A carbon nanotube-based(CNT) sensing element is presented, which consists of substrate, insulating layer, electrodes, carbon nanotube and measuring circuit. The sensing components are a single or array of CNTs, which ...A carbon nanotube-based(CNT) sensing element is presented, which consists of substrate, insulating layer, electrodes, carbon nanotube and measuring circuit. The sensing components are a single or array of CNTs, which are located on the two electrodes. The CNT-based sensing element is fabricated by CVD (chemical vapor deposition)-direct-growth on micro- electrodes. The sensing model and measurement method of electromechanical property are also presented. Finally, the voltage-current characteristics are measured, which show that the CNT-based sensing element has good electrical properties.展开更多
The large-scale assembly and fabrication method for single-walled carbon nanotube(SWCNT) nano devices was implemented.Assembly of SWCNT field effect transistor(FET) was realized by floating potential dielectrophoresis...The large-scale assembly and fabrication method for single-walled carbon nanotube(SWCNT) nano devices was implemented.Assembly of SWCNT field effect transistor(FET) was realized by floating potential dielectrophoresis approach.The simulation of floating potential distribution of the chip was performed by comsol multiphysics coupling software.Six hundred devices were assembled on the area of less than one square centimeter.The fabricated devices were characterized by atomic force microscopy and scanning electron microscopy.The experimental results showed that large-scale assembly had been realized,and the success rate of ideal assembly for SWCNT FET had been assessed.展开更多
基金This work is partially granted by National Natural Science Foun-dation of China (No.50505018)Specialized Research Fund forthe Doctoral Program of Higher Education (No. 20030003024)China Postdoctoral Science Foundation Grant (No.2005038068).
文摘A carbon nanotube-based(CNT) sensing element is presented, which consists of substrate, insulating layer, electrodes, carbon nanotube and measuring circuit. The sensing components are a single or array of CNTs, which are located on the two electrodes. The CNT-based sensing element is fabricated by CVD (chemical vapor deposition)-direct-growth on micro- electrodes. The sensing model and measurement method of electromechanical property are also presented. Finally, the voltage-current characteristics are measured, which show that the CNT-based sensing element has good electrical properties.
基金supported by the National Natural Science Foundation of China (Grant No. 51005230)China Postdoctoral Science Foundation(Grant No. 2012M520654)the Education Department of Liaoning Province Science and Technology Research Projects (Grant No. L2012213)
文摘The large-scale assembly and fabrication method for single-walled carbon nanotube(SWCNT) nano devices was implemented.Assembly of SWCNT field effect transistor(FET) was realized by floating potential dielectrophoresis approach.The simulation of floating potential distribution of the chip was performed by comsol multiphysics coupling software.Six hundred devices were assembled on the area of less than one square centimeter.The fabricated devices were characterized by atomic force microscopy and scanning electron microscopy.The experimental results showed that large-scale assembly had been realized,and the success rate of ideal assembly for SWCNT FET had been assessed.
