A new S-type of erbium-ytterbium co-doped phosphate glass waveguide amplifier integrated with cascaded multilayer medium thin film filter is proposed,this S-type geometry waveguide structure is used to achieve a long ...A new S-type of erbium-ytterbium co-doped phosphate glass waveguide amplifier integrated with cascaded multilayer medium thin film filter is proposed,this S-type geometry waveguide structure is used to achieve a long path in a compact chip,and obtained higher gain with lower Er-doped concentration. The cascaded multilayer medium thin film filter is utilized to achieve a broader flattening gain bandwidth.The intrinsical gain spectrum is obtained by solving rate and power propagation equations,the effect of transmittance spectrum of thin film filter on flattening gain is discussed.展开更多
A various effective resist diffusion lengths methodology for OPC model calibration is proposed,which considers the discrepancy of effective resist diffusion lengths between 1D and 2D patterns. An important step of thi...A various effective resist diffusion lengths methodology for OPC model calibration is proposed,which considers the discrepancy of effective resist diffusion lengths between 1D and 2D patterns. An important step of this methodology is to set up a new calibration flow that lets 1D and 2D patterns have the same optical parameters but different effective diffusion lengths. Furthermore, a design for manufacturing （DFM） interaction is suggested in the calibration flow of the pro- posed model. From the CD errors of fitting results and the comparison between simulated contours and SEM images,it is found that the various effective resist diffusion lengths model calibration methodology results in a more accurate and stable model.展开更多
文摘A new S-type of erbium-ytterbium co-doped phosphate glass waveguide amplifier integrated with cascaded multilayer medium thin film filter is proposed,this S-type geometry waveguide structure is used to achieve a long path in a compact chip,and obtained higher gain with lower Er-doped concentration. The cascaded multilayer medium thin film filter is utilized to achieve a broader flattening gain bandwidth.The intrinsical gain spectrum is obtained by solving rate and power propagation equations,the effect of transmittance spectrum of thin film filter on flattening gain is discussed.
文摘A various effective resist diffusion lengths methodology for OPC model calibration is proposed,which considers the discrepancy of effective resist diffusion lengths between 1D and 2D patterns. An important step of this methodology is to set up a new calibration flow that lets 1D and 2D patterns have the same optical parameters but different effective diffusion lengths. Furthermore, a design for manufacturing （DFM） interaction is suggested in the calibration flow of the pro- posed model. From the CD errors of fitting results and the comparison between simulated contours and SEM images,it is found that the various effective resist diffusion lengths model calibration methodology results in a more accurate and stable model.
