Using the same conditions and various starting materials, such as lead acetate trihydrate, tetrabulyl titanate, zirconium n-butoxide, and acetylacetone, two kinds of solid precursors, lead zirconate titanate （PZT, Zr...Using the same conditions and various starting materials, such as lead acetate trihydrate, tetrabulyl titanate, zirconium n-butoxide, and acetylacetone, two kinds of solid precursors, lead zirconate titanate （PZT, Zr/Ti=15/85） and lead titanate （PT）, were fabricated. With three different combinations, namely, PZT, PT/PZT-PZT/PT, and PT/PZT/-/PZT/PT, three multilayer thin films were deposited on three Pt-Ti-Si3N4-SiO2-Si substrates by a modified sol-gel process. The fabrication process of the thin films is discussed in detail. We found that there is a large built-in stress in the thin film, which can be diminished by annealing at 600 ℃, when the gel is turned into solid material through drying and sintering. The Raman scattering spectra of the films with different compositions and structures were investigated. With the help of X-ray diffraction （XRD） analyzer and Raman scattering spectra analyzer, it was found that the thin films with the PT/PZT-PZT/PT structure have reasonable crystallinity and less residual stress. XRD testing shows that the diffraction pattern of the multilayer film results from the superimposition of the PZT and PT patterns. This leads to the conclusion that the PT/PZT-PZT/PT multilayer thin film has a promising future in pyroelectric infrared detectors with high performance.展开更多
In this paper, we conduct research on the high-strength coating preparation methodology based on acid catalytic and Sol-Gel method. This method has been widely used in the preparation of various functional thin film, ...In this paper, we conduct research on the high-strength coating preparation methodology based on acid catalytic and Sol-Gel method. This method has been widely used in the preparation of various functional thin film, film and protective film structure, etc. As a result of sol gel process continuously broaden the application field, this method has been more and more get the favor of people. Compared with other traditional preparation methods of inorganic material, sol-gel process has many characteristics. To adjust the solution acidity and add a small amount of acid or alkali can have the effect of＂ catalyst, its reaction process on sol to get and gel structure may also be affected. Our research analyze the topic theoretically and numerically which is meaningful.展开更多
文摘Using the same conditions and various starting materials, such as lead acetate trihydrate, tetrabulyl titanate, zirconium n-butoxide, and acetylacetone, two kinds of solid precursors, lead zirconate titanate （PZT, Zr/Ti=15/85） and lead titanate （PT）, were fabricated. With three different combinations, namely, PZT, PT/PZT-PZT/PT, and PT/PZT/-/PZT/PT, three multilayer thin films were deposited on three Pt-Ti-Si3N4-SiO2-Si substrates by a modified sol-gel process. The fabrication process of the thin films is discussed in detail. We found that there is a large built-in stress in the thin film, which can be diminished by annealing at 600 ℃, when the gel is turned into solid material through drying and sintering. The Raman scattering spectra of the films with different compositions and structures were investigated. With the help of X-ray diffraction （XRD） analyzer and Raman scattering spectra analyzer, it was found that the thin films with the PT/PZT-PZT/PT structure have reasonable crystallinity and less residual stress. XRD testing shows that the diffraction pattern of the multilayer film results from the superimposition of the PZT and PT patterns. This leads to the conclusion that the PT/PZT-PZT/PT multilayer thin film has a promising future in pyroelectric infrared detectors with high performance.
文摘In this paper, we conduct research on the high-strength coating preparation methodology based on acid catalytic and Sol-Gel method. This method has been widely used in the preparation of various functional thin film, film and protective film structure, etc. As a result of sol gel process continuously broaden the application field, this method has been more and more get the favor of people. Compared with other traditional preparation methods of inorganic material, sol-gel process has many characteristics. To adjust the solution acidity and add a small amount of acid or alkali can have the effect of＂ catalyst, its reaction process on sol to get and gel structure may also be affected. Our research analyze the topic theoretically and numerically which is meaningful.
