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MEMS的细电子束液态曝光技术研究 被引量:1
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作者 孔祥东 张玉林 卢文娟 《青岛大学学报(工程技术版)》 CAS 2005年第4期34-39,共6页
提出了可用于微机电系统加工的细电子束液态曝光技术。对该工艺的曝光方式、真空度需求、抗蚀剂选择以及能量和剂量需求等问题进行了理论分析和实验研究。研究结果表明,在高于1.33×10-2Pa的真空度下、采用曝光机内部曝光的方式,电... 提出了可用于微机电系统加工的细电子束液态曝光技术。对该工艺的曝光方式、真空度需求、抗蚀剂选择以及能量和剂量需求等问题进行了理论分析和实验研究。研究结果表明,在高于1.33×10-2Pa的真空度下、采用曝光机内部曝光的方式,电子束曝光机所提供的电子束的能量和剂量可以满足环氧618等液体抗蚀剂固化需求的结论;并采用SDS II型曝光机在5×10-3Pa的系统真空度、25 kV加速电压、3μC/cm2曝光剂量的条件下,成功地固化了3μm厚的环氧618液体,固化的图形结构与设计的图形基本一致,固化精度约为0.1μm,侧壁的陡直度较好。证明了细电子束液态曝光技术是可行的。电子束液态曝光技术具有可加工高精度、高分辨率、任意高深宽比三维微结构以及控制灵活等优势,但由于使用束斑为几个纳米的电子束来固化抗蚀剂,因而其最大缺点就是生产效率低,故该技术最适用于制作三维微结构模板。 展开更多
关键词 MEMS 细电子束 曝光 抗蚀剂
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Palliative Local Radiotherapy in the Treatment of Tumor-stage Cutaneous T-cell Lymphoma/ Mycosis Fungoides 被引量:3
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作者 Chen-chen Xu Tao Zhang +2 位作者 Tao Wang Jie Liu Yue-hua Liu 《Chinese Medical Sciences Journal》 CAS CSCD 2014年第1期33-37,共5页
Objective To determine the efficacy of palliative radiotherapy in treating tumor-stage cutaneous T-cell lymphoma/mycosis fungoides(MF).Methods From January 2008 to January 2013,a total of 11 patients with tumor-stage ... Objective To determine the efficacy of palliative radiotherapy in treating tumor-stage cutaneous T-cell lymphoma/mycosis fungoides(MF).Methods From January 2008 to January 2013,a total of 11 patients with tumor-stage MF were treated with local radiation therapy in Peking Union Medical College Hospital.The median age of these patients was 53.36±14.45 years.Female-male ratio was 1:1.2.The average course of disease was 10.82±3.37 years.All the patients were treated with local electronic beam irradiation with a total median dosage of 48.55±9.51(40-74) Gy in an average of 24.55±5.57(20-40) fractions,5 fractions per week.Results The median follow-up time was 55.27±29.3(13-103) months.No severe acute or chronic side effects of irradiation were observed.Complete clinical response(CR) rate of the radiated sites was 54.5%(6/11),partial response(PR) rate was 36.4%(4/11),and the overall response rate(CR+PR) was 90.9%.One patient showed no response.Conclusion Local radiotherapy with psolaren plus ultraviolet A and/or interferon maintaining treatment is an effective palliative therapy in the treatment of tumor-stage MF patients. 展开更多
关键词 mycosis fungoides cutaneous T-cell lymphoma RADIOTHERAPY nitrogen mustard psolaren plus ultraviolet A
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