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纳米系统级LSI开发技术获突破
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《机电工程技术》 2003年第1期5-5,共1页
关键词 纳米系统级 LSI 工艺技术 大规模集成电路
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65纳米系统级LSI工艺技术获突破
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《电子质量》 2003年第2期93-94,共2页
关键词 大规模集成电路 LSI 65纳米系统级LSI工艺技术 东芝 索尼
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基于VB的纳米级驱动控制系统研究 被引量:2
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作者 范伟 余晓芬 奚琳 《计量学报》 CSCD 北大核心 2006年第z1期96-99,共4页
压电陶瓷拨爪电机具有大行程、高速、位移分辨率高等突出优点,可以避免使用传统的二级驱动,直接实现纳米级驱动定位.利用PCI-7484数据采集卡和FAGOR自反馈光栅数显卡提供的DLL动态连接库函数及VB中的Timer控件,实现了对压电陶瓷拨爪电... 压电陶瓷拨爪电机具有大行程、高速、位移分辨率高等突出优点,可以避免使用传统的二级驱动,直接实现纳米级驱动定位.利用PCI-7484数据采集卡和FAGOR自反馈光栅数显卡提供的DLL动态连接库函数及VB中的Timer控件,实现了对压电陶瓷拨爪电机的实时可编程控制以及位移信号的获取,成功地构建了纳米级驱动控制系统.经测试,该系统的位移分辨率可达10 nm. 展开更多
关键词 计量学 压电陶瓷拨爪电机 纳米驱动控制系统 位移信号
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复旦大学全光纤纳米级多用测量系统研制成功
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《新材料产业》 2003年第9期77-78,共2页
关键词 复旦大学 全光纤纳米多用测量系统 纳米技术 分辨率 光纤无源器件 干涉光路 位移
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基于光栅干涉相位移动扫描的超精密测量方法 被引量:2
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作者 陈家宝 时轮 汤旭东 《机电一体化》 2015年第4期18-22,共5页
精密定位技术作为精密制造和精密装备的基础,一直制约着我国精密制造和精密装备产业的发展,而纳米级的位移测量技术又是制约精密定位技术发展的一个重要原因。研究了一种基于光栅干涉相位移动扫描原理的纳米级位移测量系统,利用光栅干... 精密定位技术作为精密制造和精密装备的基础,一直制约着我国精密制造和精密装备产业的发展,而纳米级的位移测量技术又是制约精密定位技术发展的一个重要原因。研究了一种基于光栅干涉相位移动扫描原理的纳米级位移测量系统,利用光栅干涉仪实现光学四倍频,再利用条纹移相机构实现信号的进一步细分,获得亚纳米级的测量分辨率。 展开更多
关键词 光栅干涉 相位移动扫描 纳米测量系统
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Application of micro/nanoscale thermal radiation to thermophotovoltaic system 被引量:1
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作者 王爱华 蔡九菊 《Journal of Central South University》 SCIE EI CAS 2011年第6期2176-2184,共9页
Thermophotovoltaic (TPV) system has been regarded as one promising means to alleviate current energy demand because it can directly generate electricity from radiation heat via photons. However, the presently availa... Thermophotovoltaic (TPV) system has been regarded as one promising means to alleviate current energy demand because it can directly generate electricity from radiation heat via photons. However, the presently available TPV systems suffer from low conversion efficiency and low throughput. A viable solution to increase their efficiency is to apply micro/nanoscale radiation principles in the design of different components to utilize the characteristics ~f thermal radiation at small distances and in microstructures. Several critical issues are reviewed, such as photovoltaic effect, quantum efficiency and efficiency of TPV system. Emphasis is given to the development of wavelength-selective emitters and filters and the aspects of micro/nanoscale heat transfer. Recent progress, along with the challenges and opportunities for future development of TPV systems are also outlined. 展开更多
关键词 thermophotovoltaic system micro/nanoscale radiation quantum efficiency EMITTER filter photon tunneling
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A beam flexure-based nanopositioning stage supporting laser direct-write nanofabrication
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作者 Zhen Zhang Peng Wang +1 位作者 Peng Yan YingChun Guan 《Science China(Physics,Mechanics & Astronomy)》 SCIE EI CAS CSCD 2016年第8期50-55,共6页
A nanopositioning system of both millimetric stroke and nanometric tracking accuracy is a key component for nanofabrication in many applications. In this paper, a novel bi-axial beam-flexure nano servo stage is propos... A nanopositioning system of both millimetric stroke and nanometric tracking accuracy is a key component for nanofabrication in many applications. In this paper, a novel bi-axial beam-flexure nano servo stage is proposed to support a direct writing system for femtosecond laser nanofabrication. The important features of the stage lie in: a mirror symmetric instead of rotational symmetric configuration is adopted to restrict cross axis coupling, and a novel Z-shaped guidance module is proposed to achieve relative large linear stiffness range, in addition a redundant constraints module is introduced to increase off-axis stiffness of the stage. Mechanical analysis and system identification are provided, with which a feedback control algorithm demonstrates the tracking capability for laser fabrication purposes. Based on the fabricated XY nano-stage, real time control and measurements are deployed, demonstrating the millimetric operating workspace and 77.8 nm(RMS) error of tracking a circular trajectory. 展开更多
关键词 laser nanofabrication direct writing servo and control system
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