The defect detection of wafers is an important part of semiconductor manufacturing.The wafer defect map formed from the defects can be used to trace back the problems in the production process and make improvements in...The defect detection of wafers is an important part of semiconductor manufacturing.The wafer defect map formed from the defects can be used to trace back the problems in the production process and make improvements in the yield of wafer manufacturing.Therefore,for the pattern recognition of wafer defects,this paper uses an improved ResNet convolutional neural network for automatic pattern recognition of seven common wafer defects.On the basis of the original ResNet,the squeeze-and-excitation(SE)attention mechanism is embedded into the network,through which the feature extraction ability of the network can be improved,key features can be found,and useless features can be suppressed.In addition,the residual structure is improved,and the depth separable convolution is added to replace the traditional convolution to reduce the computational and parametric quantities of the network.In addition,the network structure is improved and the activation function is changed.Comprehensive experiments show that the precision of the improved ResNet in this paper reaches 98.5%,while the number of parameters is greatly reduced compared with the original model,and has well results compared with the common convolutional neural network.Comprehensively,the method in this paper can be very good for pattern recognition of common wafer defect types,and has certain application value.展开更多
The methods of visual recognition,positioning and orienting with simple 3 D geometric workpieces are presented in this paper.The principle and operating process of multiple orientation run le...The methods of visual recognition,positioning and orienting with simple 3 D geometric workpieces are presented in this paper.The principle and operating process of multiple orientation run length coding based on general orientation run length coding and visual recognition method are described elaborately.The method of positioning and orientating based on the moment of inertia of the workpiece binary image is stated also.It has been applied in a research on flexible automatic coordinate measuring system formed by integrating computer aided design,computer vision and computer aided inspection planning,with a coordinate measuring machine.The results show that integrating computer vision with measurement system is a feasible and effective approach to improve their flexibility and automation.展开更多
The concept of the degree of similarity between interval-valued intuitionistic fuzzy sets （IVIFSs） is introduced, and some distance measures between IVIFSs are defined based on the Hamming distance, the normalized H...The concept of the degree of similarity between interval-valued intuitionistic fuzzy sets （IVIFSs） is introduced, and some distance measures between IVIFSs are defined based on the Hamming distance, the normalized Hamming distance, the weighted Hamming distance, the Euclidean distance, the normalized Euclidean distance, and the weighted Euclidean distance, etc. Then, by combining the Hausdorff metric with the Hamming distance, the Euclidean distance and their weighted versions, two other similarity measures between IVIFSs, i. e., the weighted Hamming distance based on the Hausdorff metric and the weighted Euclidean distance based on the Hausdorff metric, are defined, and then some of their properties are studied. Finally, based on these distance measures, some similarity measures between IVIFSs are defined, and the similarity measures are applied to pattern recognitions with interval-valued intuitionistic fuzzy information.展开更多
Variety identification is important for maize breeding, processing and trade. The computer vision technique has been widely applied to maize variety identification. In this paper, computer vision technique has been su...Variety identification is important for maize breeding, processing and trade. The computer vision technique has been widely applied to maize variety identification. In this paper, computer vision technique has been summarized from the following technical aspects including image acquisition, image processing, characteristic parameter extraction, pattern recognition and programming softwares. In addition, the existing problems during the application of this technique to maize variety identification have also been analyzed and its development tendency is forecasted.展开更多
Eased on the mechanism of temperature tactile sensing of human finger,a heat flux tactile sensor com- posed of a thermostat module and a heat flux sensor is designed to identify material thermal properties. The ther- ...Eased on the mechanism of temperature tactile sensing of human finger,a heat flux tactile sensor com- posed of a thermostat module and a heat flux sensor is designed to identify material thermal properties. The ther- mostat module maintains the sensor temperature invariable, and the heat flux sensor（Peltier device） detects the heat flux temperature difference between the thermostat module and the object surface. Two different modes of the heat flux tactile sensor are proposed, and they are simulated and experimented for different material objects. The results indicate that the heat flux tactile sensor can effectively identify different thermal properties.展开更多
Surface small defects are often missed and incorrectly detected due to their small quantity and unapparent visual features.A method named CSYOLOv3,which is based on CutMix and YOLOv3,is proposed to solve such a proble...Surface small defects are often missed and incorrectly detected due to their small quantity and unapparent visual features.A method named CSYOLOv3,which is based on CutMix and YOLOv3,is proposed to solve such a problem.First,a four-image CutMix method is used to increase the small-defect quantity,and the process is dynamically adjusted based on the beta distribution.Then,the classic YOLOv3 is improved to detect small defects accurately.The shallow and large feature maps are split,and several of them are merged with the feature maps of the predicted branch to preserve the shallow features.The loss function of YOLOv3 is optimized and weighted to improve the attention to small defects.Finally,this method is used to detect 512×512 pixel images under RTX 2060Ti GPU,which can reach the speed of 14.09 frame/s,and the mAP is 71.80%,which is 5%-10%higher than that of other methods.For small defects below 64×64 pixels,the mAP of the method reaches 64.15%,which is 14%higher than that of YOLOv3-GIoU.The surface defects of the workpiece can be effectively detected by the proposed method,and the performance in detecting small defects is significantly improved.展开更多
基金supported by the 2021 Annual Scientific Research Funding Project of Liaoning Pro-vincial Department of Education(Nos.LJKZ0535,LJKZ0526)the Natural Science Foundation of Liaoning Province(No.2021-MS-300)。
文摘The defect detection of wafers is an important part of semiconductor manufacturing.The wafer defect map formed from the defects can be used to trace back the problems in the production process and make improvements in the yield of wafer manufacturing.Therefore,for the pattern recognition of wafer defects,this paper uses an improved ResNet convolutional neural network for automatic pattern recognition of seven common wafer defects.On the basis of the original ResNet,the squeeze-and-excitation(SE)attention mechanism is embedded into the network,through which the feature extraction ability of the network can be improved,key features can be found,and useless features can be suppressed.In addition,the residual structure is improved,and the depth separable convolution is added to replace the traditional convolution to reduce the computational and parametric quantities of the network.In addition,the network structure is improved and the activation function is changed.Comprehensive experiments show that the precision of the improved ResNet in this paper reaches 98.5%,while the number of parameters is greatly reduced compared with the original model,and has well results compared with the common convolutional neural network.Comprehensively,the method in this paper can be very good for pattern recognition of common wafer defect types,and has certain application value.
文摘The methods of visual recognition,positioning and orienting with simple 3 D geometric workpieces are presented in this paper.The principle and operating process of multiple orientation run length coding based on general orientation run length coding and visual recognition method are described elaborately.The method of positioning and orientating based on the moment of inertia of the workpiece binary image is stated also.It has been applied in a research on flexible automatic coordinate measuring system formed by integrating computer aided design,computer vision and computer aided inspection planning,with a coordinate measuring machine.The results show that integrating computer vision with measurement system is a feasible and effective approach to improve their flexibility and automation.
基金The National Natural Science Foundation of China (No70571087)the National Science Fund for Distinguished Young Scholarsof China (No70625005)
文摘The concept of the degree of similarity between interval-valued intuitionistic fuzzy sets （IVIFSs） is introduced, and some distance measures between IVIFSs are defined based on the Hamming distance, the normalized Hamming distance, the weighted Hamming distance, the Euclidean distance, the normalized Euclidean distance, and the weighted Euclidean distance, etc. Then, by combining the Hausdorff metric with the Hamming distance, the Euclidean distance and their weighted versions, two other similarity measures between IVIFSs, i. e., the weighted Hamming distance based on the Hausdorff metric and the weighted Euclidean distance based on the Hausdorff metric, are defined, and then some of their properties are studied. Finally, based on these distance measures, some similarity measures between IVIFSs are defined, and the similarity measures are applied to pattern recognitions with interval-valued intuitionistic fuzzy information.
基金Special Fund for Science & Technology Research of Education Commission,Chongqing(KJ101302)~~
文摘Variety identification is important for maize breeding, processing and trade. The computer vision technique has been widely applied to maize variety identification. In this paper, computer vision technique has been summarized from the following technical aspects including image acquisition, image processing, characteristic parameter extraction, pattern recognition and programming softwares. In addition, the existing problems during the application of this technique to maize variety identification have also been analyzed and its development tendency is forecasted.
基金Supported by the National High Technology Research and Development Program of China(″863″Program)(2009AA01Z314,2009AA01Z311)the Jiangsu Province Natural Science Foundation(BK2009272)theJiangsu Province″333″Program~~
文摘Eased on the mechanism of temperature tactile sensing of human finger,a heat flux tactile sensor com- posed of a thermostat module and a heat flux sensor is designed to identify material thermal properties. The ther- mostat module maintains the sensor temperature invariable, and the heat flux sensor（Peltier device） detects the heat flux temperature difference between the thermostat module and the object surface. Two different modes of the heat flux tactile sensor are proposed, and they are simulated and experimented for different material objects. The results indicate that the heat flux tactile sensor can effectively identify different thermal properties.
基金The National Natural Science Foundation of China(No.52075095).
文摘Surface small defects are often missed and incorrectly detected due to their small quantity and unapparent visual features.A method named CSYOLOv3,which is based on CutMix and YOLOv3,is proposed to solve such a problem.First,a four-image CutMix method is used to increase the small-defect quantity,and the process is dynamically adjusted based on the beta distribution.Then,the classic YOLOv3 is improved to detect small defects accurately.The shallow and large feature maps are split,and several of them are merged with the feature maps of the predicted branch to preserve the shallow features.The loss function of YOLOv3 is optimized and weighted to improve the attention to small defects.Finally,this method is used to detect 512×512 pixel images under RTX 2060Ti GPU,which can reach the speed of 14.09 frame/s,and the mAP is 71.80%,which is 5%-10%higher than that of other methods.For small defects below 64×64 pixels,the mAP of the method reaches 64.15%,which is 14%higher than that of YOLOv3-GIoU.The surface defects of the workpiece can be effectively detected by the proposed method,and the performance in detecting small defects is significantly improved.
