The methods for protecting InP surface against degradation during annealing,including encapsulant and encapsulant-free techniques;rapid thermal annealing of InP implanted layers;implanted ion species and some profiles...The methods for protecting InP surface against degradation during annealing,including encapsulant and encapsulant-free techniques;rapid thermal annealing of InP implanted layers;implanted ion species and some profiles of typical dopants,etc.,they are all the key techniques concerning ion implantation into semi-insulating InP,and have been reviewed synthetically as well.展开更多
文摘The methods for protecting InP surface against degradation during annealing,including encapsulant and encapsulant-free techniques;rapid thermal annealing of InP implanted layers;implanted ion species and some profiles of typical dopants,etc.,they are all the key techniques concerning ion implantation into semi-insulating InP,and have been reviewed synthetically as well.
