A novel local-dielectric-thickening technique i s presented for performance improvements of Si-based spiral inductors.This technique employs the processes of deposition,photolithography,and wet-etching,to locally thic...A novel local-dielectric-thickening technique i s presented for performance improvements of Si-based spiral inductors.This technique employs the processes of deposition,photolithography,and wet-etching,to locally thicken the oxide layer under the inductor,which can decrease the substrate loss and improve the inductor performance.Both the structures and processes are compact,economical,and compatible with CMOS processing.Several square spiral inductors with different inductances are fabricated,and the quality factors and the self-resonant frequencies both increase clearly with this proposed technique:for the 10nH,5nH,and 2nH inductors,the peak quality factors are effectively improved by 46.7%,49.7%,and 68.6%,respectively;however,the improvement percents of the self-resonant frequencies are more significant,which are 92.1%,91.0%,and no less than 68.1% respectively.展开更多
A combined ME composite structure is made of several cylindrical layered composites in series or parallel connection.Due to the cylindrical structure,the combined structure does not need more space.The characteristics...A combined ME composite structure is made of several cylindrical layered composites in series or parallel connection.Due to the cylindrical structure,the combined structure does not need more space.The characteristics of multi-resonance frequencies have been studied.Each resonance frequency of the structure can be adjusted by changing the cylinder diameter of the corresponding cylindrical layered composites.The number of resonance frequencies increases as the number of cylindrical layered composites increases.The multi-resonance frequencies behavior makes these cylindrical layered composite structures suitable for applications in multifuctional devices with multi-frequencies operation.展开更多
文摘A novel local-dielectric-thickening technique i s presented for performance improvements of Si-based spiral inductors.This technique employs the processes of deposition,photolithography,and wet-etching,to locally thicken the oxide layer under the inductor,which can decrease the substrate loss and improve the inductor performance.Both the structures and processes are compact,economical,and compatible with CMOS processing.Several square spiral inductors with different inductances are fabricated,and the quality factors and the self-resonant frequencies both increase clearly with this proposed technique:for the 10nH,5nH,and 2nH inductors,the peak quality factors are effectively improved by 46.7%,49.7%,and 68.6%,respectively;however,the improvement percents of the self-resonant frequencies are more significant,which are 92.1%,91.0%,and no less than 68.1% respectively.
基金supported by the National High Technology Research and Development Program of China(Grant No.2012AA030403)National Natural Science Foundation of China(Grant Nos.51032003,11274198,51102148,51221291)+2 种基金Shandong Natural Science Foundation(Grant No.ZR2010AM025)the China Postdoctoral Research Foundation(Grant No.2013M530042)the Research Fund for the Doctoral Program of Higher Education(Grant No.2010000612003)
文摘A combined ME composite structure is made of several cylindrical layered composites in series or parallel connection.Due to the cylindrical structure,the combined structure does not need more space.The characteristics of multi-resonance frequencies have been studied.Each resonance frequency of the structure can be adjusted by changing the cylinder diameter of the corresponding cylindrical layered composites.The number of resonance frequencies increases as the number of cylindrical layered composites increases.The multi-resonance frequencies behavior makes these cylindrical layered composite structures suitable for applications in multifuctional devices with multi-frequencies operation.
