In rapid thermal processing of a semiconductor wafer, it is important to keep a given temperature rising speed of the wafer during the temperature rising process. We made an experimental apparatus to measure the tempe...In rapid thermal processing of a semiconductor wafer, it is important to keep a given temperature rising speed of the wafer during the temperature rising process. We made an experimental apparatus to measure the temperature rising speed of a ceramic ball of 2 mm in diameter heated with four halogen lamp heaters. The heating rate of the halogen lamp heaters was controlled by computer to keep a given temperature rising speed of 50 ℃/s with a controlling time interval of 0.1 s. We examined the effect of various heating control methods on the error of the temperature rising speed of the ceramic ball. We found that a combined method of control with prepared correlation and PID （proportional integral derivative） control is a good method to decrease the error of the temperature rising speed. The average error of the temperature rising speed is 0.5 ℃/s, and the repetition error is almost zero for the temperature rising speed of 50 ℃/s from 330 ℃ to 370 ℃. We also measured the effects of artificial control delay time and measuring error of the monitoring temperature on the error of the temperature rising speed.展开更多
CNC machining plays an important role in mechanical manufacturing.A key issue is to improve the machining feedrate while keeping the machining precision and satisfying the acceleration constraints of the CNC machine.F...CNC machining plays an important role in mechanical manufacturing.A key issue is to improve the machining feedrate while keeping the machining precision and satisfying the acceleration constraints of the CNC machine.For the consecutive micro-line segments interpolation,the velocities at the junction of two segments are the bottlenecks for the machining efficiency.This paper proposes a multi-period turning method to improve the feedrate at the junctions using the linear acceleration and deceleration mode,which utilizes the maximal acceleration capabilities of the NC machine while satisfying the machining precision.A new and more efficient look-ahead method and a feedrate override method are also proposed to boast the global machining speed.The proposed algorithm has been implemented on Blue Sky NC System,and experimented in real material manufacturing.Compared with several existing algorithms,the current algorithm can improve the manufacturing time ranging from 50% to 180%,depending on the machining parameters,and also results in better machining quality.In addition,the algorithm also satisfies the need of real-time interpolation.展开更多
文摘In rapid thermal processing of a semiconductor wafer, it is important to keep a given temperature rising speed of the wafer during the temperature rising process. We made an experimental apparatus to measure the temperature rising speed of a ceramic ball of 2 mm in diameter heated with four halogen lamp heaters. The heating rate of the halogen lamp heaters was controlled by computer to keep a given temperature rising speed of 50 ℃/s with a controlling time interval of 0.1 s. We examined the effect of various heating control methods on the error of the temperature rising speed of the ceramic ball. We found that a combined method of control with prepared correlation and PID （proportional integral derivative） control is a good method to decrease the error of the temperature rising speed. The average error of the temperature rising speed is 0.5 ℃/s, and the repetition error is almost zero for the temperature rising speed of 50 ℃/s from 330 ℃ to 370 ℃. We also measured the effects of artificial control delay time and measuring error of the monitoring temperature on the error of the temperature rising speed.
基金supported by the National Key Basic Research Project of China (Grant Nos 2011CB302400)the National Natural Science Foundation of China (Grant Nos 60821002, 10871195, 10925105)+1 种基金Major National S&T Project "Advanced CNC Systems"CAS Project "MM Methods for Advanced CNC Systems"
文摘CNC machining plays an important role in mechanical manufacturing.A key issue is to improve the machining feedrate while keeping the machining precision and satisfying the acceleration constraints of the CNC machine.For the consecutive micro-line segments interpolation,the velocities at the junction of two segments are the bottlenecks for the machining efficiency.This paper proposes a multi-period turning method to improve the feedrate at the junctions using the linear acceleration and deceleration mode,which utilizes the maximal acceleration capabilities of the NC machine while satisfying the machining precision.A new and more efficient look-ahead method and a feedrate override method are also proposed to boast the global machining speed.The proposed algorithm has been implemented on Blue Sky NC System,and experimented in real material manufacturing.Compared with several existing algorithms,the current algorithm can improve the manufacturing time ranging from 50% to 180%,depending on the machining parameters,and also results in better machining quality.In addition,the algorithm also satisfies the need of real-time interpolation.
