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单晶硅超精密切削的刀具磨损试验研究 被引量:3
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作者 王明海 张枢南 +2 位作者 郑耀辉 王奔 印文典 《组合机床与自动化加工技术》 北大核心 2017年第5期133-136,共4页
针对单晶硅超精密切削过程中金刚石刀具磨损问题,对单晶硅进行超精密车削试验。通过观察金刚石刀具磨损演变过程,分析刀具的磨损过程对表面加工质量的影响,得到刀具磨损机理。结果表明,在超精密切削单晶硅过程中,随着切削距离的增加,刀... 针对单晶硅超精密切削过程中金刚石刀具磨损问题,对单晶硅进行超精密车削试验。通过观察金刚石刀具磨损演变过程,分析刀具的磨损过程对表面加工质量的影响,得到刀具磨损机理。结果表明,在超精密切削单晶硅过程中,随着切削距离的增加,刀具磨损面积逐渐增加,加工过程中产生的碳化硅及类似金刚石碳颗粒与刀具后刀面发生划擦造成磨粒磨损;同时,由于交变载荷作用导致的应力疲劳现象,进而伴有解理断裂产生。当切削路程小于4km时,加工表面的粗糙度Ra值在200nm以内,切削路程大于8km时,表面粗糙度Ra值在350nm^400nm之间。 展开更多
关键词 单晶硅 超精密切削 类金刚石碳原子 磨粒磨损 应力疲劳
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In vitro comparison of the hemocompatibility of diamond-like carbon and carbon nitride coatings with different atomic percentages of N 被引量:3
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作者 ZHAO MengLi LI DeJun +4 位作者 ZHANG YiTeng GUO MeiXian DENG XiangYun GU HanQing WAN RongXin 《Science China(Life Sciences)》 SCIE CAS 2012年第4期343-348,共6页
Carbon nitride (CN,) and diamond-like carbon (DLC) coatings were prepared by dc magnetron sputtering at room temperature. Different partial pressures of N2 were used to synthesize CNx to evaluate the relationship ... Carbon nitride (CN,) and diamond-like carbon (DLC) coatings were prepared by dc magnetron sputtering at room temperature. Different partial pressures of N2 were used to synthesize CNx to evaluate the relationship between the atomic percentage of ni- trogen and hemocompatibility. Auger electron spectroscopy and atomic force microscopy indicated atomic percentages of N of 0.12 and 0.22 and that the CNx coatings were smooth. An in vitro study of the hemocompatibility of the coatings revealed that both CNx coatings had better anticoagulant properties and lower platelet adhesion than DLC. Compared with CN0.1〉 the CN0.22 coating showed longer dynamic clotting time (about 42 min), static clotting time (23.6 min) and recalcification time (45.6 s), as well as lower platelet adhesion (102 cells μm-2), aggregation, and activation. The presence of nitrogen in the CNx coatings in- duced their enhanced hemocompatibility compared with DLC. 展开更多
关键词 carbon nitride magnetron sputtering atomic percentage hemocompatibility
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