Al-doped ZnO (ZAO) films were successfully deposited on the surface of common glasses by using low-temperature hydrothermal approach. In the reaction solution, the molar ratio of Al3+ to Zn2+ was 1∶100, the annealing...Al-doped ZnO (ZAO) films were successfully deposited on the surface of common glasses by using low-temperature hydrothermal approach. In the reaction solution, the molar ratio of Al3+ to Zn2+ was 1∶100, the annealing temperature and time were 200 ℃ and 2-6 h, respectively. The structure of the thin films was identified by X-ray diffraction (XRD), the surface morphology and thickness of the thin films were observed by scanning electron microscopy (SEM), and the electrical performance of the thin films was measured by four-point probes. It was shown that the films with an average particle size of 27.53 nm had a preferential orientation along (002), Al3+ had replaced the position of Zn2+ in the lattice without forming the Al2O3 phase and its thickness was 20-25 μm. With the increased annealing time, the intensity of diffraction peaks was decreased, the film exhibited irregular surface morphology gradually, and the resistivity of ZAO films was increased. The lowest resistivity obtained in this study was 3.45×10-5Ω·cm.展开更多
We developed a measuring instrument that had wide range, high precision, small measuring touch force. The instrument for three-dimensional (3D) surface topography measurement was composed of a high precision displacem...We developed a measuring instrument that had wide range, high precision, small measuring touch force. The instrument for three-dimensional (3D) surface topography measurement was composed of a high precision displacement sensor based on the Michelson interference principle, a 3D platform based on vertical scanning, a measuring and control circuit, and an industrial control computer. It was a closed loop control system, which changed the traditional moving stylus scanning style into a moving platform scanning style. When the workpiece was measured, the lever of the displacement sensor returned to the balanced position in every sample interval according to the zero offset of the displacement sensor. The non-linear error caused by the rotation of the lever was, therefore, very small even if the measuring range was wide. The instrument can measure the roughness and the profile size of a curved surface.展开更多
文摘Al-doped ZnO (ZAO) films were successfully deposited on the surface of common glasses by using low-temperature hydrothermal approach. In the reaction solution, the molar ratio of Al3+ to Zn2+ was 1∶100, the annealing temperature and time were 200 ℃ and 2-6 h, respectively. The structure of the thin films was identified by X-ray diffraction (XRD), the surface morphology and thickness of the thin films were observed by scanning electron microscopy (SEM), and the electrical performance of the thin films was measured by four-point probes. It was shown that the films with an average particle size of 27.53 nm had a preferential orientation along (002), Al3+ had replaced the position of Zn2+ in the lattice without forming the Al2O3 phase and its thickness was 20-25 μm. With the increased annealing time, the intensity of diffraction peaks was decreased, the film exhibited irregular surface morphology gradually, and the resistivity of ZAO films was increased. The lowest resistivity obtained in this study was 3.45×10-5Ω·cm.
基金the National Science Foundation of China (No.50745020).
文摘We developed a measuring instrument that had wide range, high precision, small measuring touch force. The instrument for three-dimensional (3D) surface topography measurement was composed of a high precision displacement sensor based on the Michelson interference principle, a 3D platform based on vertical scanning, a measuring and control circuit, and an industrial control computer. It was a closed loop control system, which changed the traditional moving stylus scanning style into a moving platform scanning style. When the workpiece was measured, the lever of the displacement sensor returned to the balanced position in every sample interval according to the zero offset of the displacement sensor. The non-linear error caused by the rotation of the lever was, therefore, very small even if the measuring range was wide. The instrument can measure the roughness and the profile size of a curved surface.
