CAl快速检测解决方案——3D精密量测及检测系统

近年来，国内半导体、信息电子、通讯、光电及生物医药科技等高科技产业蓬勃成长，高科技产业将成为我国二十一世纪发展的核心力量。由于电子产品不断向超“轻薄短小”的方向发展，所以对产品内各类组件加工设备的精度及尺寸之要求不断提高，也促成新一轮的制造技术朝超精密化、高密度化、高速化。

工程测量中精密量测技术的改进与发展

传统精密量测技术在工程测量中起着重要作用,但也存在一些局限性和挑战。为了应对这些问题,先进传感器技术的应用成为一种重要趋势,其中激光测距技术、光学干涉测量技术、高精度GPS定位技术和惯性导航系统等都发挥了重要作用。另外,我们将关注工程测量仪器设备的创新,包括材料和微纳米技术在仪器设备中的应用,以及仪器设备智能化与自动化的提升。最后,通过应用案例和未来展望,我们将展示精密量测技术在工程领域的实际应用和潜在价值。

Reducing Influence of Gravity Model Error in Precise Orbit Determination of Low Earth Orbit Satellites

Based on the orbit integration and orbit fitting method, the influence of the characters of the gravity model, with different precisions, on the movement of low Earth orbit satellites was studied. The way and the effect of absorbing the influence of gravity model error on CHAMP and GRACE satellite orbits, using linear and periodical empirical acceleration models and the so-called "pseudo-stochastic pulses" model, were also analyzed.

Influence of Atmospheric Refraction on Horizontal Angle Surveying

Side-refraction is the main error source of horizontal angle surveying, but it has little influence on the sides by analyzing the influence of atmospheric-infraction on the ultrahigh-precision side and angle surveying. Choosing oriented direction is crucial to distance and angle measurement in triangulateration network. How to select the oriented direction during angle measurement is presented, and the means to check the quality of auto-surveying with Georobot is brought forward as well. At last some solutions to reduce the influence of side-refraction while disposing and surveying ultrahigh-precision triangulateration network are put forward.

Roll-to-roll imprint for high precision grating manufacturing

In this paper,a novel roll-to-roll imprint process is proposed to fabricate gratings in large area. The key challenges in roll-to-roll imprint process,such as the roller mold preparation,imprint system,misalignment of imprint roller and backup roller,and also the imprint pressure,are investigated. Various gratings with different periods and profiles are obtained by the roll-to-roll process. To calibrate the measuring ability of the self-made grating by imprint,a calibration system is built with a dual-frequency laser interferometer. By the calibration,the self-made gratings can achieve ±4μm accuracy in 45mm measuring distance.

A novel wide-range precision instrument for measuring three-dimensional surface topography

We developed a measuring instrument that had wide range, high precision, small measuring touch force. The instrument for three-dimensional (3D) surface topography measurement was composed of a high precision displacement sensor based on the Michelson interference principle, a 3D platform based on vertical scanning, a measuring and control circuit, and an industrial control computer. It was a closed loop control system, which changed the traditional moving stylus scanning style into a moving platform scanning style. When the workpiece was measured, the lever of the displacement sensor returned to the balanced position in every sample interval according to the zero offset of the displacement sensor. The non-linear error caused by the rotation of the lever was, therefore, very small even if the measuring range was wide. The instrument can measure the roughness and the profile size of a curved surface.

Fine Measurements and Analysis of Temperature Gradients in the Wells of the Jinsha River Groundwater Observational Network

Fine measurements have been conducted to temperatures and their gradients of six wells of the Jinsha River Groundwater Observational Network.The results show that the influence depths of sun radiation heat are 50m to 125m,average temperature gradients in the wells range from 0.11 to 2.81℃/hm and most are 1～2℃/hm,and the temperature gradients on varied depth sections of one well are highly changeable.Lithology of strata and their integrity,particularly high-angle crashed fault zones,have imposed major effects on the influence depths of sun radiation heat and temperature gradients of the wells.The micro dynamic characteristics of water temperature,such as coseismic effects,tidal effects and anomalies of the wells prior to earthquakes,probably depend,to a large degree,on the temperature gradients of the depths at which the water temperature sensors are settled.

Advanced approaches to high precision MEMS metrology based on interferometric,confocal,and tactile techniques

Geometrical features of micro-systems can be determined by either tactile or optical profiling techniques, which show different non-linear transfer characteristics. This has to be considered especially, if the instruments operate close to their physical limitations. Depending on the specific measuring task either point-wise or areal optical measurement may be advantageous. Hence, examples for both approaches are discussed. Furthermore, systematic effects, which are related to the measuring principle have to be taken into account, e.g. if sharp edges or slopes are present on the measuring object. As it is shown, for white-light interferometry these difficulties can be solved by a two-wavelength technique.

Geoid Deformation and Elevation Influence Caused by Building Loading

The paper studies the ground vertical deformation and the geoid undulation caused by loading of neighboring buildings, based on the loading tides theory. The influence on elevation is also considered. The results show that the ground vertical deformation and the geoid undulation both reach millimeter magnitude. Therefore, it is obvious that the building loading significantly affects the precise engineering surveying, and it must be seriously considered in application.