能量平衡法静电驱动柔性振膜微泵特性分析

从能量平衡的角度建立了静电驱动柔性振膜微泵的平衡方程,基于对压缩过程中振膜动能的考虑,改进了最小能量法压缩模型,结合均匀压力载荷下圆薄膜大挠度形变理论对静电驱动柔性振膜微泵进行理论分析。对振膜与腔体壁面贴合的压缩过程中各能量相互转化的关系进行分析,并与最小能量法模型进行了对比。结果表明,能量平衡法考虑了薄膜振动过程中的动能,故薄膜与腔体具有更大的贴合面积,且以薄膜与腔体完全贴合时作为零应力参考状态降低压缩过程中的薄膜形变势能,计算得到的静电微泵的压缩效率更高,在驱动电压为300 V时,改进的双腔模型中振膜贴合半径为4.06 mm,所得最大压升为87.08 k Pa。基于改进的模型,对双腔微泵压升的影响因素进行讨论,发现降低柔性薄膜厚度会使输出压力有所上升,并且减小腔体表面介电层厚度、减小腔体深度与半径可以有助于提高微泵的压升。

Tuning optical properties of ITO films grown by rf sputtering:Effects of oblique angle deposition and thermal annealing

Indium tin oxide(ITO)thin films were prepared using the technique of rf-sputtering with oblique angle deposition(OAD).The films were as-deposited and thermally treated at 250℃.The combination of substrate inclination and annealing was used for modifying morphological and structural properties that lead to changes of the optical properties.The resulting films show morphology of tilted nanocolumn,fissures among columns,and structural changes.The as-deposited films are structurally disordered with an amorphous component and the annealed films are crystallized and more ordered and the film diffractograms correspond to the cubic structure of In2O3.The refractive index could be modified up to 0.3 in as-deposited films and up to 0.15 in annealed films as functions of the inclination angle of the nanocolumns.Similarly,the band gap energy increases up to about 0.4 eV due to the reduction of the microstrain distribution.It is found that the microstrain distribution,which is related to lattice distortions,defects and the presence of fissures in the films,is the main feature that can be engineered through morphological modifications for achieving the adjustment of the optical properties.

Numerical Analysis of Tensile Bifurcation Phenomenon of a Film Bonded to a Substrate

To study the mechanical properties of the film/substrate structure, the finite element code ABAQUS v6.9-1 is adopted to simulate the tensile mechanical behavior of the nanoscale thin film bonded to a substrate. The bifurcation phenomenon of the structure under uniaxial tension is found： the single-neck deformation, the multiple-neck deforma- tion and the uniform deformation. The substrate and the film are regarded as power-hardening materials obeying the J2 deformation theory. Firstly, the influence of material hardening match on tensile bifurcation mode is analyzed under perfectly well-bonded interface condition. Then, the effects of interfacial stiffness and other superficial defects sur- rounding the imperfection on bifurcation mode are investigated. It is concluded that under the well-bonded interface condition, if the stress of the substrate is larger than the film, the film will uniformly deform with the substrate; if the stress of the substrate is smaller than the film, the film will form a single neck, except the case that a weakly-hardening film is bonded to a steeply-hardening substrate when multiple necks can be formed. With the decrease of interracial stiffness, the uniform deformation mode can transform into the multiple-neck deformation mode, and further transform into the single-neck deformation mode. And other defects surrounding the imperfection can influence the wavelength of deformation and neck number.

Effect of plastic deformation on diffusion-rolling bonding of steel sandwich plates

Diffusion bonding is one of the most important techniques for composite materials, while bonding temperature, holding time,and rolling reduction are the key parameters that affect the bonding strength of sandwich plates. To study the effect of plastic deformation on the bonding strength, laboratory experiments were carried on a Gleeble Thermal Simulator to imitate the diffusion-rolling bonding under different reductions for steel sandwich plates. The bonding strength and interlayer film thickness were measured, and the element diffusion was analyzed using line scanning. The relationship between the bonding strength and “diffused interlayer” thickness was investigated. It has been found that the bonding strength increases with reduction, whereas the interlayer film thickness decreases gradually as the reduction increases. The diffusion under plastic deformation is obviously enhanced in comparison with that of nil reduction. The mechanism of plastic deformation effect on the diffusion bonding and related models have been discussed.

主光轴平行于基底的微透镜阵列设计与制作

用聚二甲基硅氧烷(PDMS)软光刻工艺实现了一种主光轴平行于基底的微透镜阵列。首先对微透镜形成过程中的PDMS薄膜受力和变形情况进行了分析,并采用有限元分析方法对不同压力、不同厚度的薄膜变形情况进行了模拟,确定了合理的微透镜腔体结构;然后利用SU-8负模制作了PDMS微透镜腔体,将腔体与盖片进行了密闭封装,通过一定的压力向其注入紫外固化光学胶成型了微透镜阵列;最后使用自制装置对微透镜阵列的聚焦效果进行了测试。结果表明,提出的制作方法简单易行、成本低廉和焦距可控,而且易与其它的微系统集成到同一芯片。

流式细胞仪系统中液体变焦透镜的设计与制作

以聚二甲基硅烷(PDMS)为基础,设计制作了一种封闭式液体变焦透镜。通过对PDMS薄膜形变情况的仿真分析,利用Matlab数学建模与ANSYS结构仿真,得到薄膜形变结果,确定了合理的透镜腔体结构。在制备工艺上,首先利用SU-8模型制作了PDMS透镜腔,再使用混合PDMS制作出腔体的盖片;然后将两部分进行表面处理后键合,注射填充液、完成二次封装;最后对透镜的表面形变和焦距变化进行了测试,根据测试结果绘制了焦距-磁通量曲线。测试中,在磁通量从200mT到600mT的过程中,焦距由22.0mm变为20.2mm。结果表明,以本文方法制作变焦透镜,可以简化工艺步骤,降低制造成本,减小整体体积,焦距可控,有着更好的密封性,受外界环境干扰小。

Regularity analysis of wrinkles under the action of capillary force in an annular thin film

The wrinkling law of annular sheet which is induced by capillary force with inner liquid film is analyzed in this paper.The results show that the inner liquid film can wrinkle the annular sheet when the surface tension of the liquid film reaches a critical value,and the critical value can be dramatically altered by changing the geometry and properties of the annular sheet.The results obtained in this article may hold potential applications in generating three-dimensional structures through capillary effects.