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一种提高ESD性能的高压SBD器件结构研究 被引量:1
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作者 钟怡 许国磊 +2 位作者 欧宏旗 义岚 刘嵘侃 《微电子学》 CAS CSCD 北大核心 2012年第2期273-276,共4页
提出了一种新型SBD器件结构,并应用于高压SBD产品的研制。该结构通过在肖特基势垒区的硅表面增加一层表面缓冲掺杂层(Improved Surface Buffer Dope),将高压SBD的击穿点从常规结构的PN结保护环区域转移到平坦的肖特基势垒区,从根本上提... 提出了一种新型SBD器件结构,并应用于高压SBD产品的研制。该结构通过在肖特基势垒区的硅表面增加一层表面缓冲掺杂层(Improved Surface Buffer Dope),将高压SBD的击穿点从常规结构的PN结保护环区域转移到平坦的肖特基势垒区,从根本上提高了器件的反向静电放电(ESD)和浪涌冲击能力。经流片验证,采用该结构的10A150VSBD产品和10A200VSBD产品均通过了反向静电放电(HBM模式)8kV的考核,达到目前业界领先水平。该结构工艺实现简单,可以应用于100V以上SBD的批量生产。 展开更多
关键词 肖基势垒二极管 静电放电 可靠性
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Ti/4H-SiC Schottky Barrier Diodes with Field Plate and B^+ Implantation Edge Termination Technology 被引量:2
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作者 陈刚 李哲洋 +1 位作者 柏松 任春江 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2007年第9期1333-1336,共4页
This paper describes the fabrication and electrical characteristics of Ti/4H-SiC Schottky barrier diodes (SBDs). The ideality factor n = 1.08 and effective Schottky barrier heightφ= 1.05eV of the SBDs were measured... This paper describes the fabrication and electrical characteristics of Ti/4H-SiC Schottky barrier diodes (SBDs). The ideality factor n = 1.08 and effective Schottky barrier heightφ= 1.05eV of the SBDs were measured with the method of forward current density-voltage (J-V). A low reverse leakage current below 5.96 ×10^-3A/cm^2 at a bias voltage of - 1. 1kV was obtained. By using B^+ implantation,an amorphous layer as the edge termination was formed. We used the PECVD SiO2 as the field plate dielectric. The SBDs have an on-state current density of 430A/cm^2 at a forward voltage drop of about 4V. The specific on-resistance Ro, was found to be 6. 77mΩ2 · cm^2 . 展开更多
关键词 4H-SIC Schottky barrier ideal factor barrier height IMPLANTATION
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High-Voltage Ti /6H-SiC Schottky Barrier Diodes
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作者 王姝睿 刘忠立 +2 位作者 李国花 于芳 刘焕章 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2001年第8期962-966,共5页
The fabrication and electrical characterization of Scho tt ky barrier diodes (SBD) on 6H-SiC,via thermal evaporation of Ni are reported.Th e Schottky barrier diodes are fabricated during the 6H-SiC epilayers grow n b... The fabrication and electrical characterization of Scho tt ky barrier diodes (SBD) on 6H-SiC,via thermal evaporation of Ni are reported.Th e Schottky barrier diodes are fabricated during the 6H-SiC epilayers grow n by using chemical vapor deposition on commercially available single-crystal 6 H-SiC wafers.The I-V characteristics of these diodes exhibit a sharp break down,with the breakdown voltage of 450V at room temperature.The diodes are demon strated to be of a low reverse leakage current of 5×10 -4 A·cm -2 at the bias voltage of -200V.The ideal factor and barrier height are 1 09 and 1 24-1 26eV,respectively. 展开更多
关键词 silicon carbide Schottky barrier diode 6H-SIC
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A 5.4mW and 6.1% efficiency fixed-tuned 214GHz frequency doubler with Schottky barrier diodes 被引量:4
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作者 姚常飞 Zhou Ming +2 位作者 Luo Yunsheng Kou Yanan Li Jiao 《High Technology Letters》 EI CAS 2015年第1期85-89,共5页
A Y-band frequency doubler is analyzed and designed with GaAs planar Schottky diode, which is flip-chip solded into a 50 μm thick quartz substrate. Diode embedding impedance is found by full- wave analysis with lumpe... A Y-band frequency doubler is analyzed and designed with GaAs planar Schottky diode, which is flip-chip solded into a 50 μm thick quartz substrate. Diode embedding impedance is found by full- wave analysis with lumped port to model the nonlinear junction for impedance matching without the need of diode equivalent circuit model. All the matching circuit is designed "on-chip" and the mul- tiplier is self-biasing. To the doubler, a conversion efficiency of 6.1% and output power of 5.4mW are measured at 214GHz with input power of 88mW, and the typical measured efficiency is 4.5% in 200 - 225 GHz. 展开更多
关键词 frequency doubler planar schottky diode quartz substrate EFFICIENCY
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Interfacial state induced ultrasensitive ultraviolet light photodetector with resolved flux down to 85 photons per second 被引量:1
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作者 Yong-Qiang Yu Lin-Bao Luo +7 位作者 Ming-Zheng Wang Bo Wang Long-Hui Zeng Chun-Yan Wu Jian-Sheng Jie Jian-Wei Liu Li Wang Shu-Hong Yu 《Nano Research》 SCIE EI CAS CSCD 2015年第4期1098-1107,共10页
We present an ultrasensitive ultraviolet (UV) detector based on a p-type ZnS nanoribbon (NR)/indium tin oxide (ITO) Schottky barrier diode (SBD). The device exhibits a pseudo-photovoltaic behavior which can al... We present an ultrasensitive ultraviolet (UV) detector based on a p-type ZnS nanoribbon (NR)/indium tin oxide (ITO) Schottky barrier diode (SBD). The device exhibits a pseudo-photovoltaic behavior which can allow the SBD to detect UV light irradiation with incident power of 6 × 10^-17 W (-85 photons/s on the NR) at room temperature, with excellent reproducibility and stability. The corresponding detectivity and photoconductive gain are calculated to be 3.1 × 10^20 cm.Hz1/2.W^-1 and 6.6 × 10^5, respectively. It is found that the presence of the trapping states at the p-ZnS NWITO interface plays a crucial role in determining the ultrahigh sensitivity of this nanoSBDs. Based on our theoretical calculation, even ultra-low photon fluxes on the order of several tens of photons could induce a significant change in interface potential and consequently cause a large photocurrent variation. The present study provides new opportunities for developiphigh-performance optoelectronic devices in the future. 展开更多
关键词 II-VI group DETECTIVITY Schottky barrier diode optoelectronic device interfacial states
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Surface Passivation of Ti/4H-SiC Schottky Barrier Diode
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作者 Muhammad Khalid Saira Riaz Shahzad Naseem 《Communications in Theoretical Physics》 SCIE CAS CSCD 2012年第10期577-582,共6页
Surface properties of SiC power devices mostly depend on the passivation layer(PL).This layer has direct influence on electrical characteristics of devices.2D numerical simulation of forward and reverse characteristic... Surface properties of SiC power devices mostly depend on the passivation layer(PL).This layer has direct influence on electrical characteristics of devices.2D numerical simulation of forward and reverse characteristics with and without different(PLs)(SiO2,HfO2 and Si3N4) has been performed.Simulation results show that the breakdown voltage increases with increasing PL thickness,and there is a lesser significant effect on forward characteristics.The maximum breakdown voltage with and without SiO2 PL is 1240 V and 276 V,respectively.SiO2 PL has compatibility with SiC surface providing high breakdown voltage,6 and 8% higher than that of HfO2 and Si3N4 respectively.Low leakage current is observed which then further decreases on reducing the thickness of PL.Furthermore,variation of forward current with dielectric constant and thickness of PLs was observed.Finally,it is suggested that matches of our results with published experimental results indicate that the Sentaurus TCAD simulator is a predictive tool for the SiC Schottky barrier diode simulation. 展开更多
关键词 PASSIVATION breakdown voltage leakage current electric field ON-RESISTANCE
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