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压印光刻中的两步对正技术 被引量:2
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作者 王莉 卢秉恒 +1 位作者 丁玉成 刘红忠 《光子学报》 EI CAS CSCD 北大核心 2006年第10期1608-1612,共5页
压印光刻中套刻需要粗、精两级对正.实验采用一对斜纹结构光栅作为对正标记.利用物镜组观察光栅标记图像的边界特征进行粗对正,其准确度在精对正信号的捕捉范围内;利用光电接收器件阵列组合接收光栅莫尔信号,在莫尔信号的线区进行精对正... 压印光刻中套刻需要粗、精两级对正.实验采用一对斜纹结构光栅作为对正标记.利用物镜组观察光栅标记图像的边界特征进行粗对正,其准确度在精对正信号的捕捉范围内;利用光电接收器件阵列组合接收光栅莫尔信号,在莫尔信号的线区进行精对正.由于线性区的斜率大,精对正过程中得到相应x,y方向的对正误差信号灵敏度高,利用高灵敏度对正误差信号作为控制系统的驱动信号,对承片台进行驱动定位,实现精对正.最终使X,Y方向上的重复对正准确度分别达到了±21nm(±3σ)和±24nm(±3σ). 展开更多
关键词 压印光刻 对正准确度 光栅 莫尔信号 对正 精对正
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Instantaneous Bethe-Salpeter Equation and Its Exact Solution 被引量:2
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作者 CHANGChao-Hsi CHENJiao-Kai +1 位作者 LIXue-Qia WANGGuo-Li 《Communications in Theoretical Physics》 SCIE CAS CSCD 2005年第1期113-118,共6页
We present an approach to solve Bethe-Salpeter (BS) equations exactly withoutany approximation if the kernel of the BS equations exactly is instantaneous, and take positroniumas an example to illustrate the general fe... We present an approach to solve Bethe-Salpeter (BS) equations exactly withoutany approximation if the kernel of the BS equations exactly is instantaneous, and take positroniumas an example to illustrate the general features of the exact solutions. The key step for theapproach is from the BS equations to derive a set of coupled and well-determined integrationequations in linear eigenvalue for the components of the BS wave functions equivalently, which maybe solvable numerically under a controlled accuracy, even though there is no analytic solution. Forpositronium, the exact solutions precisely present corrections to those of the correspondingSchrodinger equation in order υ~1 (υ is the relative velocity) for eigenfunctions, in order υ~2for eigenvalues, and the mixing between S and D components in J~(PC) = 1~(--) states etc.,quantitatively. Moreover, we also point out that there is a questionable step in some existentderivations for the instantaneous BS equations if one is pursuing the exact solutions. Finally, weemphasize that one should take the O(υ) corrections emerging in the exact solutions into accountaccordingly if one is interested in the relativistic corrections for relevant problems to the boundstates. 展开更多
关键词 instantaneous BS equation exact solutions POSITRONIUM relativisticcorrections
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