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板式PECVD设备维护后初期的生产品质提升方案 被引量:1
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作者 王贵梅 赵环 +2 位作者 刘苗 朱少杰 孙晓凯 《太阳能》 2021年第2期74-77,共4页
以板式PECVd设备维护后的初期在多晶硅片表面镀的氮化硅薄膜为研究对象,分析了其膜厚、折射率、腐蚀速率等数据,以及此种镀膜情况下制备的多晶硅太阳电池的电性能。结果表明:在设备维护后初期(约1h)镀制的氮化硅薄膜,随着时间的推移,氮... 以板式PECVd设备维护后的初期在多晶硅片表面镀的氮化硅薄膜为研究对象,分析了其膜厚、折射率、腐蚀速率等数据,以及此种镀膜情况下制备的多晶硅太阳电池的电性能。结果表明:在设备维护后初期(约1h)镀制的氮化硅薄膜,随着时间的推移,氮化硅薄膜的膜厚不断下降,折射率随之上升,二者分别从第48 min和第56 min开始趋于稳定;将采用设备维护后64 min内制备的氮化硅薄膜的太阳电池的电性能与采用设备维护前64 min内制备的氮化硅薄膜的太阳电池的电性能进行对比后发现,前者的光电转换效率比后者的低0.05%,且设备维护后初期时制备的氮化硅薄膜的腐蚀速率偏高。通过监控角阀开度曲线,待角阀开度绝对值在中心值上下1%的范围内波动后再进行生产,可以避免设备维护后初期镀膜生产的太阳电池不良品的产生,对提高生产线良品率具有一定的指导意义。 展开更多
关键词 多晶硅太阳电池 板式PECVd设备 维护 膜厚 折射率 腐蚀速率 角阀开度
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Numerical Simulation on a Throttle Governing System with Hydraulic Butterfly Valves in a Marine Environment 被引量:2
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作者 万会雄 方俊 黄辉 《Journal of Marine Science and Application》 2010年第4期403-409,共7页
Hydraulic butterfly valves have been widely applied in marine engineering because of their large switching torque, low pressure loss and suitability for large and medium diameter pipelines. Due to control problems res... Hydraulic butterfly valves have been widely applied in marine engineering because of their large switching torque, low pressure loss and suitability for large and medium diameter pipelines. Due to control problems resulting from switching angular speeds of the hydraulic butterfly valve, a throttle-governing control mode has been widely adopted, and detailed analysis has been carried out worldwide on the structural principle concerning speed-regulation and the load torque on the shaft while opening or closing a hydraulic butterfly valve. However relevant reports have yet been published on the change law, the error and the influencing factors of the rotational angular velocity of the hydraulic butterfly valve while opening and closing. In this article, research was based on some common specifications of a hydraulic butterfly valve with a symmetrical valve flap existing in a marine environment. The throttle governing system supplied by the accumulator to achieve the switching of the hydraulic control valve was adopted, and the mathematical models of the system were established in the actual conditions while the numerical simulations took place. The simulation results and analysis show that the rotational angular velocity and the error of the hydraulic butterfly valve while switching is influenced greatly by the drainage amount of the accumulator, resulting in pressure loss in the pipeline, the temperature of hydraulic medium and the load of the hydraulic butterfly valve. The simulation results and analysis provide a theoretical basis for the choice of the total capacity of the accumulator and pipeline diameters in a throttle governing system with a hydraulic butterfly valve.It also determines the type and specification of the hydraulic butterfly valve and the design of motion parameters of the transported fluid. 展开更多
关键词 hydraulic butterfly valve throttle governing switching angular speed load characteristics numerical simulation
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