适用于微纳流控芯片对准连接的微装配系统

针对微纳流控芯片等器件的对准装配问题,分析了具体操作要求,建立了一套包含显微光学观测单元、机械进给调整和器件吸取-放置等的微装配系统,采用暗场照明观测微纳结构,高精度移动平台精确调整基片与盖片之间的角度与位置,利用真空吸附的方法抓取和释放。采用该系统成功地制造了多种可用的微纳流控芯片,以玻璃微纳流控芯片的对准装配为示范开展了实验研究,对准结果表明,该系统能够完成宽53μm,深18μm的微通道与宽3μm,深50~260nm的纳通道的对准连接任务。采用本系统进行芯片对准装配的方法具有仪器成本低、使用灵活和易于互换的优点,适合实验室及小批量生产使用。

纳电子封装

讨论了将成为21世纪电子制造领域的核心科学与技术的纳电子封装的基本概念以及由其产生的驱动力。阐述了纳电子封装的研究内容和纳电子封装的现状及发展趋势。

一种新颖的微纳流体器件制造方法与痕量富集应用

建立了一种利用光致聚合反应制备微纳流体器件的新方法,并开展了相应的痕量富集实验研究:建立描述光致聚合反应中引发剂分解、自由基消耗、聚合反应等的理论模型,利用COMSOL软件计算分析了微尺度凝胶光致聚合反应过程,获得凝胶纳米筛宽度随曝光时间和光强的变化规律;以倒置荧光显微镜为平台,通过聚焦和分光等控制手段,在微流道的特定区域实现孔密度可调的凝胶纳米筛集成,形成微纳流控芯片;以Poisson-Nernst-Planck模型为基础,对纳流体电动富集过程进行计算,确定纳孔密度与富集倍率的关系;利用制备的芯片开展纳流体电动富集实验,发现前驱液中单体丙烯酰胺与交联剂N,N'-亚甲基双丙烯酰胺质量比为9∶1时,对痕量异硫氰酸荧光素(Fluorescein isothiocyanate,FITC)小分子的富集倍率达到600倍。

创造未来的科技发展新趋势

当前,全球新一轮科技革命和产业变革方兴未艾,科技创新正加速推进,并深度融合、广泛渗透到人类社会的各个方面,成为重塑世界格局、创造人类未来的主导力量。我们只有认清趋势、前瞻擘划,才能顺势而为、抢抓机遇。从宏观视角和战略层面看,当今世界科技发展正呈现以下十大新趋势。

A model for nanogrinding based on direct evidence of ground chips of silicon wafers

Nanometer chips were directly fabricated using face nanogrinding carried out by ultrafine diamond grits at room temperature. Direct evidence for ground nanometer chips is cuboid, and the average ratio of width to thickness is 1.49. Chips of 9.0 nm in thickness, 13.3 nm in width, and 16.0 in diagonal were achieved and confirmed using transmission electron microscopy. Based on the nanometer chips observed, a model was proposed according to the mass conservation and fundamental mechanism of face grinding. The surface roughness and thickness of damaged layers measured experimentally are in good agreement with the prediction of the developed model. The feed rate significantly affects the surface roughness and thickness of damaged layers, when keeping the wheel and table speeds constant, respectively.

Single nanoparticle trapping based on on-chip nanoslotted nanobeam cavities

Optical trapping techniques are of great interest since they have the advantage of enabling the direct handling of nanoparticles. Among various optical trapping systems, photonic crystal nanobeam cavities have attracted great attention for integrated on-chip trapping and manipulation. However, optical trapping with high efficiency and low input power is still a big challenge in nanobeam cavities because most of the light energy is confined within the solid dielectric region. To this end, by incorporating a nanoslotted structure into an ultracompact one- dimensional photonic crystal nanobeam cavity structure, we design a promising on-chip device with ultralarge trapping potential depth to enhance the optical trapping characteristic of the cavity. In this work, we first provide a systematic analysis of the optical trapping force for an airborne polystyrene （PS） nanoparticle trapped in a cavity model. Then, to validate the theoretical analysis, the numerical simulation proof is demonstrated in detail by using the three-dimensional finite element method. For trapping a PS nanoparticle of 10 nm radius within the air-slot, a maximum trapping force as high as 8.28 nN/mW and a depth of trapping potential as large as 1.15 × 105 kBTmW-1 are obtained, where kB is the Boltzmann constant and T is the system temperature. We estimate a lateral trapping stiffness of 167.17 pN. nm-1 . mW-1 for a 10 nm radius PS nanoparticle along the cavity x-axis, more than two orders of magnitude higher than previously demonstrated on-chip, near field traps. Moreover, the threshold power for stable trapping as low as 0.087 μW is achieved. In addition, trapping of a single 25 nm radius PS nanoparticle causes a 0.6 nm redshift in peak wavelength. Thus, the proposed cavity device can be used to detect single nanoparticle trapping by monitoring the resonant peak wavelength shift. We believe that the architecture with features of an ultracompact footprint, high integrahility with optical waveguides/cir- cuits, and efficient trapping demonstrated here will provide a promising candidate for developing a lab-on-a-chip device with versatile functionalities.

Chip formation dependence of machining velocities in nano-scale by molecular dynamics simulations

In this study, molecular dynamics simulations were carried out to study the effect of machining velocities on the mechanism of chip formation in nano-metric copper. A wide range of cutting velocities was performed from 10 to 2000 m/s, and the microstructure's evolution from a crystalline state to an amorphous state was studied. At the low machining velocity, dislocations were generated from the surface in front of the tool, and the immobile dislocation deduced by the cross slip of dislocation was observed. At the high machining velocity, no crystal dislocation nucleated, but instead disorder atoms were found near the tool. Temperature near the tool region increased with the increasing machining velocities, and the temperature had an important effect on the phase transition of the crystal structure.

Large-scale assembly of Cu/CuO nanowires for nano-electronic device fabrication

To improve the efficiency of nano-electronic device fabrication, a new method named floating electrical potential assembly is proposed to realize large-scale assembly of Cu/CuO nanowires, The simulation of floating electrical potential distribution on the micro-electrode chip is performed by COMSOL software, and the simulation result shows that the coupled electrical poten- tial on the floating drain electrodes is very close to the original electrical potential applied on the gate electrode, whicb means that the method can provide di-electrophoresis （DEP） force for all the electrode pairs at one time, thus realizing large-scale as- sembly at one time. With Cu/CuO nanowires well dispersed and micro-electrode chip fabrication, nanowires assembly experiments are performed and the experimental results show that Cu/CuO nanowires are assembled at hundreds of micro-electrodes pairs at one time, and the success rate of nanowires assembly also reaches 90%.

Chip-based visual detection of micro RNA using DNA-functionalized gold nanoparticles

In the present study, we developed a highly sensitive and convenient biosensor consisting of gold nanoparticle （AuNP） probes and a gene chip to detect microRNAs （miRNAs）. Specific oligonucleotides were attached to the glass surface as capture probes for the target miRNAs, which were then detected via hybridization to the AuNP probes. The signal was amplified via the re- duction of HAuCI4 by H202. The use of a single AuNP probe detected 10 pmol L-1 of target miRNA. The recovery rate for miR-126 from fetal bovine serum was 81.5%-109.1%. The biosensor detection of miR-126 in total RNA extracted from lung cancer tissues was consistent with the quantitative PCR （qPCR） results. The use of two AuNP probes further improved the de- tection sensitivity such that even 1 fmol L-t of target miR-125a-5p was detectable. This assay takes less than 1 h to complete and the results can be observed by the naked eye, The platform simultaneously detected lung cancer related miR-126 and miR-125a-5p. Therefore, this low cost, rapid, and convenient technology could be used for ultrasensitive and robust visual miRNA detection.