等离子体腐蚀去胶的探讨

首先介绍等离子体腐蚀与采用湿法腐蚀相比所具有的优点,并且在简化工艺流程和缩短工艺周期方面作出细致的说明;对氧气流量为0.05L/min^0.5L/min时腐蚀光刻胶的整个过程中的腐蚀现象进行了描述,绘制出了腐蚀速率曲线图,并进行了理论分析.

等离子体腐蚀铬掩模

一、前言制作LSI和VLSI集成电路的铬掩模,图形线条细密至几个微米乃至亚微米。要求制造的尺寸精度小于设计尺寸的十分之一。由于湿法腐蚀侧向钻蚀严重,要做到成功的细线条腐蚀是相当困难的。等离子体腐蚀则侧向钻蚀小,可获得比较精细的线条,而且工艺和设备都比较简单,适于较大面积的腐蚀。本文报导采用等离子体腐蚀制作0.

硅的等离子体深腐蚀

湿法化学腐蚀已被广泛地应用于敏感器件传感结构的微细加工中.近年来,在VLSI中等离子体干法腐蚀已成为获得细线条图形的可行技术.然而,干法腐蚀工艺无论是等离子体腐蚀或反应离子腐蚀,相对于湿法腐蚀来说都是比较慢的.在需要深腐蚀的应用中(如电子束光刻的对准符号刻蚀,电路隔离槽或敏感器件的微细结构腐蚀)当前都着力提高腐蚀速率.在传感器的开发中,主要问题之一是封装,为简化到处于测量环境的传感器的外部连接,希望通过传感器背面进行连接.在化学传感器中,背面连接最为有利.

Wear and corrosion resistant coatings on surface of cast A356 aluminum alloy by plasma electrolytic oxidation in moderately concentrated aluminate electrolytes

Plasma electrolytic oxidation of a cast A356 aluminum alloy was carried out in aluminate electrolytes to develop wear and corrosion resistant coatings. Different concentrations of 2, 16 and 24 g/L NaAlO2 solutions and a silicate electrolyte （for comparison） were employed for the investigation. Wear performance and corrosion resistance of the coatings were evaluated by WC （tungsten carbide） ball-on-flat dry sliding tests and electrochemical methods, respectively. The results show that the coating formed for a short duration of 480 s in 24 g/L NaAlO2 solution generated the best protection. The coating sustained 30 N load for sliding time of 1800 s, showing very low wear rate of -4.5×10^-7 mm3/（N· m）. A low corrosion current density of -8.81×10^-9 A/cm2 was also recorded. Despite low α-Al2O3 content of the coating, the compact and nearly single layer nature of the coating guaranteed the excellent performances.

Corrosion and wear resistance of AZ31 Mg alloy treated by duplex process of magnetron sputtering and plasma electrolytic oxidation

In order to improve the wear and corrosion resistance of AZ31 magnesium alloy,a magnetron-sputtered Al layer with a thickness of 11μm was firstly applied on the alloy,and then treated by plasma electrolytic oxidation(PEO)in an aluminate and silicate electrolytes,respectively.The performance of PEO coatings was investigated by dry sliding wear and electrochemical corrosion tests.The aluminate coating exhibits excellent wear resistance under both 10 and 20 N loads.The silicate coating only shows low wear rate under 10 N,but it was destroyed under 20 N.Corrosion tests show that the Al layer after magnetron sputtering treatment alone cannot afford good protection to the Mg substrate.However,the duplex layer of PEO/Al can significantly improve the corrosion resistance of AZ31 alloy.Electrochemical tests show that the aluminate and silicate coatings have corrosion current densities of-1.6×10^(-6) and-1.1×10^(-6) A/cm^(2),respectively,which are two orders lower than that of the un-coated AZ31 alloy.However,immersion tests and electrochemical impedance spectroscopy(EIS)show that the aluminate coating exhibits better long-term corrosion protection than silicate coating.

Wear and corrosion behavior of clay containing coating on AM 50 magnesium alloy produced by aluminate-based plasma electrolytic oxidation

This study aims to examine the effect of clay micro particles addition on the microstructure,wear and corrosion behavior of PEO coatings on AM 50 magnesium alloy.PEO coatings were prepared using an aluminate-based electrolyte with and without the presence of 5 g/L clay particles.The structure and composition of the coatings were evaluated using SEM,EDS and XRD.The wear investigations were conducted using a ball-on-disk tribometer at 2,5 and 10 N loads.The corrosion behavior of the coatings was examined using polarization and EIS tests in 0.5 wt.%NaCl.The results revealed that the addition of clay particles deteriorated the wear resistance of the coatings under the loads of 5 and 10 N.The SEM examinations of the worn surfaces indicated that a combination of adhesive and abrasive wear mechanisms was activated for the coating with clay particles.The poor wear performance of the clay-incorporated coating was related to its lower adhesion strength and higher roughness.The potentiodynamic polarization examinations revealed that the addition of clay particles slightly decreased the corrosion rate of the coatings.Corrosion resistance of the clay-containing coating was attributed to its compactness,as indicated by the results of EIS tests.

Plasma electrolytic oxidation behavior and corrosion resistance of brass in aluminate electrolyte containing NaH2PO4 or Na2SiO3

Plasma electrolytic oxidation(PEO) of brass was carried out in aluminate electrolytes with the addition of NaH2PO4(S1) and Na2SiO3(S2), respectively, with the aim to investigate the effect of additives on the coating formation and corrosion resistance. For the PEO in S1 electrolyte, a mixed layer of AlPO4and Al2O3is formed at the initial stage, which leads to fast plasma discharges and formation of black coatings with the compositions of Al2O3,CuO, Cu2O and ZnO. However, in S2 electrolyte, plasma discharges are delayed and the coatings show a reddish color due to more Cu2O. Mott-Schottky tests show that the S1 coatings are p-type semiconductors;while the S2 coatings can be adjusted between n-type and p-type. Potentiodynamic polarization and electrochemical impedance spectroscopy(EIS) tests show that the PEO treatment can significantly improve the corrosion resistance of brass, with protection efficiency up to 91.50% and the largest charge transfer resistance of 59.95 kΩ·cm^(2) for the S1 coating.

Microstructural, corrosion and mechanical behavior of two-step plasma electrolyte oxidation ceramic coatings

Plasma electrolytic oxidation(PEO)is considered as a cost effective and environmentally friendly surface treatmentprocess for improving surface properties of light alloys.The formation of ceramic coatings on Ti6Al4V alloy was reported bytwo-step PEO process and its structural,electrochemical and mechanical properties with the coated samples were compared byone-step PEO process in an alkaline electrolyte.The structural properties were studied using field-emission scanning microscope(FESEM)and X-ray diffraction(XRD).Electrochemical studies were carried out using linear polarization method and in additionmechanical behaviors were investigated by means of Knoop microhardness and nanoindentation method.Results showed that thesecond step process resulted in an increase of both porosity percentage and average pore diameter on the surface.The two-stepprocess resulted in a small increase of thickness from about12.5to13.0μm.Electrochemical test results showed that applying thesecond step resulted in the decrease of both polarization resistance from1800.2to412.5kΩ/cm2and protection efficiency from97.8%to90.5%.Finally,the nanoindentation results indicated that the PEO coatings became softer but more ductile after applyingthe second processing step in acidic electrolyte.

A Thermal Analysis of Characteristic Parameters in the Electrode－Region for Tubular Plasma Generators

A thermal analysis of characteristic parameters in the electrode-region for tubular plasma generators is developed. Results of calculation on temperature of electrodes, evaporation rate and erosion rate for different electrode materials are presented as a function of arc current, pressure of arc chamber, width of arc root and velocity of water coolant. Some experimental data on electrode erosion in a tubular plasma generator is given. The effects of operating parameters on erosion rate are discussed in detail.