The requirements on the precision of dimensional metrology are especially stringent in the area of semiconductor manufacturing. This holds in particular for the measurement and control of the linewidths of the smalles...The requirements on the precision of dimensional metrology are especially stringent in the area of semiconductor manufacturing. This holds in particular for the measurement and control of the linewidths of the smallest structures on masks and silicon wafers and their corresponding reference metrology. In this paper we will describe the physical models and the reference instrumentation which were developed for photomask linewidth metrology at the PTB. It will be shown, how the results of the different methods can be used for comparative analyses. Application of these methods will be demonstrated exemplarily on the basis of newly developed photomask linewidth standards.展开更多
Bi-Te nanoplates （NPs） grown by a low pressure vapor transport method have been studied by Raman spectroscopy, atomic force microscopy （AFM）, energy- dispersive X-ray spectroscopy （EDS）, and Auger electron spect...Bi-Te nanoplates （NPs） grown by a low pressure vapor transport method have been studied by Raman spectroscopy, atomic force microscopy （AFM）, energy- dispersive X-ray spectroscopy （EDS）, and Auger electron spectroscopy （AES）. We find that the surface of relatively thick （more than tens of nanometers） Bi2Te3 NPs is oxidized in the air and forms a bump under heating with moderate laser power, as revealed by the emergence of Raman lines characteristic of Bi2O3 and TeO2 and characterization by AFM and EDS. Further increase of laser power burns holes on the surface of the NPs. Thin （thicknesses less than 20 nm） NPs with stoichiometry different from Bi2Te3 were also studied. Raman lines from non-stoichiometric NPs are different from those of stoichiometric ones and display characteristic changes with the increase of Bi concentration. Thin NPs with the same thickness but different stoichiometries show different color contrast compared to the substrate in the optical image. This indicates that the optical absorption coefficient in thin Bi-Te NPs strongly depends on their stoichiometry.展开更多
In nanomechanical QED system,consisting of a charge qubit and a nanomechanical resonator with intrinsic nonlinearity,we study the temporal behavior of Rabi oscillation in the nonlinear Jaynes-Cummings model.Using micr...In nanomechanical QED system,consisting of a charge qubit and a nanomechanical resonator with intrinsic nonlinearity,we study the temporal behavior of Rabi oscillation in the nonlinear Jaynes-Cummings model.Using microscopic master equation approach,we solve time evolution of the density operator describing this model.Also,the probability of excited state of charge qubit is calculated.These analytic calculations show how nonlinearity parameter and decay rates of two different excited states of the qubit-resonator system affect time-oscillating and decaying of Rabi oscillation.展开更多
文摘The requirements on the precision of dimensional metrology are especially stringent in the area of semiconductor manufacturing. This holds in particular for the measurement and control of the linewidths of the smallest structures on masks and silicon wafers and their corresponding reference metrology. In this paper we will describe the physical models and the reference instrumentation which were developed for photomask linewidth metrology at the PTB. It will be shown, how the results of the different methods can be used for comparative analyses. Application of these methods will be demonstrated exemplarily on the basis of newly developed photomask linewidth standards.
文摘Bi-Te nanoplates （NPs） grown by a low pressure vapor transport method have been studied by Raman spectroscopy, atomic force microscopy （AFM）, energy- dispersive X-ray spectroscopy （EDS）, and Auger electron spectroscopy （AES）. We find that the surface of relatively thick （more than tens of nanometers） Bi2Te3 NPs is oxidized in the air and forms a bump under heating with moderate laser power, as revealed by the emergence of Raman lines characteristic of Bi2O3 and TeO2 and characterization by AFM and EDS. Further increase of laser power burns holes on the surface of the NPs. Thin （thicknesses less than 20 nm） NPs with stoichiometry different from Bi2Te3 were also studied. Raman lines from non-stoichiometric NPs are different from those of stoichiometric ones and display characteristic changes with the increase of Bi concentration. Thin NPs with the same thickness but different stoichiometries show different color contrast compared to the substrate in the optical image. This indicates that the optical absorption coefficient in thin Bi-Te NPs strongly depends on their stoichiometry.
文摘In nanomechanical QED system,consisting of a charge qubit and a nanomechanical resonator with intrinsic nonlinearity,we study the temporal behavior of Rabi oscillation in the nonlinear Jaynes-Cummings model.Using microscopic master equation approach,we solve time evolution of the density operator describing this model.Also,the probability of excited state of charge qubit is calculated.These analytic calculations show how nonlinearity parameter and decay rates of two different excited states of the qubit-resonator system affect time-oscillating and decaying of Rabi oscillation.
