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全方位离子注入与沉积类金刚石碳膜的结构与性能 被引量:5
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作者 刘洪喜 蒋业华 +1 位作者 周荣 汤宝寅 《材料热处理学报》 EI CAS CSCD 北大核心 2010年第2期108-112,118,共6页
用等离子体浸没离子注入与沉积(PIIID)复合强化新技术在AISI440C不锈钢表面制备了类金刚石(DLC)碳膜。膜层表面的原子力显微镜(AFM)形貌显示出DLC膜结构致密均匀。Raman光谱分析结果表明,制备的DLC主要是由金刚石键(sp3)和石墨键(sp2)... 用等离子体浸没离子注入与沉积(PIIID)复合强化新技术在AISI440C不锈钢表面制备了类金刚石(DLC)碳膜。膜层表面的原子力显微镜(AFM)形貌显示出DLC膜结构致密均匀。Raman光谱分析结果表明,制备的DLC主要是由金刚石键(sp3)和石墨键(sp2)组成的混合无定形碳膜,且sp3键含量大于10%。以纯石墨棒做阴极,C2H2为工作气体条件下合成的DLC薄膜中,sp3键含量总体上较单纯用石墨作阴极而无工作气体条件下合成的DLC薄膜中sp3键含量高。与基体相比,薄膜试样的显微硬度和摩擦磨损性能均得到了较大改善,最大硬度提高88.7%,磨损寿命延长超过4倍。 展开更多
关键词 金刚石(dlc) 等离子体浸没离子注入与沉积(PIIID) RAMAN光谱 AISI440C不锈钢
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液相电化学法在不锈钢上沉积类金刚石薄膜
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作者 杜景永 张贵锋 +2 位作者 何洋洋 李国卿 侯晓多 《材料热处理学报》 EI CAS CSCD 北大核心 2007年第5期120-123,共4页
采用直流脉冲电源,以甲醇有机溶液作为碳源,通过电化学沉积法在不锈钢表面制备了类金刚石碳(DLC)薄膜。用扫描电镜和拉曼光谱分析了薄膜的形貌和结构,用MTS纳米压痕仪测试DLC薄膜的硬度和Young s模量,在CERT微摩擦系统上测试了薄膜的摩... 采用直流脉冲电源,以甲醇有机溶液作为碳源,通过电化学沉积法在不锈钢表面制备了类金刚石碳(DLC)薄膜。用扫描电镜和拉曼光谱分析了薄膜的形貌和结构,用MTS纳米压痕仪测试DLC薄膜的硬度和Young s模量,在CERT微摩擦系统上测试了薄膜的摩擦学性能。结果表明:电化学沉积含氢类金刚石碳薄膜的硬度较高(约7GPa),薄膜均匀、致密,表面粗糙度小;拉曼光谱在1332.51 cm-1处出现金刚石的特征峰;在室温干摩擦条件下,薄膜同WC钢球对摩时的摩擦系数随载荷增加而略微减小,抗磨性能则随着载荷的增加而变差,对摩时发生转移并形成转移膜,耐磨寿命缩短。 展开更多
关键词 电化学沉积 金刚石(dlc) 力学性能 摩擦学性能
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基于多轮廓型腔结构件表面DLC薄膜的制备与性能研究 被引量:1
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作者 王德山 胡兵兵 +2 位作者 徐汇音 李奇亮 李卫国 《装备制造技术》 2017年第7期69-71,共3页
类金刚石碳膜是力学综合性能、耐磨损、耐腐蚀和透光性能好的薄膜,在先进制造技术领域得到了越来越多的应用。通过类金刚石(DLC)薄膜制备方法与机械特性的阐述,对不同磁控溅射法对多轮廓型腔结构件表面DLC薄膜结构性能的干扰制约,以及DL... 类金刚石碳膜是力学综合性能、耐磨损、耐腐蚀和透光性能好的薄膜,在先进制造技术领域得到了越来越多的应用。通过类金刚石(DLC)薄膜制备方法与机械特性的阐述,对不同磁控溅射法对多轮廓型腔结构件表面DLC薄膜结构性能的干扰制约,以及DLC薄膜工艺技术制定方案的关键问题进行深入探究。 展开更多
关键词 类金刚石碳膜dlc 磁控溅射 多轮廓型腔 工艺性能
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Optical properties of ZnO thin films grown on diamond-like carbon by pulsed laser deposition 被引量:3
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作者 李少兰 张立春 +1 位作者 董艳锋 赵风周 《Optoelectronics Letters》 EI 2012年第6期445-448,共4页
ZnO/diamond-like carbon(DLC)thin films are deposited by pulsed laser deposition(PLD),and the room-temperature photoluminescence(PL)is investigated.Using a fluorescence spectrophotometer,we obtain the PL spectra of DLC... ZnO/diamond-like carbon(DLC)thin films are deposited by pulsed laser deposition(PLD),and the room-temperature photoluminescence(PL)is investigated.Using a fluorescence spectrophotometer,we obtain the PL spectra of DLC/Si and ZnO/Si thin films deposited at different substrate temperatures.The ZnO/DLC thin films show a broadband emission almost containing the entire visible spectrum.The Gaussian fitting curves of PL spectra reveal that the visible emission of ZnO/DLC thin films consists of three peaks centered at 381 nm,526 nm and 682 nm,which are attributed to the radiative recombination of ZnO and DLC,respectively.The Commission International de l,Eclairage(CIE)1931(x,y)chromaticity space of ZnO/DLC thin films indicates that the visible PL spectrum is very close to the standard white-light region. 展开更多
关键词 CARBON Curve fitting DEPOSITS LASERS Optical properties Pulsed laser deposition Zinc oxide
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Study of colors of diamond-like carbon films 被引量:1
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作者 LI QiongYu WANG FuMing ZHANG Ling 《Science China Chemistry》 SCIE EI CAS 2013年第3期545-550,共6页
Reflective and transmissive film interference colors were calculated for DLC films on the Si and SiO 2 substrates.The calculated interference colors were compared with photographed colors of the prepared DLC samples.T... Reflective and transmissive film interference colors were calculated for DLC films on the Si and SiO 2 substrates.The calculated interference colors were compared with photographed colors of the prepared DLC samples.The observed film colors were found to match reasonably well with the corresponding calculated colors,indicating that DLC film colors come from interference instead of color center effects.Color charts for DLC films on the Si and SiO 2 substrates with various optical gaps were constructed,and the relationship between interference color and film properties such as optical gap,thickness and substrate were investigated.Usefulness of the calculated color charts in estimating optical gap or thickness of DLC films were demonstrated. 展开更多
关键词 dlc film color interference color color center color chart
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