The paper proposes a novel nano-patterning method called electrically induced nanostructuring, where an external electric field, insteadof the external mechanical pressure, is applied to generate an electrohydrody- na...The paper proposes a novel nano-patterning method called electrically induced nanostructuring, where an external electric field, insteadof the external mechanical pressure, is applied to generate an electrohydrody- namic force acting on the polymer-air interface to drive the polymer＇ s flow into the mold cavities. This electri- cally induced nanostrueturing method no longer requires a large mechanical pressure externally applied for actua- ting the polymer filling in the mold cavities, and has been used to successfully fabricate micro/nano pillar arrays of a high aspect ratio （up to 10）, which have been usually considered to be ＂difficult to fabricate＂ by conventional molding or nanoimprinting processes.展开更多
基金Major Research Plan of NSFC on Nanomanufacturing(No.90923040)National Basic Research Program of China(No.2009CB724202)
文摘The paper proposes a novel nano-patterning method called electrically induced nanostructuring, where an external electric field, insteadof the external mechanical pressure, is applied to generate an electrohydrody- namic force acting on the polymer-air interface to drive the polymer＇ s flow into the mold cavities. This electri- cally induced nanostrueturing method no longer requires a large mechanical pressure externally applied for actua- ting the polymer filling in the mold cavities, and has been used to successfully fabricate micro/nano pillar arrays of a high aspect ratio （up to 10）, which have been usually considered to be ＂difficult to fabricate＂ by conventional molding or nanoimprinting processes.
