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激光等离子体诱发SiCl_4解离沉积硅膜的研究
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作者 张杰 张昌言 +3 位作者 蔺恩惠 李艳玲 邱明新 陆雪标 《高等学校化学学报》 SCIE EI CAS CSCD 北大核心 1991年第2期265-266,共2页
硅是重要半导体材料之一,其薄膜广泛应用于集成电路和太阳能电池。但用普通方法制备纯硅需要很高温度,而利用激光便可在低温下进行。因此激光诱导化学气相沉积技术是改革集成电路工艺和制备太阳能电池的一种很有希望的方法。本文用SiCl_... 硅是重要半导体材料之一,其薄膜广泛应用于集成电路和太阳能电池。但用普通方法制备纯硅需要很高温度,而利用激光便可在低温下进行。因此激光诱导化学气相沉积技术是改革集成电路工艺和制备太阳能电池的一种很有希望的方法。本文用SiCl_4代替通常使用的SiH_4,用TEA CO_2激光诱导SiCl_4解离气相沉积硅膜。 展开更多
关键词 LCVD 等离子体 SiCl4 解离沉积
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High efficient Sr/S isolation for preparing Sr(OH)_2 from celestite(SrSO_4) in alkaline solution 被引量:1
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作者 CHEN Si-ming DUAN Dong-ping +3 位作者 LIU Yan ZHOU E HAN Hong-liang ZOU Xing-wu 《Journal of Central South University》 SCIE EI CAS CSCD 2019年第1期219-228,共10页
The bottleneck of strontium compounds preparing from celestite is the promotion of Sr/S isolation efficiency.Low energy consumption and zero release method for isolating Sr/S in preparing Sr(OH)2 process from celestit... The bottleneck of strontium compounds preparing from celestite is the promotion of Sr/S isolation efficiency.Low energy consumption and zero release method for isolating Sr/S in preparing Sr(OH)2 process from celestite in mild condition was described.Sr element remained in precipitation with formation of Sr(OH)2,while S element entered into leachate with formation of Na2SO4.The effects of initial concentration of NaOH,conversion temperature,liquid-to-solid(L/S)ratio and conversion time on Sr/S ratio of samples for celestite conversion were systematically investigated by experiments.The results demonstrated that the efficiency of Sr/S isolation increased with the initial concentration of NaOH,L/S ratio and conversion time,and decreased with conversion temperature.The maximum conversion ratio of Sr(OH)2 was 93.88%under the optimum condition,whose Sr/S ratio of sample could reach to 41.16.It illustrated that better isolation efficiency of celestite could be achieved in alkaline treatment.The results of SEM-EDS analyses demonstrated that the conversion reaction was a dissolution-precipitation process. 展开更多
关键词 CELESTITE Sr(OH)2 high efficient Sr/S isolation dissolution-precipitation process
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Adsorption Mechanism of Water Molecule on Goethite(010) Surface
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作者 XIU Fangyuan ZHOU Long +1 位作者 XIA Shuwei YU Liangmin 《Journal of Ocean University of China》 SCIE CAS 2016年第6期1021-1026,共6页
Abstract Goethite widely exists among ocean sediments; it plays an important role in fixing heavy metals and adsorbing organic contaminants. So the understanding of the adsorbing process of water molecule on its surfa... Abstract Goethite widely exists among ocean sediments; it plays an important role in fixing heavy metals and adsorbing organic contaminants. So the understanding of the adsorbing process of water molecule on its surface will be very helpful to further reveal such environmental friendly processes. The configuration, electronic properties and interaction energy of water molecules adsorbed on pnma goethite (010) surface were investigated in detail by using density functional theory on 6-31G (d,p) basis set and projec- tor-augment wave (PAW) method. The mechanism of the interaction between goethite surface and H20 was proposed. Despite the differences in total energy, there are four possible types of water molecule adsorption configurations on goethite (010) surface (Aa, Ab, Ba, Bb), forming coordination bond with surface Fe atom. Results of theoretical modeling indicate that the dissociation process of adsorbed water is an endothermic reaction with high activation energy. The dissociation of adsorbed water molecule is a proton transportation process between water's O atoms and surface. PDOS results indicate that the bonding between 1-120 and (010) surface is due to the overlapping of water's 2p orbitals and Fe's 3d orbitals. These results clarify the mechanism on how adsorbed water is dissociated on the surface of goethite and potentially provide useful information of the surface chemistry of goethite. 展开更多
关键词 density functional theory GOETHITE WATER ADSORPTION
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Mechanism and Properties of Al_(2)O_(3)-Ru Composite Coatings Prepared by Cathode Plasma Electrolytic Deposition
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作者 Xue Jianchao Jia Bo +4 位作者 Wang Yafei Feng Qing Chai Zuoqiang Hao Xiaojun Xue Juanqin 《稀有金属材料与工程》 SCIE EI CAS CSCD 北大核心 2024年第12期3306-3312,共7页
Alumina coatings doped with different precious metals were prepared by cathode plasma electrolytic deposition.Results show that the porosity of precious metal-doped alumina coatings(especially Al_(2)O_(3)-Ru)decreases... Alumina coatings doped with different precious metals were prepared by cathode plasma electrolytic deposition.Results show that the porosity of precious metal-doped alumina coatings(especially Al_(2)O_(3)-Ru)decreases,and the high-temperature cyclic oxidation resistance and spallation resistance are enhanced.The Al_(2)O_(3)-Ru composite coating shows better effect:its average oxidation rate K and average amount of oxide spallation G are minimum.Meanwhile,Nernst equation was used to explain the simultaneous deposition of precious metal and alumina,and the whole process and mechanism of deposition were analyzed. 展开更多
关键词 cathode plasma electrolytic deposition precious metal POROSITY high-temperature cyclic oxidation resistance spallation resistance
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