TiA1SiN nano-composite coatings with Silicon contents from 4.1 to 23.9 at.% were deposited on Silicon wafers. The nano- hardness, microstructure, and adhesion force of the coatings were deeply affected by Silicon cont...TiA1SiN nano-composite coatings with Silicon contents from 4.1 to 23.9 at.% were deposited on Silicon wafers. The nano- hardness, microstructure, and adhesion force of the coatings were deeply affected by Silicon contents. The TiA1SiN with 9.0 at.% Silicon has a maximum hardness of 40.9 GPa, a highest adhesion force of 67 N and a lowest friction coefficient of 0.5. Microstructures show that Silicon doping increases the hardness of coating due to solid solution hardening effect and grain boundary enhancement effect. The amorphous Si3N4 matrix, which contains （Ti,Al）N nano-crystals, is formed as the Silicon content is increased. The matrix contributes to the nano-hardness and helps to resist surface oxidization. Especially, the matrix induces low surface roughness and decreases the friction coefficient.展开更多
基金supported by the National Natural Science Foundation of China(Grant No.51105222)the State Key Basic Research Program of China(Grant No.2012CB934101)+1 种基金the Science Fund of the State Key Laboratory of Tribology at Tsinghua University SKLT12A01Beijing Research Program(Grant No.100322002)
文摘TiA1SiN nano-composite coatings with Silicon contents from 4.1 to 23.9 at.% were deposited on Silicon wafers. The nano- hardness, microstructure, and adhesion force of the coatings were deeply affected by Silicon contents. The TiA1SiN with 9.0 at.% Silicon has a maximum hardness of 40.9 GPa, a highest adhesion force of 67 N and a lowest friction coefficient of 0.5. Microstructures show that Silicon doping increases the hardness of coating due to solid solution hardening effect and grain boundary enhancement effect. The amorphous Si3N4 matrix, which contains （Ti,Al）N nano-crystals, is formed as the Silicon content is increased. The matrix contributes to the nano-hardness and helps to resist surface oxidization. Especially, the matrix induces low surface roughness and decreases the friction coefficient.
