Wearable devices have great application potential in the next generation of smart portable electronics,especially in the fields of medical monitoring,soft robotics,artificial intelligence,and human-machine interfaces....Wearable devices have great application potential in the next generation of smart portable electronics,especially in the fields of medical monitoring,soft robotics,artificial intelligence,and human-machine interfaces.Piezoelectric flexible strain sensors are key components of wearable devices.However,existing piezoelectric flexible strain sensors have certain limitations in weak signal monitoring due to their large modulus and low sensitivity.To solve this problem,the concept of Kirigami(paper-cutting)was introduced in this study to design the sensor structure.By comparing the Kirigami structures of different basic structures,the serpentine structure was determined as the basic configuration of the sensor.The serpentine structure not only provides excellent tensile properties,but also significantly improves the sensitivity of the sensor,which performs well in monitoring weak signals.On this basis,the adhesion properties of the flexible sensor were analyzed and tested,and the optimal ratio of the substrate was selected for preparation.In addition,a low-cost and rapid prototyping process for stretchable patches was established in this study.Using this technology,we prepared the sensor device and tested its performance.Finally,we successfully developed a flexible sensor with a sensitivity of 0.128 mV/μɛand verified its feasibility for wrist joint motion monitoring applications.This result opens up new avenues for the recovery care of tenosynovitis patients after surgery.展开更多
A silicon temperature sensor with a conventional resistor structure is fabricated on thin-film silicon-on-insulator (SOI) substrate.The sensor has very promising characteristics.The maximum operating temperature ca...A silicon temperature sensor with a conventional resistor structure is fabricated on thin-film silicon-on-insulator (SOI) substrate.The sensor has very promising characteristics.The maximum operating temperature can reach 550℃ even at a low current of 0.1mA.Experimental results support that the minority-carrier exclusion effect can be strong in the conventional resistor structure when the silicon film is sufficiently thin,thus significantly raising the maximum operating temperature.Moreover,since the structure of the device on thin-film SOI wafer is not crucial in controlling the maximum operating temperature,device layout can be varied according to the requirements of applications.展开更多
Flexible strain sensor devices were fabricated by depositing Pd nanoclusters on PET membranes patterned with interdigital electrodes. The sensors responded to the deformation of the PET membranes with the conductance ...Flexible strain sensor devices were fabricated by depositing Pd nanoclusters on PET membranes patterned with interdigital electrodes. The sensors responded to the deformation of the PET membranes with the conductance changes of the nanocluster films and were characterized by both high gauge factor and wide detection range. The response characteristics of the strain sensors were found to depend strongly on the nanocluster coverage, which was attributed to the percolative nature of the electron transport in the closely spaced nanocluster arrays. By controlling the nanocluster deposition process, a strain sensor composed of nanocluster arrays with a coverage close to the effective percolation threshold was fabricated. The sensor device showed a linear response with a stable gauge factor of 55 for the applied strains from the lower detection limit up to 0.3%. At higher applied strains, a gauge factor as high as 200 was shown. The nanocluster films also demonstrated the ability to response to large deformations up to 8% applied strain, with an extremely high gauge factor of 3500.展开更多
The bilayer poly(ethylene oxide)/multiple-walled carbon nanotubes(PEO/MWCNTs) and three-layer PEO/MWCNTs/PEO composite thin films were fabricated with the spraying process on the interdigitated transducers(IDTs) as ga...The bilayer poly(ethylene oxide)/multiple-walled carbon nanotubes(PEO/MWCNTs) and three-layer PEO/MWCNTs/PEO composite thin films were fabricated with the spraying process on the interdigitated transducers(IDTs) as gas sensors for toluene-sensing application.Compared with the bilayer thin film sensor,the sensor with three-layer thin films exhibited higher response values and better recovery property.The microstructures of sensing films were characterized by scanning electron microscopy(SEM) to indicate that the better sensing response of three-layer thin films might be ascribed to the sufficient adsorption of toluene molecules on the surfaces of upper and bottom PEO films.The selectivity of the three-layer film sensor was further investigated by comparing responses upon exposure to different interference vapors with the response to toluene exposure,and much higher response was observed in the case of toluene.Good repeatability of the three-layer film sensor was also observed.展开更多
基金supported by National Natural Science Foundation of China(Nos.62301509,62304209)Key Research and Development Program of Shanxi Province(No.202302030201001)Fundamental Research Program of Shanxi Province(Nos.202203021222079,0210302123203,202103021223185).
文摘Wearable devices have great application potential in the next generation of smart portable electronics,especially in the fields of medical monitoring,soft robotics,artificial intelligence,and human-machine interfaces.Piezoelectric flexible strain sensors are key components of wearable devices.However,existing piezoelectric flexible strain sensors have certain limitations in weak signal monitoring due to their large modulus and low sensitivity.To solve this problem,the concept of Kirigami(paper-cutting)was introduced in this study to design the sensor structure.By comparing the Kirigami structures of different basic structures,the serpentine structure was determined as the basic configuration of the sensor.The serpentine structure not only provides excellent tensile properties,but also significantly improves the sensitivity of the sensor,which performs well in monitoring weak signals.On this basis,the adhesion properties of the flexible sensor were analyzed and tested,and the optimal ratio of the substrate was selected for preparation.In addition,a low-cost and rapid prototyping process for stretchable patches was established in this study.Using this technology,we prepared the sensor device and tested its performance.Finally,we successfully developed a flexible sensor with a sensitivity of 0.128 mV/μɛand verified its feasibility for wrist joint motion monitoring applications.This result opens up new avenues for the recovery care of tenosynovitis patients after surgery.
文摘A silicon temperature sensor with a conventional resistor structure is fabricated on thin-film silicon-on-insulator (SOI) substrate.The sensor has very promising characteristics.The maximum operating temperature can reach 550℃ even at a low current of 0.1mA.Experimental results support that the minority-carrier exclusion effect can be strong in the conventional resistor structure when the silicon film is sufficiently thin,thus significantly raising the maximum operating temperature.Moreover,since the structure of the device on thin-film SOI wafer is not crucial in controlling the maximum operating temperature,device layout can be varied according to the requirements of applications.
基金supported by the National Natural Science Foundation of China(No.11627806)a Project funded by the Priority Academic Programme Development of Jiangsu Higher Education Institutions
文摘Flexible strain sensor devices were fabricated by depositing Pd nanoclusters on PET membranes patterned with interdigital electrodes. The sensors responded to the deformation of the PET membranes with the conductance changes of the nanocluster films and were characterized by both high gauge factor and wide detection range. The response characteristics of the strain sensors were found to depend strongly on the nanocluster coverage, which was attributed to the percolative nature of the electron transport in the closely spaced nanocluster arrays. By controlling the nanocluster deposition process, a strain sensor composed of nanocluster arrays with a coverage close to the effective percolation threshold was fabricated. The sensor device showed a linear response with a stable gauge factor of 55 for the applied strains from the lower detection limit up to 0.3%. At higher applied strains, a gauge factor as high as 200 was shown. The nanocluster films also demonstrated the ability to response to large deformations up to 8% applied strain, with an extremely high gauge factor of 3500.
基金supported by the National Natural Science Foundation of China(Grant Nos.61176066 and 61101031)
文摘The bilayer poly(ethylene oxide)/multiple-walled carbon nanotubes(PEO/MWCNTs) and three-layer PEO/MWCNTs/PEO composite thin films were fabricated with the spraying process on the interdigitated transducers(IDTs) as gas sensors for toluene-sensing application.Compared with the bilayer thin film sensor,the sensor with three-layer thin films exhibited higher response values and better recovery property.The microstructures of sensing films were characterized by scanning electron microscopy(SEM) to indicate that the better sensing response of three-layer thin films might be ascribed to the sufficient adsorption of toluene molecules on the surfaces of upper and bottom PEO films.The selectivity of the three-layer film sensor was further investigated by comparing responses upon exposure to different interference vapors with the response to toluene exposure,and much higher response was observed in the case of toluene.Good repeatability of the three-layer film sensor was also observed.
