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弯月面涂胶及其胶厚均匀性的测量 被引量:2
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作者 林继平 梁榉曦 +4 位作者 刘正坤 王庆博 宝剑光 洪义麟 付绍军 《强激光与粒子束》 EI CAS CSCD 北大核心 2014年第10期116-120,共5页
为实现大面积基片的均匀涂胶,设计组装了一台小型弯月面涂胶样机,实验了200mm×200mm基片的涂胶。利用白光干涉光谱仪扫描测量了弯月面涂胶的胶厚分布,其胶厚均匀性峰谷值偏差低于5%。对弯月面涂胶系统引起的均匀度偏差做了初步分... 为实现大面积基片的均匀涂胶,设计组装了一台小型弯月面涂胶样机,实验了200mm×200mm基片的涂胶。利用白光干涉光谱仪扫描测量了弯月面涂胶的胶厚分布,其胶厚均匀性峰谷值偏差低于5%。对弯月面涂胶系统引起的均匀度偏差做了初步分析研究,并对比了测试系统与经校准的台阶仪胶厚测量结果,偏差小于0.8%。 展开更多
关键词 弯月面涂 大面积涂 白光干涉 胶厚测量 均匀性
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雷达用高深宽比金属铜微通道散热器的制作
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作者 李晓军 吕辉 +2 位作者 朱和卿 赵雯 杜立群 《航空制造技术》 2019年第1期95-100,共6页
基于电化学沉积技术在金属基底上制作了一种雷达用金属铜微通道散热器。针对使用高黏度SU–8胶制作高厚度胶膜时产生的胶厚不均匀问题,采用研磨抛光工艺处理未曝光的胶膜,提高了胶厚均匀性,成功解决了由于空气间隙大带来的尺寸偏差。提... 基于电化学沉积技术在金属基底上制作了一种雷达用金属铜微通道散热器。针对使用高黏度SU–8胶制作高厚度胶膜时产生的胶厚不均匀问题,采用研磨抛光工艺处理未曝光的胶膜,提高了胶厚均匀性,成功解决了由于空气间隙大带来的尺寸偏差。提出了一种在曝光显影前利用折射率计算胶厚的方法,并通过最小二乘法确定了SU–8胶对钠黄光的折射率。针对高深宽比SU–8胶膜因曝光剂量选择不合适导致制作失败的问题,通过光刻试验分析了曝光剂量对胶膜质量的影响,确定了最优的曝光剂量为640mJ/cm2。在上述工艺和试验的基础上得到了质量良好的SU–8胶膜,并制作出了一种线宽50μm、高度大于250μm、深宽比大于5的金属铜微通道散热器,验证了该制作工艺的有效性。 展开更多
关键词 金属微通道 均匀性 胶厚测量 紫外光刻 雷达
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Estimation of the Total Dust Column and Dry Deposition Flux over the Yellow Sea,China Based on Shipboard Sun Photometer Measurements:Case Study 被引量:3
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作者 YANG Dong-Xu LIU Yi CHEN Wen-Zhong 《Atmospheric and Oceanic Science Letters》 2010年第2期64-69,共6页
The total dust column and the dry deposition flux were calculated based on the optical properties that were measured by a shipboard sun photometer POM-01 MK II in a cloud-free and nonfrontal dust condition on 24 April... The total dust column and the dry deposition flux were calculated based on the optical properties that were measured by a shipboard sun photometer POM-01 MK II in a cloud-free and nonfrontal dust condition on 24 April 2006. The total dust column was calculated by using an integration method of the particle size distribution; the mean value was 1.42±0.30 g m 2. A linear correlation between the total dust column and the aerosol optical depth (AOD) with a linear factor of 2.7 g m 2 over the Sahara was applied to calculate the total dust column in this study; the results were lower than these calculated by the integration method. A reasonable factor of 3.2 g m^-2 was achieved by minimizing the standard deviation (SD) of the two methods. The two layers model, which includes the deposition processes of turbulent transfer, Brownian diffusion, impaction and gravitational settling over the sea's surface, was used to calculate the dry deposition flux; the mean value was 5.05±2.49 μg m^-2 s^-1. A correlation among the total dust column, dry deposition flux, AOD, and effective radius was discussed. The correlation between the total better than that between dust column and the AOD was the total dust column and the effective radius; however, the correlation between the dry deposition flux and the effective radius was better than that between the dry deposition flux and the AOD. 展开更多
关键词 Asian dust dry deposition flux total dust column optical properties
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Study on Sensitivity Improving of Fiber Bragg Grating Based pH Sensor 被引量:3
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作者 Xiongchang Liang Shun’er Chen +1 位作者 Hongbin Huang Weiping Liu 《Photonic Sensors》 SCIE EI CAS 2014年第1期28-33,共6页
The key factor of the sensitivity in the FBG-based pH sensor is analyzed in detail. A multi-thin-layer structure of the gel coated cover was proposed and implemented with a special process. The sensors with the coated... The key factor of the sensitivity in the FBG-based pH sensor is analyzed in detail. A multi-thin-layer structure of the gel coated cover was proposed and implemented with a special process. The sensors with the coated thickness of 420 ~m, 500 ~m, and 580 ~m were built up, respectively. The corresponding spectral shifts of 0.08nm, 0.13nm, and 0.22nm were detected when the pH sensors were soaked in the pH value of 3-9. Meanwhile, the sensor with the gel layer thickness of 580 ~tm was measured in the optimum measurement time period with the pH value changing from 3-12, in which the detected sensitivity of 52pm/pH was achieved in the pH range of 6-12. 展开更多
关键词 Fiber Bragg grating HYDROGEL pH sensor sensitivity
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Analysis of XCO_2 retrieval sensitivity using simulated Chinese Carbon Satellite(TanSat) measurements 被引量:5
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作者 CAI ZhaoNan LIU Yi YANG DongXu 《Science China Earth Sciences》 SCIE EI CAS 2014年第8期1919-1928,共10页
We present a study on the retrieval sensitivity of the column-averaged dry-air mole fraction of CO2(XCO2) for the Chinese carbon dioxide observation satellite(TanSat) with a full physical forward model and the optimal... We present a study on the retrieval sensitivity of the column-averaged dry-air mole fraction of CO2(XCO2) for the Chinese carbon dioxide observation satellite(TanSat) with a full physical forward model and the optimal estimation technique. The forward model is based on the vector linearized discrete ordinate radiative transfer model(VLIDORT) and considers surface reflectance, gas absorption, and the scattering of air molecules, aerosol particles, and cloud particles. XCO2 retrieval errors from synthetic TanSat measurements show solar zenith angle(SZA), albedo dependence with values varying from 0.3 to 1 ppm for bright land surface in nadir mode and 2 to 8 ppm for dark surfaces like snow. The use of glint mode over dark oceans significantly improves the CO2 information retrieved. The aerosol type and profile are more important than the aerosol optical depth, and underestimation of aerosol plume height will introduce a bias of 1.5 ppm in XCO2. The systematic errors due to radiometric calibration are also estimated using a forward model simulation approach. 展开更多
关键词 TanSat retrieval sensitivity retrieval error simulation XCO2
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