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准分子激光线形光束晶化非晶硅薄膜 被引量:2
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作者 尹广玥 游利兵 +4 位作者 陈星 邵景珍 陈亮 王庆胜 方晓东 《量子电子学报》 CAS CSCD 北大核心 2019年第2期219-225,共7页
准分子激光线形光束在多晶硅薄膜的工业生产中有重要应用。基于自行研制的激光退火设备输出的线形XeCl准分子激光对等离子体增强化学气相沉积制备的大尺寸非晶硅薄膜进行退火处理。研究了线形光束的能量密度、辐照数量对薄膜晶化程度的... 准分子激光线形光束在多晶硅薄膜的工业生产中有重要应用。基于自行研制的激光退火设备输出的线形XeCl准分子激光对等离子体增强化学气相沉积制备的大尺寸非晶硅薄膜进行退火处理。研究了线形光束的能量密度、辐照数量对薄膜晶化程度的影响,讨论了制备的大尺寸多晶硅薄膜的晶化体积分数及均匀性。实验结果表明,薄膜晶化的阈值为194 mJ·cm^(-2);薄膜的晶化体积分数随能量密度先线性增大,再缓慢减小,线性增长因子约为0.3,当能量密度为432 mJ·cm^(-2)时,晶化程度最优;当辐照数量超过20次时,薄膜的晶化体积分数维持稳定;当光斑搭接率为93.7%时,制备的大尺寸多晶硅薄膜右侧区域的晶化体积分数为92.26%,相对标准差为1.56%,略好于左侧区域。该工作为线形光束晶化非晶硅薄膜的研究及准分子激光线形光束退火设备的国产化及提供了参考。 展开更多
关键词 薄膜 多晶硅 准分子激光退火 能量密度 搭接率 线形光束
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Beam shaping with limited amplitude weight values for satellite active phased array antenna 被引量:1
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作者 Zhao Hongmei Wang Huali +2 位作者 Jin Jun Mu Shanxiang Xie Zehui 《Engineering Sciences》 EI 2010年第2期62-66,共5页
To gain the tradeoff between lower sidelobe and higher power amplifiers efficiency,a transmitting beam shaping scheme with limited amplitude weight values for satellite active phased array antenna is presented. The sc... To gain the tradeoff between lower sidelobe and higher power amplifiers efficiency,a transmitting beam shaping scheme with limited amplitude weight values for satellite active phased array antenna is presented. The scheme is implemented by a dual coding genetic algorithm(GA). Phase and amplitude of array weight vectors for beam shaping are encoded by real coding and finite length binary coding,respectively,which,maintaining accuracy of results,reduces the amplitude dynamic range and improves the efficiency of power amplifiers. The presented algorithm,compared with complex-coded GA,increases the convergence rate due to the search space's decrease. In order to overcome the prematurity and obtain better global optimization or quasi-global optimization,a new dual coding GA based on "species diversity retention" strategy and adaptive crossover and mutation probability are presented. 展开更多
关键词 active phased array antenna beam shaping SIDELOBE power amplifie~ efficiency dual coding genetic algorithm
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Design of chirped fiber gratings for optical beamforming networks
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作者 叶英博 史培明 +1 位作者 黄善国 周静 《Optoelectronics Letters》 EI 2011年第6期401-404,共4页
The properties of the linear chirped fiber grating (CFG) which is used in the true time delay unit of the optical beamforming networks (OBFNs) are studied intensively through theoretical analyses and numerical cal... The properties of the linear chirped fiber grating (CFG) which is used in the true time delay unit of the optical beamforming networks (OBFNs) are studied intensively through theoretical analyses and numerical calculations. It is concluded that the dispersion of the CFG is equal to 1/(3Gc), where G is the chirp coefficient of CFG and c is the light speed. Based on this relationship, a simplified designing process of a CFG which satisfies the requirements of the O13 FN is given. The simula- tion results are coincident with the theoretical conclusions. 展开更多
关键词 Computer simulation
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