纳米尺寸膜厚标准样片的椭偏分析

针对膜厚标准样片的高精度测量问题,基于光谱型椭偏仪测量系统,提出对膜厚标准样片逐层分析的方法。利用相应的匹配算法,对比硅上二氧化硅模厚标准样片的等效结构模型和四相结构模型,实现对薄膜样片的厚度表征和椭偏分析。其次,通过对样片进行为期12周的测量考核,完成对薄膜样片表层分子吸附机理的分析。实验结果表明:针对研制的标称值为2~1 000 nm硅上二氧化硅膜厚标准样片,中间层的厚度存在先递减后递增的趋势。其中,在标称值为50~500 nm范围内,等效结构模型与四相结构模型测量结果的绝对误差在±0.2 nm以内,因此,可以采用等效结构模型的方法开展仪器的校准工作。另外,提出通过加热实现对标准样片解吸附的方案,有效解决超薄膜样片的储存问题。

Surface geometry and magnetism of Eu@C_(60) monolayer on Ag(111)

The surface geometry, electronic structure, and magnetism of Eu@C60 monolayer absorbed on Ag(111) have been investigated within the framework of density functional theory. The Eu@C60 monolayer has been constructed on Ag(111) substrate by one of the hexagon faces of C60 downward and its mirror plane face parallel to Ag(111). The Eu@C60 monolayer induces a recon- struction of the Ag(111) substrate and the perpendicular distance between the Eu@C60 and Ag(111) surface is 2.06 A, being shorter than that between C60 and Ag(lll) surface by 0.05A. There is no chemical bond formed between the Eu@C60 and Ag(111), and only 0.55e transferred from Ag(111) to Eu@C60. A large magnetic moment about 6.80/μB per unit cell is found for Eu@C60/Ag(111) system.