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相变区纳米硅氧薄膜的微观结构及光学特性 被引量:2
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作者 李晓苇 李云 +2 位作者 郑燕 高东泽 于威 《光学精密工程》 EI CAS CSCD 北大核心 2017年第4期850-856,共7页
为了研究硅异质结太阳电池中纳米硅氧薄膜的光电特性,采用甚高频等离子体增强化学气相沉积技术制备了一系列不同晶态比例的nc-SiOx∶H薄膜,利用拉曼散射光谱(Raman)、傅里叶变换红外光谱(FTIR)、紫外可见透射光谱以及稳/瞬态光致发光谱... 为了研究硅异质结太阳电池中纳米硅氧薄膜的光电特性,采用甚高频等离子体增强化学气相沉积技术制备了一系列不同晶态比例的nc-SiOx∶H薄膜,利用拉曼散射光谱(Raman)、傅里叶变换红外光谱(FTIR)、紫外可见透射光谱以及稳/瞬态光致发光谱等检测手段分别对薄膜的微观结构、键合配置,能带特征以及发光特性进行了表征。薄膜结构特征分析显示,随着氧掺入量的增加,薄膜由微晶向非晶转化,光学带隙逐渐增加,而处在相变区(晶化度约为10%,nc-Si尺寸约为3nm)的薄膜具有较高的中程有序度、较小的结构因子和较为致密的微观结构。薄膜稳/瞬态光致发光结果显示,一定量的氧掺入可以钝化缺陷、增强发光,而相变区薄膜的发光强度最大,表明较小尺寸的nc-Si具有较强的量子限制效应,nc-Si的量子限制效应发光是主要的载流子复合机制。 展开更多
关键词 纳米硅氧薄膜 相变区 微观结构 光致发光 量子限制效应
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硅氧合金薄膜及其在高效纳米硅薄膜叠层太阳电池中的应用研究 被引量:1
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作者 俞凤至 胡安红 +6 位作者 郁操 曲铭浩 汪涛 张铭 严辉 张津岩 徐希翔 《太阳能学报》 EI CAS CSCD 北大核心 2016年第8期1918-1924,共7页
系统研究两种不同形态的硅氧合金薄膜,用甚高频PECVD系统制备的非晶硅氧和纳米硅氧薄膜的特性,以及其在纳米硅薄膜叠层薄膜太阳电池中的应用。实验中主要通过对不同的气体流量比的优化、沉积功率和沉积压力的优化,分别制备出光学带隙约... 系统研究两种不同形态的硅氧合金薄膜,用甚高频PECVD系统制备的非晶硅氧和纳米硅氧薄膜的特性,以及其在纳米硅薄膜叠层薄膜太阳电池中的应用。实验中主要通过对不同的气体流量比的优化、沉积功率和沉积压力的优化,分别制备出光学带隙约为2.1 e V,折射率约为3的a-SiO_x∶B∶H薄膜,作为非晶硅顶电池的p1层,以及带隙为2.2~2.5 e V,折射率为2.0~2.5,晶化率为20%~50%的nc-SiO_x∶P∶H薄膜,作为非晶硅/纳米硅叠层电池的中间反射层和纳米硅的底电池n2层。最后将优化后的a-SiO_x∶B∶H和nc-SiO_x∶P∶H薄膜应用到非晶硅/纳米硅薄膜叠层电池中,在0.79 m^2的玻璃基板上制备出初始峰值功率为101.1 W、全面积初始转换效率为12.8%、稳定峰值功率为87.3 W、全面积稳定转换效率为11.1%的非晶硅/纳米硅叠层电池。 展开更多
关键词 太阳电池 非晶/纳米叠层电池 合金薄膜 p层非晶薄膜 n层纳米硅氧薄膜
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纳米硅氧多层薄膜低温调控及其发光特性 被引量:3
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作者 李云 张博惠 +3 位作者 高东泽 丛日东 于威 路万兵 《光学精密工程》 EI CAS CSCD 北大核心 2018年第8期1960-1966,共7页
为了研究硅量子点薄膜在太阳电池中的应用,本文采用甚高频等离子体增强化学气相沉积技术,低温制备了镶嵌有纳米晶硅(nc-Si)的纳米硅氧多层(nc-SiOx/a-SiOx)薄膜样品。TEM图显示,通过调整nc-SiOx层的厚度,实现了薄膜多层结构的低温调控... 为了研究硅量子点薄膜在太阳电池中的应用,本文采用甚高频等离子体增强化学气相沉积技术,低温制备了镶嵌有纳米晶硅(nc-Si)的纳米硅氧多层(nc-SiOx/a-SiOx)薄膜样品。TEM图显示,通过调整nc-SiOx层的厚度,实现了薄膜多层结构的低温调控。利用拉曼散射光谱(Raman)、紫外可见透射光谱以及稳/瞬态光致发光(PL)谱等检测手段对薄膜的微观结构、能带特征以及发光特性进行了分析。光吸收谱分析表明,nc-Si粒子尺寸及其a-SiOx边界层共同影响薄膜的光学带隙。稳/瞬态PL谱分析表明,多层结构发光表现为一个固定于1.19eV附近的发光峰和一个随nc-SiOx层厚度增加而发生红移的发光峰,其中固定发光峰归因于非晶SiOx网络中缺陷发光,发光衰减寿命约在4.6μs,峰位可调的发光峰为nc-Si量子限制效应-缺陷态复合发光,对应两个发光衰减过程,其中慢发光衰减寿命随nc-SiOx层厚度增加由9.9μs增加到16.5μs,快发光衰减过程基本保持不变。低温PL谱的温度依赖特性进一步表明,薄膜样品的发光主要表现为nc-Si的量子限制效应发光。 展开更多
关键词 纳米多层薄膜 微观结构 能带特征 光致发光 量子限制效应
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360-nm Photoluminescence from Silicon Oxide Films Embedded with Silicon Nanocrystals 被引量:1
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作者 YANG Lin-lin GUO Heng-qun +1 位作者 ZENG You-hua WANG Qi-ming 《Semiconductor Photonics and Technology》 CAS 2006年第2期90-94,共5页
Si-rich silicon oxide films were deposited by RF magnetron sputtering onto composite Si/SiO2 targets. After annealed at different temperature, the silicon oxide films embedded with silicon nanocrystals were obtained. ... Si-rich silicon oxide films were deposited by RF magnetron sputtering onto composite Si/SiO2 targets. After annealed at different temperature, the silicon oxide films embedded with silicon nanocrystals were obtained. The photoluminescenee(PL) from the silicon oxide films embedded with silicon nanocrystals was observed at room temperature. The strong peak is at 360 nm, its position is independent of the annealing temperature. The origin of the 360-nm PL in the silicon oxide films embedded with silicon nanoerystals was discussed. 展开更多
关键词 RF magnetron sputtering Silicon nanocrystals PL
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Self-assembled Carbon Nanotube/Silicone Composite Films and Their Electrical Properties for Electrical Device
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作者 Sook Young Moon 《Journal of Physical Science and Application》 2016年第2期29-33,共5页
Novel composites were synthesized using AEPTES (3-(2-aminoethylamino)propyltriethoxysilane), which behaves as an excellent dispersant for MWCNTs (multiwall carbon nanotubes) in polymer film matrices. The thickne... Novel composites were synthesized using AEPTES (3-(2-aminoethylamino)propyltriethoxysilane), which behaves as an excellent dispersant for MWCNTs (multiwall carbon nanotubes) in polymer film matrices. The thickness of the synthesized nanocomposite films ranged from 50 to 70 lam, having well-dispersed MWCNTs. Increasing the AEPTES concentration from 0.0196 to 0.0300 M, increased the amine content and the dispersion of MWCNTs. The film synthesized at 0.0300 M AETPES exhibited the greatest degree of dispersion among the three samples, which is consistent with a self-assembled silane group interacting with the MWCNT surface. 展开更多
关键词 Carbon nanotube SELF-ASSEMBLY AEPTES NANOCOMPOSITE electrical properties.
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Controlling the surface buckling wrinkles by patterning the material system of hard-nano-film/soft-matter-substrate
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作者 WU Dan YIN YaJun +4 位作者 XIE HuiMin SHANG YuanFang LI ChuanWei WU LiFu DAI XiangLu 《Science China(Physics,Mechanics & Astronomy)》 SCIE EI CAS 2014年第4期637-643,共7页
Wrinkling and buckling of nano-films on the compliant substrate are always induced due to thermal deformation mismatch.This paper proposes effective means to control the surface wrinkling of thin film on the compliant... Wrinkling and buckling of nano-films on the compliant substrate are always induced due to thermal deformation mismatch.This paper proposes effective means to control the surface wrinkling of thin film on the compliant substrate,which exploits the curvatures of the curve cracks designed on the stiff film.The procedures of the method are summarized as:1)curve patterns are fabricated on the surface of PDMS(Polydimethylsiloxane)substrate and then the aluminum film with the thickness of several hundred nano-meters is deposited on the substrate;2)the curve patterns are transferred onto the aluminum film and lead to cracking of the film along the curves.The cracking redistributes the stress in the compressed film on the substrate;3)on the concave side of the curve,the wrinkling of the film surface is suppressed to be identified as shielding effect and on the convex side the wrinkling of the film surface is induced to be identified as inductive effect.The shielding and inductive effects make the dis-ordered wrinkling and buckling controllable.This phenomenon provides a potential application in the fabrication of flexible electronic devices. 展开更多
关键词 mismatch of thermal deformation wrinkling and buckling inductive effect shielding effect
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