatings can reach 1 200 GPa examined by nanoindentation. The Klc was calculated according to this relationship from critical COD. The bending process produces a significant relationship of COD independent of the axial force applied. Fractographic analysis was conducted to determine the crack length. From the physical analysis of nanoindentation curves, the elastic modulus of 1045/AI2O3-TiO2 is 180 GPa for the 50 μm film. The highest value of fracture toughness for 1045/A1203-TiO2-250 μm is 348 MPa·mv2. 展开更多
关键词 crack opening displacement (COD) single edge notched bending (SENB) plasma enhanced chemical vapor deposition(PECVD) fracture toughness NANOINDENTATION
下载PDF
Stress Controlled Silicon Nitride Thin Film Deposited by Plasma Enhanced Chemical Vapour Deposition
15
作者 DA Xiao-li XU Chen GUAN Bao-lu SHEN Guang-di 《Semiconductor Photonics and Technology》 CAS 2007年第2期141-145,共5页
SiN, films are deposited on silicon wafers through plasma enhanced chemical vapor deposition (PECVD). The relationship between the film stress and deposition factors is investigated. It is found that low stress film... SiN, films are deposited on silicon wafers through plasma enhanced chemical vapor deposition (PECVD). The relationship between the film stress and deposition factors is investigated. It is found that low stress films would be obtained by adjusting the ratio of low frequency(LF) power to high frequency(HF) power pulse time or the chamber pressure. The best of the two methods to control stress in the film is changing the percentage of LF power pulse time. The low stress condition is achieved when the percentage of low frequency power pulse time in total time(LF and HF pulse time) is close to 40%, The low stress cantilever of tunable vertical cavity surface emitting laser is obtained by using this deposition condition, 展开更多
关键词 film stress SiN PRESSURE radio frequency power CANTILEVER
下载PDF
Effect of ammonia gas etching on growth of vertically aligned carbon nanotubes/nanofibers
16
作者 Sang-Gook KIM Sooh-Yung KIM Hyung-Woo LEE 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2011年第A01期130-134,共5页
The etching effect of ammonia (NH3) on the growth of vertically aligned nanotubes/nanofibers (CNTs) was investigated by direct-current plasma enhanced chemical vapor deposition (DC-PECVD). NH3 gas etches Ni cata... The etching effect of ammonia (NH3) on the growth of vertically aligned nanotubes/nanofibers (CNTs) was investigated by direct-current plasma enhanced chemical vapor deposition (DC-PECVD). NH3 gas etches Ni catalyst layer to form nanoscale islands while NH3 plasma etches the deposited amorphous carbon. Based on the etching effect of NH3 gas on Ni catalyst, the differences of growing bundles of CNTs and single strand CNTs were discussed; specifically, the amount of optimal NH3 gas etching is different between bundles of CNTs and single strand CNTs. In contrast to the CNT carpet growth, the single strand CNT growth requires shorter etching time (5 min) than large catalytic patterns (10 rain) since nano dots already form catalyst islands for CNT growth. Through removing the plasma pretreatment process, the damage from being exposed at high temperature substrate occurring during the plasma generation time is minimized. High resolution transmission electron microscopy (HTEM) shows fishbone structure of CNTs grown by PECVD. 展开更多
关键词 carbon nanotube ammonia etching nickel catalyst plasma enhanced chemical vapor deposition (PECVD)
下载PDF
Dependence of Optical Absorption in Silicon Nanostructures on Size of Silicon Nanoparticles
17
作者 丁文革 苑静 +3 位作者 孟令海 武树杰 于威 傅广生 《Communications in Theoretical Physics》 SCIE CAS CSCD 2011年第4期688-692,共5页
The amorphous silicon nanoparticles (Si NPs) embedded in silicon nitride (SiNx) films prepared by helicon wave plasma-enhanced chemical vapor deposition (HWP-CVD) technique are studied. From Raman scattering inv... The amorphous silicon nanoparticles (Si NPs) embedded in silicon nitride (SiNx) films prepared by helicon wave plasma-enhanced chemical vapor deposition (HWP-CVD) technique are studied. From Raman scattering investigation, we determine that the deposited film has the structure of silicon nanocrystals embedded in silicon nitride (nc-Si/SiNx) thin film at a certain hydrogen dilution amount. The analysis of optical absorption spectra implies that the Si NPs is affected by quantum size effects and has the nature of an indirect-band-gap semiconductor. Further, considering the effects of the mean Si NP size and their dispersion on oscillator strength, and quantum-confinement, we obtain an analytical expression for the spectral absorbance of ensemble samples. Gaussian as well as lognormal size-distributions of the Si NPs are considered for optical absorption coefficient calculations. The influence of the particle size-distribution on the optical absorption spectra was systematically studied. We present the fitting of the optical absorption experimental data with our model and discuss the results. 展开更多
关键词 optical absorption silicon nanoparticles quantum size effects oscillator strength silicon nitride film
下载PDF
Characteristics of Amorphous Silicon Nitride Films Deposited by LF-PECVD from SiH_4/N_2
18
作者 ZHONG Zhi-qin ZHANG Yi YU Zhi-wei DAI Li-ping ZHANG Guo-jun WANG Yu-mei WANG Gang WANG Shu-ya 《Semiconductor Photonics and Technology》 CAS 2009年第3期145-148,共4页
Amorphous silicon nitride films were deposited by low-frequency plasma-enhanced chemical vapor deposition(LF-PECVD) using silane and nitrogen as precursors. Characteristics such as deposition rate, surface morpholog... Amorphous silicon nitride films were deposited by low-frequency plasma-enhanced chemical vapor deposition(LF-PECVD) using silane and nitrogen as precursors. Characteristics such as deposition rate, surface morphology, and chemical composition were measured by spectroscopic ellipsometry(SE), atomic force mieroscope(AFM) and x-ray photoelectron spectroscopy(XPS). It was shown that amorphous silicon nitride film could be prepared by LF-PECVD with good uniformity and even surface. The XPS result indicated that a small quantity of oxygen was involved in the sample, which was discussed in this paper. 展开更多
关键词 SiNx SE AFM XPS PECVD
下载PDF
Hydrophobic Ti_xO_y-C_mH_n Nanoparticle Film Prepared by Plasma Enhanced Chemical Vapor Deposition
19
作者 王德信 徐金洲 +5 位作者 刘伟 郭颖 杨沁玉 丁可 石建军 张菁 《Journal of Donghua University(English Edition)》 EI CAS 2012年第3期227-232,共6页
The hydrophobic films of TixOy-CmHn. deposited from mixture gases of titanium isopropoxide (TTIP) and oxygen by plasma enhanced chemical vapor deposition (PECVD) were investigated. The films were investigated by s... The hydrophobic films of TixOy-CmHn. deposited from mixture gases of titanium isopropoxide (TTIP) and oxygen by plasma enhanced chemical vapor deposition (PECVD) were investigated. The films were investigated by scanning electron microscope ( SEM ), transmission electron microscope ( TEM ), Fourier transform infrared spectrometer ( FTIR), X-Ray diffraction ( XRD ), element analysis ( EA ), ultraviolet visible spectrometer ( UV-Vis), and water contact angle (WCA). The results reveal that the surface of the films is formed by mierosized papillaes aggregated by inorganic and organic phases of complex nanoparticles with size from 50 nm to 200 nm when the discharge power is increased from 40 W to 150 W. All fdms demonstrate the strong broad of Ti-O-Ti stretching vibration at 400 -800cm-1, -CH bending vibration at 1 388 cm -1, and broadening -OH stretching vibration at 3 000-3500 cm-1 With the increase of the discharge power, the asdeposited film changes from amorphous to crystallization. The WCA of the film can be as high as 160°, indicating the hydrophobicity. The films show a similar ultraviolet absorption property as the bulk TiO2 film. The composition of the composition of film deposited at 150 W can be formulated as Tio.302-C1.5H3. Therefore, the composition formula of this hydrophobic film could be expressed as TiO2-C5H10O4.7. It is believed that the complex micro/nano structures of TiO2 and C5H10O4.7 residues are responsible for the observed hydrophobicity and the ultraviolet absorption property of the film. 展开更多
关键词 micro/nano structure plasma-enhanced chemical vapor deposition (PECVD) hydrophobic titanium oxide
下载PDF
Evolution of the Ionospheric Plasma Turbulence over Seismic and Thunderstorm Areas
20
作者 Jan Blccki Michel Parrot +3 位作者 Jan Slomiflski Malgorzata Kogciesza Roman Wronowski Sergey Savin 《Journal of Environmental Science and Engineering(A)》 2016年第6期277-285,共9页
The authors report the observation of Extremely Low Frequency (ELF) plasma turbulence registered by DEMETER satellite in the ionosphere over the seismic and thunderstorm areas. The detail analysis of the electric fi... The authors report the observation of Extremely Low Frequency (ELF) plasma turbulence registered by DEMETER satellite in the ionosphere over the seismic and thunderstorm areas. The detail analysis of the electric field fluctuations for the selected strong earthquakes and thunderstorm is presented. Special attention is given to study of the characteristics of the spectra of these variations and searches of the nonlinear effects. This analysis is possible in the time interval when the waveform has been transmitted. Some attempt of this discussion is given in the paper. 展开更多
关键词 EARTHQUAKES IONOSPHERE LIGHTNING plasma turbulence thunderstorms.
下载PDF
上一页 1 2 下一页 到第
使用帮助 返回顶部