Semiconductor fabrication is a manufacturing sequence with hundreds of sophisticated unit operations and it is always challenged by strategy development for ensuring the yield of defect-free products.In this paper,an ...Semiconductor fabrication is a manufacturing sequence with hundreds of sophisticated unit operations and it is always challenged by strategy development for ensuring the yield of defect-free products.In this paper,an advanced control strategy through integrating product and process control is established.The proposed multiscale scheme contains three layers for coordinated equipment control,process control and product quality control.In the upper layer,online control performance assessment is applied to reduce the quality variation and maximize the overall product performance （OPP）.It serves as supervisory control to update the recipe of the process controller in the middle layer.The process controller is designed as an exponentially weighted moving average （EWMA） run-to-run controller to reject disturbances,such as process shift,drift and tool worn out,that are exerted to the op-eration.The equipment in the process is individually controlled to maintain its optimal operational status and maximize the overall equipment effectiveness （OEE）,based on the set point given by the process controller.The ef-ficacy of the proposed integrated control scheme is demonstrated through case studies,where both the OPP （for product） and the OEE （for equipment） are enhanced.展开更多
The controller design for hypersonic vehicle is critical and challenging because of the inherent couplings between the propulsion system and the airframe dynamics,as well as the presence of strong flexibility effects....The controller design for hypersonic vehicle is critical and challenging because of the inherent couplings between the propulsion system and the airframe dynamics,as well as the presence of strong flexibility effects.Many researchers have investigated various strategies to mitigate the coupling by means of robust design methods.This paper reviews the recent research efforts to promote the capability of control design for hypersonic vehicle.Methodologies such as robust control,adaptive control,sliding mode control and other hybrid methods have made significant progresses in hypersonic control.Then,the main challenges of control approaches for hypersonic vehicle are systematically analyzed in detail.展开更多
文摘Semiconductor fabrication is a manufacturing sequence with hundreds of sophisticated unit operations and it is always challenged by strategy development for ensuring the yield of defect-free products.In this paper,an advanced control strategy through integrating product and process control is established.The proposed multiscale scheme contains three layers for coordinated equipment control,process control and product quality control.In the upper layer,online control performance assessment is applied to reduce the quality variation and maximize the overall product performance （OPP）.It serves as supervisory control to update the recipe of the process controller in the middle layer.The process controller is designed as an exponentially weighted moving average （EWMA） run-to-run controller to reject disturbances,such as process shift,drift and tool worn out,that are exerted to the op-eration.The equipment in the process is individually controlled to maintain its optimal operational status and maximize the overall equipment effectiveness （OEE）,based on the set point given by the process controller.The ef-ficacy of the proposed integrated control scheme is demonstrated through case studies,where both the OPP （for product） and the OEE （for equipment） are enhanced.
基金supported by the National Natural Science Foundation of China (Grant Nos. 61273054,60975072,60604009)the Program for New Century Excellent Talents in University of China (Grant No. NCET-10-0021)+1 种基金the Aeronautical Foundation of China (Grant No. 20115151019)the Open Fund of the State Key Laboratory of Virtual Reality Technology and Systems (Grant No. VR-2011-ZZ-01)
文摘The controller design for hypersonic vehicle is critical and challenging because of the inherent couplings between the propulsion system and the airframe dynamics,as well as the presence of strong flexibility effects.Many researchers have investigated various strategies to mitigate the coupling by means of robust design methods.This paper reviews the recent research efforts to promote the capability of control design for hypersonic vehicle.Methodologies such as robust control,adaptive control,sliding mode control and other hybrid methods have made significant progresses in hypersonic control.Then,the main challenges of control approaches for hypersonic vehicle are systematically analyzed in detail.
