A novel nano-scale alignment technique based on Moiré signal for room-temperature imprint lithography in the submicron realm is proposed. The Moiré signals generated by a pair of quadruple gratings on two te...A novel nano-scale alignment technique based on Moiré signal for room-temperature imprint lithography in the submicron realm is proposed. The Moiré signals generated by a pair of quadruple gratings on two templates respectively are optically projected onto a photodetector array, then the detected Moiré signals are used to estimate the alignment errors in x and y directions. The experiment result indicates that complex differential Moiré signal is sensitive to relative displacement of the pair of marks than each single Moiré signal, and the alignment resolutions obtained in x and y directions are ±20nm(3σ) and ±24nm(3σ). They can meet the requirement of alignment accuracy for submicron imprint lithography.展开更多
Determination of dissolution rate of alumina is one of the classical problems in aluminum electrolysis. A novel method which can measure the dissolution rate of alumina was presented. Effect of factors on dissolution ...Determination of dissolution rate of alumina is one of the classical problems in aluminum electrolysis. A novel method which can measure the dissolution rate of alumina was presented. Effect of factors on dissolution rate of alumina was studied intuitively and roundly using transparent quartz electrobath and image analysis techniques. Images about dissolution process of alumina were taken at an interval of fixed time from transparent quartz electrobath of double rooms. Gabor wavelet transforms were used for extracting and describing the texture features of each image. After subsampling several times, the dissolution rate of alumina was computed using these texture features in local neighborhood of samples. Regression equation of the dissolution rate of alumina was obtained using these dissolution rates. Experiments show that the regression equation of the dissolution rate of alumina is y=-0.000 5x^3＋0.024 0x^2-0.287 3x＋ 1.276 7 for Na3AIF6-AIF3-Al2O3-CaF2-LiF- MgF2 system at 920 ℃.展开更多
文摘A novel nano-scale alignment technique based on Moiré signal for room-temperature imprint lithography in the submicron realm is proposed. The Moiré signals generated by a pair of quadruple gratings on two templates respectively are optically projected onto a photodetector array, then the detected Moiré signals are used to estimate the alignment errors in x and y directions. The experiment result indicates that complex differential Moiré signal is sensitive to relative displacement of the pair of marks than each single Moiré signal, and the alignment resolutions obtained in x and y directions are ±20nm(3σ) and ±24nm(3σ). They can meet the requirement of alignment accuracy for submicron imprint lithography.
基金Projects(51101104,51072121) supported by the National Natural Science Foundation of ChinaProject(LS2010109) supported by the Key Laboratory Foundation of Liaoning Province,China
文摘Determination of dissolution rate of alumina is one of the classical problems in aluminum electrolysis. A novel method which can measure the dissolution rate of alumina was presented. Effect of factors on dissolution rate of alumina was studied intuitively and roundly using transparent quartz electrobath and image analysis techniques. Images about dissolution process of alumina were taken at an interval of fixed time from transparent quartz electrobath of double rooms. Gabor wavelet transforms were used for extracting and describing the texture features of each image. After subsampling several times, the dissolution rate of alumina was computed using these texture features in local neighborhood of samples. Regression equation of the dissolution rate of alumina was obtained using these dissolution rates. Experiments show that the regression equation of the dissolution rate of alumina is y=-0.000 5x^3＋0.024 0x^2-0.287 3x＋ 1.276 7 for Na3AIF6-AIF3-Al2O3-CaF2-LiF- MgF2 system at 920 ℃.
