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纳米薄膜脉冲激光沉积技术 被引量:1
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作者 李美成 赵连城 +2 位作者 杨建平 陈学康 吴敢 《宇航材料工艺》 CAS CSCD 北大核心 2001年第4期1-4,48,共5页
简要介绍了脉冲激光薄膜沉积 (PLD)技术的物理原理、独具的特点 ,并且介绍了在PLD基础上结合分子束外延 (MBE)特点发展起来的激光分子束外延 (L -MBE) ,以及采用L
关键词 脉冲激光薄膜沉积 PLD 激光分子束外延 L-MBE 硅基纳米 PtSi薄膜 薄膜科学
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脉冲激光沉积法制备立方焦绿石结构的Bi_(1.5)ZnNb_(1.5)O_7薄膜 被引量:4
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作者 张效华 辛凤 +4 位作者 胡跃辉 杨丰 陈义川 范跃农 曾庆明 《真空科学与技术学报》 EI CAS CSCD 北大核心 2012年第3期232-235,共4页
采用固相反应法合成具有焦绿石立方结构的Bi1.5ZnNb1.507(BZN)陶瓷靶材,采用脉冲激光沉积法在Pt/SiO2/si(100)基片制备立方BZN薄膜。研究了随衬底温度的变化,薄膜的结晶性能,微观形貌以及介电性能的差异。结果表明当衬底温度在... 采用固相反应法合成具有焦绿石立方结构的Bi1.5ZnNb1.507(BZN)陶瓷靶材,采用脉冲激光沉积法在Pt/SiO2/si(100)基片制备立方BZN薄膜。研究了随衬底温度的变化,薄膜的结晶性能,微观形貌以及介电性能的差异。结果表明当衬底温度在550-650℃时,薄膜具有纯的立方BZN结构,并且在600℃时薄膜的晶粒发育比较完整,此时薄膜具有较高的介电常数和较低的损耗。 展开更多
关键词 Bi1.5ZnNb1.5O7薄膜脉冲激光沉积微结构介电性能
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脉冲激光沉积金刚石基c轴取向LiNbO3压电薄膜 被引量:1
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作者 田四方 梅欣丽 +2 位作者 赵明岗 王前进 王新昌 《真空科学与技术学报》 EI CAS CSCD 北大核心 2012年第5期372-375,共4页
采用等化学计量比的LiNbO3多晶陶瓷为靶材,利用脉冲激光沉积技术在以非晶SiO2为缓冲层的金刚石/Si衬底上制备c轴取向LiNbO3薄膜。研究了靶材与衬底之间的距离对LiNbO3薄膜的结晶质量和c轴取向性的影响,发现在靶材与衬底之间的距离为4.0c... 采用等化学计量比的LiNbO3多晶陶瓷为靶材,利用脉冲激光沉积技术在以非晶SiO2为缓冲层的金刚石/Si衬底上制备c轴取向LiNbO3薄膜。研究了靶材与衬底之间的距离对LiNbO3薄膜的结晶质量和c轴取向性的影响,发现在靶材与衬底之间的距离为4.0cm时获得了具有优异结晶质量的完全c轴取向LiNbO3压电薄膜。采用扫描电子显微镜和原子力显微镜对最佳条件下制备的薄膜进行了分析,结果表明制得的薄膜呈与衬底垂直的柱状结构,且薄膜表面光滑,晶粒均匀致密,表面平均粗糙度约为9.5 nm。 展开更多
关键词 LiNbO3压电薄膜金刚石/Si缓冲层脉冲激光沉积
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PLD法制备Cu膜生长的计算机模拟与实验
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作者 崔海涛 王永仓 段章山 《微计算机信息》 北大核心 2007年第31期197-198,289,共3页
介绍了脉冲激光薄膜沉积技术(PLD)的原理,建立了PLD成膜过程初期生长的物理模型,并运用动力学蒙特卡罗方法对基于硅衬底的铜膜PLD生长进行了计算机模拟,得到生长形态图及剖面图,在相同的参数下做PLD实验,将所得原子力测试图与模拟进行... 介绍了脉冲激光薄膜沉积技术(PLD)的原理,建立了PLD成膜过程初期生长的物理模型,并运用动力学蒙特卡罗方法对基于硅衬底的铜膜PLD生长进行了计算机模拟,得到生长形态图及剖面图,在相同的参数下做PLD实验,将所得原子力测试图与模拟进行了比较,结果相近。 展开更多
关键词 脉冲激光薄膜沉积 计算机模拟 动力学蒙特卡罗方法 薄膜生长
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Pulsed Laser Deposition ZnS Buffer Layers for CIGS Solar Cells 被引量:4
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作者 Pai-feng Luo Guo-shun Jiang Chang-fei Zhu 《Chinese Journal of Chemical Physics》 SCIE CAS CSCD 2009年第1期97-101,共5页
Polycrystalline ZnS films were prepared by pulsed laser deposition (PLD) on quartz glass substrates under different growth conditions at different substrate temperatures of 20, 200, 400, and 600 ℃, which is a suita... Polycrystalline ZnS films were prepared by pulsed laser deposition (PLD) on quartz glass substrates under different growth conditions at different substrate temperatures of 20, 200, 400, and 600 ℃, which is a suitable alternative to chemical bath deposited (CBD) CdS as a buffer layer in Cu(In,Ga)Se2 (CIGS) solar cells. X-ray diffraction studies indicate the films are polycrystalline with zinc-blende structure and they exhibit preferential orientation along the cubic phase β-ZnS (111) direction, which conflicts with the conclusion of wurtzite structure by Murali that the ZnS films deposited by pulse plating technique was polycrystalline with wurtzite structure. The Raman spectra of grown films show Al mode at approximately 350 cm^-1, generally observed in the cubic phase β-ZnS compounds. The planar and the cross-sectional morphology were observed by scanning electron microscopic. The dense, smooth, uniform grains are formed on the quartz glass substrates through PLD technique. The grain size of ZnS deposited by PLD is much smaller than that of CdS by conventional CBD method, which is analyzed as the main reason of detrimental cell performance. The composition of the ZnS films was also measured by X-ray fluorescence. The typical ZnS films obtained in this work are near stoichiometric and only a small amount of S-rich. The energy band gaps at different temperatures were obtained by absorption spectroscopy measurement, which increases from 3.2 eV to 3.7 eV with the increasing of the deposition temperature. ZnS has a wider energy band gap than CdS (2.4 eV), which can enhance the blue response of the photovoltaic cells. These results show the high-quality of these substitute buffer layer materials are prepared through an all-dry technology, which can be used in the manufacture of CIGS thin film solar cells. 展开更多
关键词 ZnS thin films Pulsed laser deposition Chemical bath deposition Buffer layer
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Properties of multilayer gallium and aluminum doped ZnO(GZO/AZO) transparent thin films deposited by pulsed laser deposition process 被引量:1
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作者 Jin-Hyun SHIN Dong-Kyun SHIN +1 位作者 Hee-Young LEE Jai-Yeoul LEE 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2011年第A01期96-99,共4页
Multilayer gallium and aluminum doped ZnO (GZO/AZO) films were fabricated by alternative deposition of Ga-doped zinc oxide(GZO) and Al-doped zinc oxide(AZO) thin film by using pulsed laser deposition(PLD) proc... Multilayer gallium and aluminum doped ZnO (GZO/AZO) films were fabricated by alternative deposition of Ga-doped zinc oxide(GZO) and Al-doped zinc oxide(AZO) thin film by using pulsed laser deposition(PLD) process. The electrical and optical properties of these GZO/AZO thin films were investigated and compared with those of GZO and AZO thin films. The GZO/AZO (1:1) thin film deposited at 400 ~C shows the electrical resistivity of 4.18 x 10 4 ~.cm, an electron concentration of 7.5 x 1020/cm3, and carrier mobility of 25.4 cm2/(V.s). The optical transmittances of GZO/AZO thin films are over 85%. The optical band gap energy of GZO/AZO thin films linearly decreases with increasing the AI ratio. 展开更多
关键词 MULTILAYER thin films Ga-doped zinc oxide Al-doped zinc oxide pulsed laser deposition
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Recent Advances in ZnO Films Prepared by Pulsed Laser Deposition 被引量:1
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作者 HE Jian-ting ZHUANG Hui-zhao XUE Cheng-shan ZHAO jing TIAN De-heng WU Yu-xin LIU Yi-an XUE Shou-bin HU Li-jun 《Semiconductor Photonics and Technology》 CAS 2005年第4期239-243,258,共6页
Pulsed laser deposition(PLD) is emerging as the most rapid and efficient technique for fabricating the many compound films. ZnO thin films can be prepared under various deposition conditions by PLD. The effects of var... Pulsed laser deposition(PLD) is emerging as the most rapid and efficient technique for fabricating the many compound films. ZnO thin films can be prepared under various deposition conditions by PLD. The effects of various substrate temperature, oxygen partial pressure, annealing temperature, substrate, buffer layers thickness and film thickness on micro-structural, optical and electrical properties of ZnO films grown by PLD technology are reviewed. ZnO films with special function can grow under proper conditions by PLD. 展开更多
关键词 PLD ZNO Substrate temperature Oxygen pressure
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Effects of Annealing Temperature on Properties of ZnO Thin Films Grown by Pulsed Laser Deposition
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作者 ZHUANG Hui-zhao XUE Shou-bin XUE Cheng-shan HU Li-jun LI Bao-li ZHANG Shi-ying 《Semiconductor Photonics and Technology》 CAS 2007年第2期150-154,共5页
ZnO thin films are deposited on n-Si(111) substrates by pulsed laser deposition(PLD) system. Then the samples are annealed at different temperatures in air ambient and their properties are investigated particularl... ZnO thin films are deposited on n-Si(111) substrates by pulsed laser deposition(PLD) system. Then the samples are annealed at different temperatures in air ambient and their properties are investigated particularly as a function of annealing temperature. The microstructure, morphology and optical properties of the as-grown ZnO films are studied by X-ray diffraetion(XRD). atomic force mieroseope(AFM), Fourier transform infrared spectroscopy(FTIR) and photoluminescence(PL) spectra. The results show that the as- grown ZnO films have a hexagonal wurtzite structure with a preferred c-axis orientation. Moreover, the diameters of the ZnO crystallites become larger and the crystal quality of the ZnO fihns is improved with the increase of annealing temperature. 展开更多
关键词 annealing temperature ZnO films Si substrate pulsed laser deposition
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Effect of Annealing Temperatures on the Structural and Electrical Properties of Laser Induced Plasma for TiO2x-1Bix Thin Films
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作者 Sabah N. Mazhir Ghuson H. Mohamed +1 位作者 Kadhim A. Aadem Maysoon D. Radhi 《Journal of Physical Science and Application》 2016年第1期36-43,共8页
In this study, Bismuth doped Titanium dioxide thin films were deposited on glass substrates by a pulse laser deposition using laser. The effect of annealing temperature on the structural and electrical properties was ... In this study, Bismuth doped Titanium dioxide thin films were deposited on glass substrates by a pulse laser deposition using laser. The effect of annealing temperature on the structural and electrical properties was investigated. X-ray diffraction pattern for pure and doped titanium dioxide films with different doping different ratio with Bi show that these films have amorphous structure oanvert to polycrystalline structure with annealing and doping and have a good identically with standard peaks for Anatase and Rutile phases. The orientation was at specific direction for Rutile. The crystalline of films increases by the increase of doping ratio. The crystalline increased with annealing temperature. Annealed films at different annealing temperatures have been studied. The results show that these films have two activation energies and by increasing the doping ratio, the activation energies and the conductivity increase. Both the annealing and composition effects on Hall constant, density of electron carders and Hall mobility are studied. Hall Effect measurements show that all films have n- type charge conductivity and the concentration increases while the mobility decreases with doping and annealing. 展开更多
关键词 Electrical properties structural properties TiO2 thin films pulse laser deposition technique.
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Sb掺杂SrTiO_3透明导电薄膜的光电子能谱研究 被引量:9
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作者 崔大复 王焕华 +6 位作者 戴守愚 周岳亮 陈正豪 杨国桢 刘凤琴 奎热西 钱海杰 《物理学报》 SCIE EI CAS CSCD 北大核心 2002年第1期187-191,共5页
用X射线光电子能谱和同步辐射光电子能谱研究了Sb掺杂的钙钛矿型氧化物SrTi1 -xSbxO3(x =0 .0 5 ,0 .10 ,0 .15 ,0 .2 0 )薄膜的电子结构 .薄膜由紫外脉冲激光淀积在SrTiO3( 0 0 1)单晶衬底上 .该薄膜系列在可见光波段透明 ,透过率均超... 用X射线光电子能谱和同步辐射光电子能谱研究了Sb掺杂的钙钛矿型氧化物SrTi1 -xSbxO3(x =0 .0 5 ,0 .10 ,0 .15 ,0 .2 0 )薄膜的电子结构 .薄膜由紫外脉冲激光淀积在SrTiO3( 0 0 1)单晶衬底上 .该薄膜系列在可见光波段透明 ,透过率均超过 90 % .其导电性与掺杂浓度有关 ,当Sb掺杂浓度x =0 .0 5时 ,薄膜显示金属型导电性 .X射线光电子能谱和同步辐射光电子能谱研究结果表明 ,Sb掺杂在母化合物SrTiO3的禁带内引入了浅杂质能级和深杂质能级 .浅杂质能级上的退局域化电子离化到导带中会产生一定的传导电子 ,这是SrTi0 .95Sb0 .0 5O3薄膜金属型导电性的起源 .杂质带与导带中低的电子态密度限制了跃迁概率和光吸收 .大的禁带宽度 ,小的跃迁概率和弱的光吸收 。 展开更多
关键词 光电子能谱 光学透过率 脉冲激光沉积薄膜 钛酸锶 SRTIO3 Sb掺杂 透明导电薄膜 锑掺杂
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Zn0.97Cr0.03,O的PLD制备及其铁磁性 被引量:1
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作者 谢玲玲 陈水源 +3 位作者 刘凤金 张建敏 林应斌 黄志高 《物理学报》 SCIE EI CAS CSCD 北大核心 2014年第7期289-295,共7页
采用脉冲激光沉积(PLD)的方法在石英基片上制备了不同氧分压(0,0.05,0.15和0.20 Pa)下Zn0.97Cr0.03O薄膜,并测量了它们的磁性、XRD谱、PL谱及XPS谱等.实验结果表明,所有的样品都具有良好的结晶性,且都沿c轴高度取向;磁测量结果表明,四... 采用脉冲激光沉积(PLD)的方法在石英基片上制备了不同氧分压(0,0.05,0.15和0.20 Pa)下Zn0.97Cr0.03O薄膜,并测量了它们的磁性、XRD谱、PL谱及XPS谱等.实验结果表明,所有的样品都具有良好的结晶性,且都沿c轴高度取向;磁测量结果表明,四个样品都具有铁磁性,且在氧压为0.15 Pa下沉积的薄膜磁性最强;四个样品都存在VZn,Oi,Zni,VZn,VO缺陷,尤其是VZn对应共振峰面积占所有缺陷总面积的百分比和样品的饱和磁化强度具有相同的变化趋势,表明Zn0.97Cr0.03O磁性与锌空位密切相关;四个样品中都存在Cr3+离子,且在0.15 Pa时Cr3+的含量最多.上述实验结果表明,Cr3+和VZn的缺陷复合体是ZnO:Cr样品具有稳定的铁磁有序的最有利条件,它证实了早先的基于第一性原理的计算结果. 展开更多
关键词 ZNO 97Cro 030薄膜 铁磁性 脉冲激光沉积 光致发光谱
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Enhanced electrical properties in bilayered ferroelectric thin films 被引量:2
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作者 ZHANG Hao LONG WeiJie +1 位作者 CHEN YaQing GUO DongJie 《Science China Chemistry》 SCIE EI CAS 2013年第3期551-555,共5页
Sr2Bi4Ti5O18(SBTi) single layered and Sr2Bi4Ti5O18 /Pb(Zr0.53Ti0.47)O3(SBTi/PZT) bilayered thin films have been prepared on Pt/TiO2/SiO2/Si substrates by pulsed-laser deposition(PLD).The related structural characteriz... Sr2Bi4Ti5O18(SBTi) single layered and Sr2Bi4Ti5O18 /Pb(Zr0.53Ti0.47)O3(SBTi/PZT) bilayered thin films have been prepared on Pt/TiO2/SiO2/Si substrates by pulsed-laser deposition(PLD).The related structural characterizations and electrical properties have been comparatively investigated.X-ray diffraction reveals that both films have crystallized into perovskite phases and scanning electron microscopy shows the sharp interfaces.Both films show well-saturated ferroelectric hysteresis loops,however,compared with the single layered SBTi films,the SBTi/PZT bilayered films have significantly increased remnant polarization(Pr) and decreased coercive field(Ec),with the applied field of 260 kV/cm.The measured Pr and Ec of SBTi and SBTi/PZT films were 7.9 C/cm 2,88.1 kV/cm and 13.0 C/cm 2,51.2 kV/cm,respectively.In addition,both films showed good fatigue-free characteristics,the switchable polarization decreased by 9% and 11% of the initial values after 2.2 10 9 switching cycles for the SBTi single layered films and the SBTi/PZT bilayered films,respectively.Our results may provide some guidelines for further optimization of multilayered ferroelectric thin films. 展开更多
关键词 bilayered films X-ray diffraction scanning electron microscopy ferroelectric properties
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Optical properties of ZnO thin films grown on diamond-like carbon by pulsed laser deposition 被引量:3
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作者 李少兰 张立春 +1 位作者 董艳锋 赵风周 《Optoelectronics Letters》 EI 2012年第6期445-448,共4页
ZnO/diamond-like carbon(DLC)thin films are deposited by pulsed laser deposition(PLD),and the room-temperature photoluminescence(PL)is investigated.Using a fluorescence spectrophotometer,we obtain the PL spectra of DLC... ZnO/diamond-like carbon(DLC)thin films are deposited by pulsed laser deposition(PLD),and the room-temperature photoluminescence(PL)is investigated.Using a fluorescence spectrophotometer,we obtain the PL spectra of DLC/Si and ZnO/Si thin films deposited at different substrate temperatures.The ZnO/DLC thin films show a broadband emission almost containing the entire visible spectrum.The Gaussian fitting curves of PL spectra reveal that the visible emission of ZnO/DLC thin films consists of three peaks centered at 381 nm,526 nm and 682 nm,which are attributed to the radiative recombination of ZnO and DLC,respectively.The Commission International de l,Eclairage(CIE)1931(x,y)chromaticity space of ZnO/DLC thin films indicates that the visible PL spectrum is very close to the standard white-light region. 展开更多
关键词 CARBON Curve fitting DEPOSITS LASERS Optical properties Pulsed laser deposition Zinc oxide
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Orthorhombic HoMnO_3/Nb-doped SrTiO_3 epitaxial heterojunctions fabricated by pulsed laser deposition 被引量:1
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作者 ZHAO YuJie YUAN DeHua +2 位作者 ZHANG LiXin DAI ZhenHong WANG WeiTian 《Science China(Physics,Mechanics & Astronomy)》 SCIE EI CAS 2011年第11期1977-1980,共4页
Orthorhombic HoMnO 3 films with a-axis orientations were prepared epitaxially on Nb-1.0wt%-doped SrTiO 3 single crystal substrates by using the pulsed laser deposition technique to fabricate all-oxide heterojunctions.... Orthorhombic HoMnO 3 films with a-axis orientations were prepared epitaxially on Nb-1.0wt%-doped SrTiO 3 single crystal substrates by using the pulsed laser deposition technique to fabricate all-oxide heterojunctions.X-ray diffraction and atomic force microscopy were then used to characterize the films.The temperature dependent current-voltage measurement displayed diode-like rectifying behavior,and the forward current was perfectly fitted using the thermionic emission model.The ideality factor and built-in potential were suggested. 展开更多
关键词 HETEROJUNCTIONS orientation rectifying behavior
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Photonic bandgap amorphous chalcogenide thin films with multilayered structure grown by pulsed laser deposition method
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作者 张绍骞 Petre Němec +1 位作者 Virginie Nazabal 金玉奇 《Optoelectronics Letters》 EI 2016年第3期199-202,共4页
Amorphous chalcogenide thin films were fabricated by the pulsed laser deposition technique. Thereafter, the stacks of multilayered thin films for reflectors and microcavity were designed for telecommunication waveleng... Amorphous chalcogenide thin films were fabricated by the pulsed laser deposition technique. Thereafter, the stacks of multilayered thin films for reflectors and microcavity were designed for telecommunication wavelength. The prepared multilayered thin films for reflectors show good compatibility. The microcavity structure consists of Ge_(25)Ga)5Sb_(10)S_(65)(doped with Er^(3+)) spacer layer surrounded by two 5-layer As_(40)Se_(60)/Ge_(25)Sb_(5)S_(70) reflectors. Scanning/transmission electron microscopy results show good periodicity, great adherence and smooth interfaces between the alternating dielectric layers, which confirms a suitable compatibility between different materials. The results demonstrate that the chalcogenides can be used for preparing vertical Bragg reflectors and microcavity with high quality. 展开更多
关键词 多层薄膜 脉冲激光沉积 多层结构 光子带隙 硫系 非晶 布拉格反射镜 脉冲激光沉积技术
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Epitaxial growth and in-plane dielectric properties of orthorhombic HoMnO_3 films
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作者 GAO Ping WANG WeiTian +1 位作者 ZHANG Wei SUN YuMing 《Science China(Physics,Mechanics & Astronomy)》 SCIE EI CAS 2014年第10期1875-1878,共4页
Orthorhombic HoMnO3(HMO) thin films were grown epitaxially on LaAlO3(001) substrates by using pulsed laser deposition technique. The films showed perfect orthorhombic crystallization and were well-aligned with the sub... Orthorhombic HoMnO3(HMO) thin films were grown epitaxially on LaAlO3(001) substrates by using pulsed laser deposition technique. The films showed perfect orthorhombic crystallization and were well-aligned with the substrates. The in-plane dielectric constant and loss of HMO films were measured as functions of temperature(80–300 K) and frequency(120 Hz–100 kHz) by using coplanar interdigital electrodes. Two thermally activated dielectric relaxations were found, and the respective peaks shifted to higher temperatures as the measuring frequency increased. The in-plane dielectric properties of epitaxial orthorhombic HMO films were considered as universal dielectric response behavior, and the dipolar effects and the hopping conductivity induced by the charge carriers were used to explain the results. 展开更多
关键词 dielectric properties interdigital electrodes HoMnO3 thin films ORTHORHOMBIC
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