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Si/SiO_2系统辐照损伤的氢、氧等离子体低温退火研究
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作者 张旗 李思渊 方玉田 《兰州大学学报(自然科学版)》 CAS CSCD 北大核心 1993年第3期78-82,共5页
本文详细地研究了氧等高离子体造成辐照损伤的Si/SiO_2系统在氢、氧等离子体退火中随压强、温度及退火时间的变化关系。结果表明射频退火对消除辐照损伤是极为有效的,并发现固定电荷密度N和界面态密度N_(?)分别与样品放置方式和气氛密... 本文详细地研究了氧等高离子体造成辐照损伤的Si/SiO_2系统在氢、氧等离子体退火中随压强、温度及退火时间的变化关系。结果表明射频退火对消除辐照损伤是极为有效的,并发现固定电荷密度N和界面态密度N_(?)分别与样品放置方式和气氛密切相关。 展开更多
关键词 等离子退火 辐照损伤 二氧化硅
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氢等离子体退火对氢化非晶硅结构有序度的影响 被引量:4
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作者 芮云军 徐骏 +3 位作者 梅嘉欣 阳玲 李伟 陈坤基 《南京大学学报(自然科学版)》 CAS CSCD 北大核心 2005年第1期61-65,共5页
室温下利用氢等离子体退火技术对氢化非晶硅 (a_Si:H)薄膜进行处理 ,通过傅立叶红外、光吸收、拉曼光谱 3种测试手段对非晶硅的微结构进行了分析 ,发现不同的退火时间对a_Si:H的微结构影响很大 ,氢等离子体在与薄膜的化学反应过程中主... 室温下利用氢等离子体退火技术对氢化非晶硅 (a_Si:H)薄膜进行处理 ,通过傅立叶红外、光吸收、拉曼光谱 3种测试手段对非晶硅的微结构进行了分析 ,发现不同的退火时间对a_Si:H的微结构影响很大 ,氢等离子体在与薄膜的化学反应过程中主要表现为原子氢 (H0 )与薄膜的反应 .化学势很高的H0 能将Si_Si弱键转变成Si_Si强键 .硅网络结构发生弛豫 ,使结构由无序向有序转变 ,从而能够降低晶化温度与退火时间 . 展开更多
关键词 氢化非晶硅 微结构 等离子退火 钝化 去钝化
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等离子体辅助铝诱导纳米硅制备多晶硅的研究 被引量:1
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作者 方茹 沈鸿烈 +2 位作者 吴天如 张磊 刘斌 《真空科学与技术学报》 EI CAS CSCD 北大核心 2013年第1期68-72,共5页
以超白玻璃为衬底,利用热丝化学气相沉积和磁控溅射法制备了Glass/nc-Si/Al叠层结构,置入管式退火炉中进行等离子体辅助退火。样品在氢等离子体氛围下进行了400,425和450℃不同温度,5 h的诱导退火,用光学显微镜和拉曼光谱对样品进行了... 以超白玻璃为衬底,利用热丝化学气相沉积和磁控溅射法制备了Glass/nc-Si/Al叠层结构,置入管式退火炉中进行等离子体辅助退火。样品在氢等离子体氛围下进行了400,425和450℃不同温度,5 h的诱导退火,用光学显微镜和拉曼光谱对样品进行了性能表征。结果表明随着诱导温度升高,样品的Si(111)择优取向越来越显著;晶粒尺寸不断增大,在450℃诱导温度下获得了最大晶粒尺寸约500μm的连续性多晶硅薄膜,且该温度下薄膜晶化率达97%;薄膜的结晶质量也随着温度的升高而不断提高。样品经450℃诱导后的载流子浓度p为5.8×1017cm-3,薄膜霍尔迁移率μH为74 cm2/Vs。还从氢等离子体钝化的角度分析了等离子体环境下铝诱导纳米硅的机理。 展开更多
关键词 等离子体辅助退火 铝诱导 纳米硅 多晶硅薄膜 氢钝化
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Effect of Annealing Temperatures on the Structural and Electrical Properties of Laser Induced Plasma for TiO2x-1Bix Thin Films
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作者 Sabah N. Mazhir Ghuson H. Mohamed +1 位作者 Kadhim A. Aadem Maysoon D. Radhi 《Journal of Physical Science and Application》 2016年第1期36-43,共8页
In this study, Bismuth doped Titanium dioxide thin films were deposited on glass substrates by a pulse laser deposition using laser. The effect of annealing temperature on the structural and electrical properties was ... In this study, Bismuth doped Titanium dioxide thin films were deposited on glass substrates by a pulse laser deposition using laser. The effect of annealing temperature on the structural and electrical properties was investigated. X-ray diffraction pattern for pure and doped titanium dioxide films with different doping different ratio with Bi show that these films have amorphous structure oanvert to polycrystalline structure with annealing and doping and have a good identically with standard peaks for Anatase and Rutile phases. The orientation was at specific direction for Rutile. The crystalline of films increases by the increase of doping ratio. The crystalline increased with annealing temperature. Annealed films at different annealing temperatures have been studied. The results show that these films have two activation energies and by increasing the doping ratio, the activation energies and the conductivity increase. Both the annealing and composition effects on Hall constant, density of electron carders and Hall mobility are studied. Hall Effect measurements show that all films have n- type charge conductivity and the concentration increases while the mobility decreases with doping and annealing. 展开更多
关键词 Electrical properties structural properties TiO2 thin films pulse laser deposition technique.
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Ag nanoparticles preparation and their light trapping performance 被引量:2
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作者 BAI YiMing WANG Jun +7 位作者 YIN ZhiGang CHEN NuoFu ZHANG XingWang FU Zhen YAO JianXi LI Ning HE HaiYang GULI MiNa 《Science China(Technological Sciences)》 SCIE EI CAS 2013年第1期109-114,共6页
Ag nanoparticles were fabricated on Si substrates by radio-frequency magnetron sputtering and thermal annealing treatments.It was found that Ag nanoparticles are ellipsoid at low annealing temperature,but the axis rat... Ag nanoparticles were fabricated on Si substrates by radio-frequency magnetron sputtering and thermal annealing treatments.It was found that Ag nanoparticles are ellipsoid at low annealing temperature,but the axis ratio decreases with the increase of annealing temperature,and a shape transformation from ellipsoid to sphere occurs when the temperature increases to a critical point.The experimental results showed that the surface plasmon resonances depend greatly on the nanoparticles'shape and size,which is in accordance with the theoretical calculation based on discrete dipole approximation.The results of forward-scattering efficiency(FSE) and light trapping spectrum(LTS) showed that Ag nanoparticles annealed at 400°C could strongly enhance the light harvest than those annealed at 300 and 500°C,and that the LTS peak intensity of the former is 1.7 and 1.5 times stronger than those of the later two samples,respectively.The conclusions obtained in this paper showed that Ag ellipsoid nanoparticles with appropriate size is more favorable for enhancing the light trapping. 展开更多
关键词 thin film solar cells light trapping structure plasmonic nanoparticles
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