The concept of an integrated "lab on a chip" has long been a goal for the micro-electro-mechanical-systems(MEMS) community.This would entail the integration of not only the sampling and analysis of various f...The concept of an integrated "lab on a chip" has long been a goal for the micro-electro-mechanical-systems(MEMS) community.This would entail the integration of not only the sampling and analysis of various functions,but also the ability to transmit this information off the chip to a central repository.This paper describes the initial steps in the fabrication of a "lab on a chip" which would continually analyze blood sampled via microneedles using techniques such as nano plasmonics,specifically,concentrations of glucose.The analysis could then be transmitted off the chip using digital signal processing.This paper describes the analysis and optimization of the microneedle shape and size and the fabrication of the resulting needles in silicon using deep reactive ion etching(DRIE).The paper also describes the opportunities for fabrication of such needles in alternative materials and describes the issues that still have to be overcome before such an integrated device is realized.展开更多
To improve overall equipment efficiency(OEE) of a semiconductor wafer wet-etching system,a heuristic tabu search scheduling algorithm is proposed for the wet-etching process in the paper,with material handling robot c...To improve overall equipment efficiency(OEE) of a semiconductor wafer wet-etching system,a heuristic tabu search scheduling algorithm is proposed for the wet-etching process in the paper,with material handling robot capacity and wafer processing time constraints of the process modules considered.Firstly,scheduling problem domains of the wet-etching system(WES) are assumed and defined,and a non-linear programming model is built to maximize the throughput with no defective wafers.On the basis of the model,a scheduling algorithm based on tabu search is presented in this paper.An improved Nawaz,Enscore,and Ham(NEH) heuristic algorithm is used as the initial feasible solution of the proposed heuristic algorithm.Finally,performances of the proposed algorithm are analyzed and evaluated by simulation experiments.The results indicate that the proposed algorithm is valid and practical to generate satisfied scheduling solutions.展开更多
文摘The concept of an integrated "lab on a chip" has long been a goal for the micro-electro-mechanical-systems(MEMS) community.This would entail the integration of not only the sampling and analysis of various functions,but also the ability to transmit this information off the chip to a central repository.This paper describes the initial steps in the fabrication of a "lab on a chip" which would continually analyze blood sampled via microneedles using techniques such as nano plasmonics,specifically,concentrations of glucose.The analysis could then be transmitted off the chip using digital signal processing.This paper describes the analysis and optimization of the microneedle shape and size and the fabrication of the resulting needles in silicon using deep reactive ion etching(DRIE).The paper also describes the opportunities for fabrication of such needles in alternative materials and describes the issues that still have to be overcome before such an integrated device is realized.
基金Supported by the National Natural Science Foundation of China(No.71071115,61273035)
文摘To improve overall equipment efficiency(OEE) of a semiconductor wafer wet-etching system,a heuristic tabu search scheduling algorithm is proposed for the wet-etching process in the paper,with material handling robot capacity and wafer processing time constraints of the process modules considered.Firstly,scheduling problem domains of the wet-etching system(WES) are assumed and defined,and a non-linear programming model is built to maximize the throughput with no defective wafers.On the basis of the model,a scheduling algorithm based on tabu search is presented in this paper.An improved Nawaz,Enscore,and Ham(NEH) heuristic algorithm is used as the initial feasible solution of the proposed heuristic algorithm.Finally,performances of the proposed algorithm are analyzed and evaluated by simulation experiments.The results indicate that the proposed algorithm is valid and practical to generate satisfied scheduling solutions.
