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薄硅层阶梯埋氧PSOI高压器件新结构
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作者 吴丽娟 胡盛东 +1 位作者 张波 李肇基 《固体电子学研究与进展》 CAS CSCD 北大核心 2010年第3期327-332,共6页
基于介质电场增强ENDIF理论,提出了一种薄硅层阶梯埋氧型部分SOI(SBPSOI)高压器件结构。埋氧层阶梯处所引入的电荷不仅增强了埋层介质电场,而且对有源层中的电场进行调制,使电场优化分布,两者均提高器件的击穿电压。详细分析器件耐压与... 基于介质电场增强ENDIF理论,提出了一种薄硅层阶梯埋氧型部分SOI(SBPSOI)高压器件结构。埋氧层阶梯处所引入的电荷不仅增强了埋层介质电场,而且对有源层中的电场进行调制,使电场优化分布,两者均提高器件的击穿电压。详细分析器件耐压与相关结构参数的关系,在埋氧层为2μm,耐压层为0.5μm时,其埋氧层电场提高到常规结构的1.5倍,击穿电压提高53.5%。同时,由于源极下硅窗口缓解SOI器件自热效应,使得在栅电压15V,漏电压30V时器件表面最高温度较常规SOI降低了34.76K。 展开更多
关键词 薄硅层 介质场增强 阶梯埋氧 耐压 调制 自热效应
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薄硅层SOI MOSFET击穿电压的二维数值分析 被引量:1
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作者 张兴 黄敞 《微电子学与计算机》 CSCD 北大核心 1992年第6期1-3,共3页
文章主要分析讨论薄层SOI(绝缘层上的硅)器件的击穿特性。采用两种载流子产生、复合作用的器件模型进行二维数值模拟的方法,揭示了薄硅层OSI MOSFET击穿电压降低是由于漏区附近电场强度增强引起的机理。
关键词 MOSFET 击穿电压 薄硅层
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SIMOX技术及CMOS/SIMOX器件的研究与发展 被引量:2
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作者 王阳元 陈南翔 王忠烈 《电子学报》 EI CAS CSCD 北大核心 1992年第5期75-80,共6页
SIMOX技术是最具有发展前途的SOI技术之一。在发展薄硅层、深亚微米OMOS/SOI集成电路中,SIMOX技术占有极其重要的地位。本文综述了SIMOX基片的形成、高质量SIMOX基片的制备方法。阐述了薄硅层OMOS/SIMOX器件的工艺特点以及器件的性能特... SIMOX技术是最具有发展前途的SOI技术之一。在发展薄硅层、深亚微米OMOS/SOI集成电路中,SIMOX技术占有极其重要的地位。本文综述了SIMOX基片的形成、高质量SIMOX基片的制备方法。阐述了薄硅层OMOS/SIMOX器件的工艺特点以及器件的性能特点。本文也就SIMOX技术及GMOS/SIMOX器件的研究现状及发展趋势进行了讨论。 展开更多
关键词 薄硅层 集成电路 离子注入 绝缘体
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A VHF PECVD Micro-Crystalline Silicon Bottom Gate TFT with a Thin Incubation Layer 被引量:1
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作者 李娟 赵淑云 +7 位作者 刘建平 吴春亚 张晓丹 孟志国 赵颖 熊绍珍 张丽珠 张震 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2005年第6期1121-1125,共5页
The incubation layer with amorphous structure between the substrate and crystalline layer may obviously affect the performance for a microcrystalline Si thin film transistor (μc-Si TFT),especially for the bottom gate... The incubation layer with amorphous structure between the substrate and crystalline layer may obviously affect the performance for a microcrystalline Si thin film transistor (μc-Si TFT),especially for the bottom gate TFT(BG-TFT).It is found that decreasing the ratio of SiH 4/(H 2+SiH 4) is an effective way to decrease the incubation layer thickness of μc-Si directly deposited by VHF PECVD without any further thermal or laser treatment.Based on the μc-Si with a thin incubation layer,the BG-TFT with Al/SiN x/μc-Si/n+-μc-Si/Al structure is fabricated.The ratio of on-state current to off-state current is up to 106,the mobility is around 0.7cm2/(V·s),and the threshold voltage is about 5V. 展开更多
关键词 microcrystalline silicon incubation layer silicon concentration bottom gate μc-Si TFT
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A Novel Radiation Tolerant SOI Isolation Structure
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作者 赵洪辰 海潮和 +2 位作者 韩郑生 钱鹤 司红 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2005年第7期1291-1294,共4页
A novel radiation tolerant SOI isolation structure,consisting of thin SiO2/polysilicon/field SiO2 multilayers,is proposed. A device with this structure does not show obvious changes in subthreshold characteristics and... A novel radiation tolerant SOI isolation structure,consisting of thin SiO2/polysilicon/field SiO2 multilayers,is proposed. A device with this structure does not show obvious changes in subthreshold characteristics and leakage current,indicating a superior radiation tolerance to traditional LOCOS. 展开更多
关键词 isolation structure radiation tolerance SOI
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Metal cation exchanged silica gel for identification of cationic and nonionic surfactants with preliminary separation by thin layer chromatography
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作者 Mohammacl Ali Khatoon Shumaila 《Journal of Chemistry and Chemical Engineering》 2009年第6期44-48,共5页
Silica gel impregnated with 1% aqueous solutions of different metal cations (Li^+, Mg^2+, Zn^2+, Cu^2+, Co^2+, Ni^2+, Ba^2+and Th^4+) has been used for the analysis of nonionic and cationic surfaetants using... Silica gel impregnated with 1% aqueous solutions of different metal cations (Li^+, Mg^2+, Zn^2+, Cu^2+, Co^2+, Ni^2+, Ba^2+and Th^4+) has been used for the analysis of nonionic and cationic surfaetants using simple aqueous acetone as mobile phase system. Co^2+ was found the most suitable impregnant for the mutual separation of nonionic surfactants (Brij-35 and Brij-57) and cationic from nonionic surfactants (tetmdecyltrimethylammonium bromide and Cween-20). Zinc sulphate impregnation (Zn^2+-silica gel) shows identical chromatographic behavior and these layers are useful to separate nonionic surfactant (Brij-35) from cationic surfaetant (cetylpyridinium chloride). The mutual separation of B J-35 and B J-57 is not influenced by the presence of optical brightener in the sample. 展开更多
关键词 TLC metal cations silica gel SURFACTANTS
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Ultrathin 3D radial tandem‐junction photocathode with a high onset potential of 1.15 V for solar hydrogen production
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作者 Shaobo Zhang Huiting Huang +8 位作者 Zhijie Zhang Jianyong Feng Zongguang Liu Junzhuan Wang Jun Xu Zhaosheng Li Linwei Yu Kunji Chen Zhigang Zou 《Chinese Journal of Catalysis》 SCIE EI CAS CSCD 2022年第7期1842-1850,共9页
Combining a progressive tandem junction design with a unique Si nanowire(SiNW)framework paves the way for the development of high‐onset‐potential photocathodes and enhancement of solar hydrogen production.Herein,a r... Combining a progressive tandem junction design with a unique Si nanowire(SiNW)framework paves the way for the development of high‐onset‐potential photocathodes and enhancement of solar hydrogen production.Herein,a radial tandem junction(RTJ)thin film water‐splitting photo‐cathode has been demonstrated experimentally for the first time.The photocathode is directly fab‐ricated on vapor‐liquid‐solid‐grown SiNWs and consists of two radially stacked p‐i‐n junctions,featuring hydrogenated amorphous silicon(a‐Si:H)as the outer absorber layer,which absorbs short wavelengths,and hydrogenated amorphous silicon germanium(a‐SiGe:H)as the inner layer,which absorbs long wavelengths.The randomly distributed SiNW framework enables highly efficient light‐trapping,which facilitates the use of very thin absorber layers of a‐Si:H(~50 nm)and a‐SiGe:H(~40 nm).In a neutral electrolyte(pH=7),the three‐dimensional(3D)RTJ photocathode delivers a high photocurrent onset of 1.15 V vs.the reversible hydrogen electrode(RHE),accompanied by a photocurrent of 2.98 mA/cm^(2) at 0 V vs.RHE,and an overall applied‐bias photon‐to‐current effi‐ciency of 1.72%.These results emphasize the promising role of 3D radial tandem technology in developing a new generation of durable,low‐cost,high‐onset‐potential photocathodes capable of large‐scale implementation。 展开更多
关键词 Solar hydrogen production 3D radial tandem junction Amorphous silicon photocathode Very thin absorber High onset potential
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