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电子束曲面直写的Monte Carlo仿真与实验 被引量:1
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作者 解孟涛 刘俊标 +2 位作者 王鹏飞 张雨露 韩立 《光学精密工程》 EI CAS CSCD 北大核心 2022年第18期2232-2240,共9页
电子束直写技术具有分辨率高、操作简单等优势,是制备微纳米曲面器件的一种理想工具。光刻胶的吸收能量沉积密度分布直接决定了直写后图形的精度和分辨率,由于曲面直写时吸收能量沉积密度分布非对称,因而现有的平面直写工艺不再适用于... 电子束直写技术具有分辨率高、操作简单等优势,是制备微纳米曲面器件的一种理想工具。光刻胶的吸收能量沉积密度分布直接决定了直写后图形的精度和分辨率,由于曲面直写时吸收能量沉积密度分布非对称,因而现有的平面直写工艺不再适用于曲面直写。本文采用基于立方体计算微元的Monte Carlo方法计算不同直写参数变化下的吸收能量沉积密度分布。仿真结果表明:随着入射能量或入射角度的增加,直写点的椭圆度也在增加;而减小束斑和薄胶层可以提升曲面直写的分辨率。实验结果表明:在其他参数不变下,以入射能量(5、10、15 keV)和入射角度(5°、10°、15°)进行单一变量实验,直写点的长宽比分别为1.458、2.323、2.924和1.014、1.113、1.173。可以看出,入射能量对椭圆度地增加更为明显。实验与仿真有了较好地验证,本文结果为曲面直写工艺参数选择提供理论依据。 展开更多
关键词 电子束直写 Monte Carlo模拟 吸收能量沉积密度 散射截面 曲面器件
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Influences of laser energy density and annealing on structure properties of AlN films prepared by pulsed laser deposition
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作者 Lu Lei LIQing-shan +4 位作者 LiLi ZHANGLi-chun WANGCai-feng QlHong-xia ZHENGMeng-meng 《Optoelectronics Letters》 EI 2007年第4期286-288,共3页
Aluminum nitride (AlN) films with h〈100〉 crystalline orientation are fabricated on p-Si (100) substrates at room tempera- ture by pulsed laser deposition. The effects of laser energy density and annealing on the... Aluminum nitride (AlN) films with h〈100〉 crystalline orientation are fabricated on p-Si (100) substrates at room tempera- ture by pulsed laser deposition. The effects of laser energy density and annealing on the quality of the films are studied by x-ray diffraction, Fourier transform infrared spectroscopy and scanning electron microscopy. The crystalline quality of AlN films is improved considerably by increasing the laser energy density while there is increased number of farraginous particles on the surface. The annealing treatment at 600~C produces a recrystallization process in the film, characterized by the improvement of the original crystallinity, the appearance of new crystalline orientations, and the increase of the crystallites. The surface becomes rougher due to the increase of the grain size during annealing. 展开更多
关键词 激光 薄膜 沉积作用 能量密度
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2.1GeV Kr离子在聚碳酸酯膜中引起的辐照效应研究
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作者 田惠贤 金运范 +7 位作者 朱智勇 刘昌龙 孙友梅 王志光 刘杰 陈晓曦 王衍斌 侯明东 《高能物理与核物理》 EI CSCD 北大核心 2002年第4期435-440,共6页
用傅立叶变换红外光 (FTIR)谱仪和紫外 /可见光 (UV/VIS)谱仪研究了2 1GeVKr离子在聚碳酸酯 (PC)膜中产生的效应 .研究结果表明 ,在高能Kr离子辐照下 ,PC膜中发生了断键、断链和键的重组 ,炔基的出现是键的断裂和重组的结果 .这些效应... 用傅立叶变换红外光 (FTIR)谱仪和紫外 /可见光 (UV/VIS)谱仪研究了2 1GeVKr离子在聚碳酸酯 (PC)膜中产生的效应 .研究结果表明 ,在高能Kr离子辐照下 ,PC膜中发生了断键、断链和键的重组 ,炔基的出现是键的断裂和重组的结果 .这些效应与辐照剂量和电子能损有关 .辐照也使PC膜中发生了从氢化非晶态碳向非晶态碳的转变 ,在UV/VIS中 ,波长为 3 80 ,4 50和 50 展开更多
关键词 重离子辐照 聚碳酸酯膜 辐照剂量 电子能损 能量沉积密度 辐照效应
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In situ deposited multilayer integrated hydrogels for deformable and stretchable supercapacitors
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作者 Yanfang Ren Chencheng Sun +6 位作者 Yunlong Liu Ying Hong Qian Wang Wenli Zhao Shuhong Li Wenjun Wang Xiaochen Dong 《Science China Materials》 SCIE EI CAS CSCD 2022年第2期373-382,共10页
Hydrogel systems promote the development of flexible energy storage devices because of their inherent mechanical elasticity and ionic conductivity.However,achieving stable energy storage capacity under violent mechani... Hydrogel systems promote the development of flexible energy storage devices because of their inherent mechanical elasticity and ionic conductivity.However,achieving stable energy storage capacity under violent mechanical deformation is still a challenge for hydrogel devices.In this work,an all-in-one integrated supercapacitor(AISC)was assembled using in situ deposited polyaniline/graphene oxide nanocomposites for both sides of the incorporated ionic hydrogel electrolyte.The assembly process of the AISC was greatly simplified,and the displacement and separation of the multilayer structured hydrogel complex were avoided during mechanical deformation.The hydrogel electrolyte with ionic additives exhibited strong adhesion and flexibility,and high ionic conductivity,thereby ensuring the excellent specific capacitance and rate performance of the AISC.The specific capacitances of the AISC were 222.8 mF cm^(−2) at the current density of 0.2 mA cm^(−2) and 151.7 mF cm^(−2) at 3.2 mA cm^(−2).The capacitance retention rate was 68.1%.The energy density of a piece of the device reached 44.6μW h cm^(−2) at a power density of 120.0μW cm^(−2).Moreover,reliable and reproducible energy storage was acquired under bending,compression,and stretching deformations.The AISC was also easily assembled in series to power a light-emitting diode(LED)light.This work provides a facile approach to the construction of flexible supercapacitors for the development of energy storage devices in flexible electronics. 展开更多
关键词 hydrogel electrolyte flexibility polyaniline/graphene oxide SUPERCAPACITOR
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Three-dimensional lithiophilic Cu@Sn nanocones for dendrite-free lithium metal anodes
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作者 Rui Wang Faxing Shi +4 位作者 Xin He Jinqiang Shi Tao Ma Song Jin Zhanliang Tao 《Science China Materials》 SCIE EI CAS CSCD 2021年第5期1087-1094,共8页
The uneven deposition of lithium(Li) on current collectors causes serious dendrite growth and volume expansion. Commercial foamed copper(Cu) current collectors are unsuitable for Li anodes because of their large volum... The uneven deposition of lithium(Li) on current collectors causes serious dendrite growth and volume expansion. Commercial foamed copper(Cu) current collectors are unsuitable for Li anodes because of their large volume and mass and lithiophobic nature. Herein, a three-dimensional(3 D) copper@tin(Cu@Sn) nanocone current collector with small volume, light weight, and lithiophilic nature was prepared by a simple electrodeposition method. The synergy of the nanoconical structure and lithiophilic Sn promotes the even deposition of Li and effectively inhibits the formation of Li dendrites. The resultant half batteries exhibit high Coulombic efficiency of 97.6% after 100 cycles at 1 mA cm^(-2), and the symmetrical Li battery demonstrates a prolonged lifespan of over 600 h at 1 mA cm^(-2). The full battery based on organic liquid electrolyte with LiFePO_(4) also exhibits a long lifespan of 550 cycles with high capacity retention of 95.1% at 1 C.Moreover, 3 D Cu@Sn nanocone-based solid-state batteries exhibit excellent electrochemical performance and show no decay after 500 cycles at 1 C. Our work provides a strategy for fabricating 3 D current collectors for high-energy-density Li metal batteries. 展开更多
关键词 lithium metal anode current collector 3D structure lithiophilic Cu@Sn nanocones
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