In this paper,a novel roll-to-roll imprint process is proposed to fabricate gratings in large area. The key challenges in roll-to-roll imprint process,such as the roller mold preparation,imprint system,misalignment of...In this paper,a novel roll-to-roll imprint process is proposed to fabricate gratings in large area. The key challenges in roll-to-roll imprint process,such as the roller mold preparation,imprint system,misalignment of imprint roller and backup roller,and also the imprint pressure,are investigated. Various gratings with different periods and profiles are obtained by the roll-to-roll process. To calibrate the measuring ability of the self-made grating by imprint,a calibration system is built with a dual-frequency laser interferometer. By the calibration,the self-made gratings can achieve ±4μm accuracy in 45mm measuring distance.展开更多
This paper presents the method for the performance calibration of AACMM （articulated arm coordinate measuring machines） according to ASME B89.4.22 Standard. The growing use of this class of measurement equipment has...This paper presents the method for the performance calibration of AACMM （articulated arm coordinate measuring machines） according to ASME B89.4.22 Standard. The growing use of this class of measurement equipment has been accompanied by an absence of authorized laboratories to provide calibration certificates for its performance. Due to ASME B89.4.22 and VD12617-9 are nowadays the unique standards in the field of AACMM verification, IK4 Tekniker has compared both of them in order to develop internal test procedures to yield reliable performance calibration results. As a result, IK4 Tekniker has been recognized by the Spanish Accreditation Body （ENAC） in the field of AACMM calibration. Internal test procedures and uncertainty evaluation analysis have been developed as well as ENAC certificated reference test equipments have been acquired to ensure a suitable AACMM calibration process.展开更多
基金The Major Special Projects of Ministry of Science and Technology of China(No.2011ZX04014-071)National Natural Science Foundation of China(No.51275400)
文摘In this paper,a novel roll-to-roll imprint process is proposed to fabricate gratings in large area. The key challenges in roll-to-roll imprint process,such as the roller mold preparation,imprint system,misalignment of imprint roller and backup roller,and also the imprint pressure,are investigated. Various gratings with different periods and profiles are obtained by the roll-to-roll process. To calibrate the measuring ability of the self-made grating by imprint,a calibration system is built with a dual-frequency laser interferometer. By the calibration,the self-made gratings can achieve ±4μm accuracy in 45mm measuring distance.
文摘This paper presents the method for the performance calibration of AACMM （articulated arm coordinate measuring machines） according to ASME B89.4.22 Standard. The growing use of this class of measurement equipment has been accompanied by an absence of authorized laboratories to provide calibration certificates for its performance. Due to ASME B89.4.22 and VD12617-9 are nowadays the unique standards in the field of AACMM verification, IK4 Tekniker has compared both of them in order to develop internal test procedures to yield reliable performance calibration results. As a result, IK4 Tekniker has been recognized by the Spanish Accreditation Body （ENAC） in the field of AACMM calibration. Internal test procedures and uncertainty evaluation analysis have been developed as well as ENAC certificated reference test equipments have been acquired to ensure a suitable AACMM calibration process.
