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新型低介电常数材料研究进展 被引量:22
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作者 黄娆 刘之景 《微纳电子技术》 CAS 2003年第9期11-14,18,共5页
在超大规模集成电路中,随着器件集成度的提高和延迟时间的进一步减小,需要应用新型低介电常数(k<3)材料。本文介绍了当前正在研究和开发的几种低介电材料,其中包括聚合物、掺氟、多孔和纳米介电材料。
关键词 常数材料 超大规模集成 聚合物材料 掺氟材料 多孔材料 纳米介电材料
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IBM与MII共同开发纳米压印光刻介电材料
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《集成电路应用》 2005年第4期46-46,共1页
IBM公司与Molecular Imprints Inc.(MII)正合作开发介电材料,以推动面向主流芯片制造的纳米压印光刻(nano—imprint lithography)技术的开发。这是MII联合创始人兼美国德州大学化学工程系教授Grant Wilson日前在SPIE微光刻研讨会上透... IBM公司与Molecular Imprints Inc.(MII)正合作开发介电材料,以推动面向主流芯片制造的纳米压印光刻(nano—imprint lithography)技术的开发。这是MII联合创始人兼美国德州大学化学工程系教授Grant Wilson日前在SPIE微光刻研讨会上透露的。 展开更多
关键词 IBM公司 MII公司 纳米压印光刻材料
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SrNb_2O_6-NaNbO_3-SiO_2玻璃陶瓷纳米介电复合材料的介电性能研究 被引量:2
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作者 王磊 杜军 +2 位作者 张庆猛 罗君 唐群 《稀有金属》 EI CAS CSCD 北大核心 2010年第3期373-377,共5页
应用辊压快冷及可控结晶技术制备了玻璃陶瓷(SrNb2O6-NaNbO3-SiO2)纳米介电复合材料。研究了该复合材料的制备工艺参数与显微组织特性以及介电性能的关系,重点关注该材料的抗电击穿性能。X射线衍射(XRD)和扫描电镜(SEM)的分析结果显示,... 应用辊压快冷及可控结晶技术制备了玻璃陶瓷(SrNb2O6-NaNbO3-SiO2)纳米介电复合材料。研究了该复合材料的制备工艺参数与显微组织特性以及介电性能的关系,重点关注该材料的抗电击穿性能。X射线衍射(XRD)和扫描电镜(SEM)的分析结果显示,高温熔体经辊压快冷后得到典型的玻璃块体,在随后的可控结晶过程中,当温度高于750℃时,在玻璃基体中逐步析出具有高介电常数的纳米SrNb2O6和NaNbO3颗粒。当晶化温度为900℃时,析出相的平均尺寸约为28 nm。分析测试了该类材料介电常数的温谱特性和频谱特性。结果表明,该介电复合材料具有适宜的温谱和频谱特性。在100 Hz^1 MHz测试频率和-55~125℃测试范围内,该类材料均表现出极佳的稳定性(<5%)。与此同时,基于其特有的低孔隙率和纳米晶粒度的特点,该类复合材料的抗电击穿能力亦很突出。在700℃结晶化处理的样品的电击穿强度高达120 kV.mm-1。 展开更多
关键词 击穿强度 性能 玻璃陶瓷 纳米复合材料
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纳米钛酸钡基介电材料的水热合成、结构与性能 被引量:11
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作者 丁士文 王静 +1 位作者 秦江雷 李希茂 《中国科学(B辑)》 CSCD 北大核心 2001年第6期525-529,共5页
采用低温-低压水热法,在170℃,0.8MPa以下合成了一系列Ba1-xSrxTi1-yZryO3(0≤x≤0.5,0≤y≤0.3)和Ba1-xZnxTi1-ySnyO3(0≤x≤0.3,0≤x≤0.3,0≤y≤0.3)固溶体纳米粉末.经XRD物相分析和d-间距-组成图证明,产物为立方钙钛矿结构的完... 采用低温-低压水热法,在170℃,0.8MPa以下合成了一系列Ba1-xSrxTi1-yZryO3(0≤x≤0.5,0≤y≤0.3)和Ba1-xZnxTi1-ySnyO3(0≤x≤0.3,0≤x≤0.3,0≤y≤0.3)固溶体纳米粉末.经XRD物相分析和d-间距-组成图证明,产物为立方钙钛矿结构的完全互溶取代固溶体,结果符合Vegard定律.TEM形貌观察,粒子为均匀球形,平均粒径70nm.通过制陶实验,分别测定了两个系列固溶体纳米粉末的室温介电常数、介电损失以及介电常数随温度的变化,结果发现,用软化学方法在BaTiO3中掺入适量锶、锌和锆、锡,由于掺杂离子均匀进入母体晶格,引起Tc降低,室温介电常数达18000,比BaTiO3纯相提高12倍,而介电损失却降低至1/6. 展开更多
关键词 BaTiO3基固溶体 水热合成 化学掺杂 特性 纳米钛酸钡基材料 损失
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Structural characteristics and dielectric properties of glass-ceramic nanocomposites of(Pb,Sr)Nb_2O_6-NaNbO_3-SiO_2 被引量:3
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作者 王磊 张庆猛 杜军 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2010年第8期1434-1438,共5页
The structure and dielectric properties of (Pb,Sr)Nb2O6-NaNbO3-SiO2 glass-ceramics with different Pb and Sr contents were investigated. The XRD pattern of glass-ceramics without Sr substitution is different from tha... The structure and dielectric properties of (Pb,Sr)Nb2O6-NaNbO3-SiO2 glass-ceramics with different Pb and Sr contents were investigated. The XRD pattern of glass-ceramics without Sr substitution is different from that with Sr substitution, which indicates the existence of orthorhombic phase in the latter ones. TEM bright field observation shows nanosized microstructures, while for samples with Sr, typical eutectic microstrncture with separated crystallized bands is found in the glass matrix. Dielectric properties measurement of the samples indicates an obvious improvement of dielectric constant, dielectric loss, DC field and temperature dependence of dielectric constant when the molar ratio of Sr to Pb is 4:6. 展开更多
关键词 dielectric properties NANOCOMPOSITE (Pb Sr)Nb2O6 NaNbO3 GLASS-CERAMICS
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Chloride Assisted Growth of Aluminum Nitride Nanobelts and Their Enhanced Dielectric Responses
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作者 Ting Xie Min ye +4 位作者 Zhi Jiang Yong Qin Yu-cheng Wu Guo-wen Meng Li-de Zhang 《Chinese Journal of Chemical Physics》 SCIE CAS CSCD 北大核心 2008年第6期586-590,共5页
Aluminum nitride (AlN) nanobelts were successfully synthesized in high yield through a chloride assisted vapor-solid process. X-ray diffraction, transmission electron microscopy, and selected area electronic diffrac... Aluminum nitride (AlN) nanobelts were successfully synthesized in high yield through a chloride assisted vapor-solid process. X-ray diffraction, transmission electron microscopy, and selected area electronic diffraction demonstrate that the as-prepared nanobelts are pure, structurally uniform and single crystalline, and can be indexed to hexagonal wurtzite structure. The micro observations show that there exist no defects in the obtained nanobelts. The growth direction of the nanobelts is along [0001]. The frequency spectra of the relative dielectric constant and of the dielectric loss were measured in the frequency range of 50 Hz to 5 MHz. Analysis of these spectra indicates that the interface in samples has great influence on the dielectric behavior of samples. As compared with AlN micropowders, AlN nanobelts have much higher relative dielectric constant, especially at low frequencies at room temperature. 展开更多
关键词 Aluminum nitride NANOBELT Chloride assisted growth Dielectric property
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Scratching by pad asperities in copper electrochemical-mechanical polishing
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作者 边燕飞 翟文杰 +1 位作者 程媛媛 朱宝全 《Journal of Central South University》 SCIE EI CAS 2014年第11期4157-4162,共6页
Low dielectric constant materials/Cu interconnects integration technology provides the direction as well as the challenges in the fabrication of integrated circuits(IC) wafers during copper electrochemical-mechanical ... Low dielectric constant materials/Cu interconnects integration technology provides the direction as well as the challenges in the fabrication of integrated circuits(IC) wafers during copper electrochemical-mechanical polishing(ECMP). These challenges arise primarily from the mechanical fragility of such dielectrics, in which the undesirable scratches are prone to produce. To mitigate this problem, a new model is proposed to predict the initiation of scratching based on the mechanical properties of passive layer and copper substrate. In order to deduce the ratio of the passive layer yield strength to the substrate yield strength and the layer thickness, the limit analysis solution of surface scratch under Berkovich indenter is used to analyze the nano-scratch experimental measurements. The modulus of the passive layer can be calculated by the nano-indentation test combined with the FEM simulation. It is found that the film modulus is about 30% of the substrate modulus. Various regimes of scratching are delineated by FEM modeling and the results are verified by experimental data. 展开更多
关键词 electrochemical-mechanical polishing scratch pad asperities nano-scratch model nano-indentation
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High-permittivity Sb_(2)S_(3) single-crystal nanorods as a brand-new choice for electromagnetic wave absorption 被引量:2
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作者 Jing Qiao Xue Zhang +4 位作者 Chang Liu Zhou Wang Wei Liu Fenglong Wang Jiurong Liu 《Science China Materials》 SCIE EI CAS CSCD 2021年第7期1733-1741,共9页
The application of antimony sulfide(Sb_(2)S_(3))has been limited mainly to the energy storage and photoelectric conversion fields.However,in this work,the application of Sb_(2)S_(3) is extended to the field of electro... The application of antimony sulfide(Sb_(2)S_(3))has been limited mainly to the energy storage and photoelectric conversion fields.However,in this work,the application of Sb_(2)S_(3) is extended to the field of electromagnetic(EM)wave absorption for the first time.High-permittivity Sb_(2)S_(3) singlecrystal nanorods were prepared successfully and exhibited excellent performance,with a low reflection loss of -65.9 dB(13.0 GHz,3.8 mm)and an ultra-wide effective absorption bandwidth of 9.5 GHz(8.5-18.0 GHz,4.1 mm).After excluding the general absorption mechanisms,including conductive losses,interfacial polarization,and dipole polarization,the distinctive single-crystal volume polarization affected by shape anisotropy was proposed.This work not only meets the challenge of a single-component dielectric material design but also introduces a new concept for construction of efficient dielectric EM wave absorption material. 展开更多
关键词 antimony sulfide single-crystal nanorods high permittivity volume polarization electromagnetic wave absorption
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