A new approach for rules-based optical proximity correction is presented.The discussion addresses on how to select and construct more concise and practical rules-base as well as how to apply that rules-base.Based on t...A new approach for rules-based optical proximity correction is presented.The discussion addresses on how to select and construct more concise and practical rules-base as well as how to apply that rules-base.Based on those ideas,several primary rules are suggested.The v-support vector regression method is used to generate a mathematical expression according to rule data.It enables to make correction according to any given rules parameters.Experimental results demonstrate applying rules calculated from the expression match well with that from the rule table.展开更多
We present an analysis of the xF_3(x,Q^2) structure function and Gross-Llewellyn Smith(GLS) sum rule taking into account the nuclear effects and higher twist correction. This analysis is based on the results presented...We present an analysis of the xF_3(x,Q^2) structure function and Gross-Llewellyn Smith(GLS) sum rule taking into account the nuclear effects and higher twist correction. This analysis is based on the results presented in[N.M. Nath, et al., Indian J. Phys. 90(2016) 117]. The corrections due to nuclear effects predicted in several earlier analysis are incorporated to our results of xF_3(x,Q^2) structure function and GLS sum rule for free nucleon, corrected upto next-next-to-leading order(NNLO) perturbative order and calculate the nuclear structure function as well as sum rule for nuclei. In addition, by means of a simple model we have extracted the higher twist contributions to the nonsinglet structure function xF_3(x,Q^2) and GLS sum rule in NNLO perturbative orders and then incorporated them to our results. Our NNLO results along with nuclear effect and higher twist corrections are observed to be compatible with corresponding experimental data and other phenomenological analysis.展开更多
文摘A new approach for rules-based optical proximity correction is presented.The discussion addresses on how to select and construct more concise and practical rules-base as well as how to apply that rules-base.Based on those ideas,several primary rules are suggested.The v-support vector regression method is used to generate a mathematical expression according to rule data.It enables to make correction according to any given rules parameters.Experimental results demonstrate applying rules calculated from the expression match well with that from the rule table.
基金Support from DAE-BRNS,India,as Major Research Project under Sanction No.2012/37P/36/BRNS/2018 dated 24 Nov.2012
文摘We present an analysis of the xF_3(x,Q^2) structure function and Gross-Llewellyn Smith(GLS) sum rule taking into account the nuclear effects and higher twist correction. This analysis is based on the results presented in[N.M. Nath, et al., Indian J. Phys. 90(2016) 117]. The corrections due to nuclear effects predicted in several earlier analysis are incorporated to our results of xF_3(x,Q^2) structure function and GLS sum rule for free nucleon, corrected upto next-next-to-leading order(NNLO) perturbative order and calculate the nuclear structure function as well as sum rule for nuclei. In addition, by means of a simple model we have extracted the higher twist contributions to the nonsinglet structure function xF_3(x,Q^2) and GLS sum rule in NNLO perturbative orders and then incorporated them to our results. Our NNLO results along with nuclear effect and higher twist corrections are observed to be compatible with corresponding experimental data and other phenomenological analysis.
